Microwave cavity and absorption measurement of minute specimen for system integration

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K05283
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 29030:Applied condensed matter physics-related
• Research Institution: University of Yamanashi
• Principal Investigator: Kato Hatsuhiro 山梨大学, 大学院総合研究部, 准教授 (00270174)
• Co-Investigator(Kenkyū-buntansha): 小川 和也 山梨大学, 大学院総合研究部, 准教授 (50335486) ; 加藤 初儀 苫小牧工業高等専門学校, 創造工学科, 教授 (80224525)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: マイクロ波 / 物性測定 / 集積化 / 平面回路

Outline of Final Research Achievements

The subject of this study was to find a microwave absorption measuring device that can measure even a minute specimen and the lower limit of the specimen. Our original idea is to use the localised waves formed around the specimen, and to apply the weak-form theory for developing a suitable microwave absorption analysis method.
It was found that a reliable measurement is possible even if the amount of specimen is suppressed to about 20 microliters provided that a material with a specific permittivity of about 2 is filled in the cavity of the planar type and the coaxial type waveguides. Furthermore, by applying the weak form theory, we have developed a basic equation that reflects the influence of the resonance device on the metal wall and a method for detecting material properties using this equation.

Free Research Field

デバイス設計

Academic Significance and Societal Importance of the Research Achievements

平面回路によるマイクロ波の共鳴装置は集積回路の実装技術との親和性が高く，マイクロ波集積回路に材料測定技術を融合させ得る可能性がある．集積回路の加工技術やその実装技術を統合する必要があるものの，マイクロ波化学やバイオ分析などをコンパクトな装置で効率的に実施できる技術の進展が期待できる．