Optimizing the thickness of the fluorescent thin film and enhancing contrast in electron-beam excitation assisted (EXA) super-resolution optical microscopy

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K05305
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 30020:Optical engineering and photon science-related
• Research Institution: Shizuoka University
• Principal Investigator: Wataru Inami 静岡大学, 電子工学研究所, 教授 (30542815)
• Co-Investigator(Kenkyū-buntansha): 中村 篤志 静岡大学, 工学部, 准教授 (50402243)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: 超解像顕微鏡 / 蛍光薄膜 / 酸化亜鉛

Outline of Final Research Achievements

A fluorescent thin film for an electron-beam excitation assisted (EXA) super-resolution optical microscope was prepared.In EXA microscopy, a convergent electron beam is irradiated onto a fluorescent thin film to produce a nano-light source. Therefore, a flat and uniform Al2O3 / ZnO / Al2O3 heterostructured fluorescent thin film was prepared by the atomic layer deposition method (ALD). Since the ALD method deposits at the atomic layer level, it is possible to produce a uniform film without defects. The developed fluorescent thin films have a smooth surface by inserting an Al2O3 buffer layer and an Al2O3 barrier layer, and brighter and spatially uniform cathodoluminescence (CL) emission was obtained compared to the ZnO-only case.

Free Research Field

光学

Academic Significance and Societal Importance of the Research Achievements

本研究では、原子レベルで平坦な表面や空間的に均一なCL発光などの特徴を有するAl2O3/ZnO/Al2O3二層あるいは多層膜蛍光体を開発した。これは、EXA顕微鏡において、高解像度かつ高コントラストな無染色イメージングや生きた細胞の動的な観察を実現するために必要なものである。これにより、基礎生物学や創薬だけでなく、物理・化学的な現象の解明など幅広い分野の進展に大きく貢献できる。