2020 Fiscal Year Final Research Report
Micromaching for freeform generation by atmospheric pressure plasma jet and precision positioning
| Project/Area Number |
19K15419
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| Research Category |
Grant-in-Aid for Early-Career Scientists
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| Allocation Type | Multi-year Fund |
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| Review Section |
Basic Section 28050:Nano/micro-systems-related
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| Research Institution | Shizuoka University |
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Principal Investigator |
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| Project Period (FY) |
2019-04-01 – 2021-03-31
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| Keywords | マイクロマシニング / 大気圧プラズマジェット / 精密位置決め |
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| Outline of Final Research Achievements |
In this study, a micromachining system for freeform generation was developed, which is realized by etching a localized atmospheric pressure plasma jet with high-precision positioning using a scanning probe microscope technology. The scanning probe microscope technique was applied to position the atmospheric pressure plasma jet with high accuracy. The atmospheric pressure plasma jet was localized using a sharpened nozzle which was also used as a probe for positioning. The micromachining system and a control software were developed to perform multi-step etching. The nozzle was positioned with an accuracy of 20 nm, and a processing width of 18 um was achieved.
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| Free Research Field |
微細加工学，精密工学
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| Academic Significance and Societal Importance of the Research Achievements |
Microelectromechanical Systems（MEMS）の基盤技術は加工法であり，加工法の発展によってMEMSは発展してきた．大気圧プラズマは反応性ガスを材料と反応させて局所的に除去できるため従来は低圧下で困難であったマスクレスエッチングが可能になる．本研究は自由曲面形状を製作するプラットフォームを開発する中核技術となるため，発展性に優れていると考えられる．
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