Study of microparticles control by plasma and electrostatics force

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K21863
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 14:Plasma science and related fields
• Research Institution: Shizuoka University
• Principal Investigator: Shimizu Kazuo 静岡大学, イノベーション社会連携推進機構, 准教授 (90282681)
• Project Period (FY): 2019-06-28 – 2022-03-31
• Keywords: マイクロプラズマ / 微粒子 / 静電気 / プラズマアクチュエータ

Outline of Final Research Achievements

The microplasma electrode used in this study has a simple structure in which a high voltage electrode and a grounded electrode are faced together with a dielectric layer in between. The top electrode to which a high voltage is applied has a comb structure in which 23 line-type electrodes having a length of 30 mm and a width of 200 μm are arranged in parallel at an interval of 1 mm. The lower electrode was grounded and had a plate shape. The process of particle removal at 30 ms after the high voltage was applied. The fine particles are scattered after applying the voltage. As a result of experiments, it was observed that the removal rate of fine particles decreased as the frequency of applied voltage increased. In addition, the removal rate decreased as the particle diameter of the fine particles became larger.

Free Research Field

マイクロプラズマ応用

Academic Significance and Societal Importance of the Research Achievements

微粒子に関する問題は，ウエハ表面のコンタミネーションの除去や電気集じん装置，太陽電池表面上に堆積した砂の除去などといった研究がなされている．これらの微粒子除去手法としてマイクロプラズマ電極を用いることで、微粒子除去とその制御を可能とすることができた。その際、粒径が大きくなるにつれ除去率が減少することが確認された。微粒子粒径が大きくなるにつれ微粒子が帯電することにより発生するクーロン力よりも重力が上回るため、粒径が大きくなることで炭化タングステン微粒子が除去されなくなったと考えられる。