2022 Fiscal Year Final Research Report
Research on Speckle Noise Suppression in Confocal Microscopy
| Project/Area Number |
19K14860
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| Research Category |
Grant-in-Aid for Early-Career Scientists
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| Allocation Type | Multi-year Fund |
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| Review Section |
Basic Section 18020:Manufacturing and production engineering-related
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| Research Institution | Nagasaki University |
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Principal Investigator |
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| Project Period (FY) |
2019-04-01 – 2023-03-31
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| Keywords | 共焦点顕微鏡 / スペックル / 光触針 / 光プローブ / 非接触形状計測 / 表面凹凸形状計測 / レーザ変位計 |
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| Outline of Final Research Achievements |
Confocal microscopes with high resolution are widely used for non-contact surface profiling of microstructures. However, the measurement accuracy is significantly compromised due to the presence of unnatural short-wavelength noise and sporadic outliers in the acquired measurements. These outliers are caused by speckle patterns generated by the surface microstructures within the illuminated spot. In this research project, we attempted to suppress the outliers by introducing a rotating phase modulation plate into the detection system, which intentionally alters the speckle pattern. As a result of our efforts, we demonstrated that using a glass disk treated with a blasting process as the phase modulation plate effectively suppresses the occurrence of sporadic outliers.
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| Free Research Field |
光応用計測
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| Academic Significance and Societal Importance of the Research Achievements |
これまでスペックルによる異常値の抑制に関する研究では，異常値を抑制するためスペックル自体の発生を抑制することに主眼が置かれていたが，本研究ではスペックルを変調し利用する方法により異常値の抑制を試みた．その成果として，デジタルフィルタでの除去が困難である突発的な異常値の抑制効果を確認した．これにより測定範囲が広いNAを使用した測定の信頼性が向上することができるようになるため，効率的にデバイス，材料の観察が可能となり開発能率の向上につながる．
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