2021 Fiscal Year Final Research Report
Real time and localized analysis of pulse laser fine-machining mechanism based on Raman scattering with optical frequency comb
| Project/Area Number |
19K21919
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| Research Category |
Grant-in-Aid for Challenging Research (Exploratory)
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| Allocation Type | Multi-year Fund |
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| Review Section |
Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
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| Research Institution | Osaka University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
水谷 康弘 大阪大学, 工学研究科, 准教授 (40374152)
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| Project Period (FY) |
2019-06-28 – 2022-03-31
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| Keywords | 液中超短パルスレーザ加工 / フォトニック・ナノジェット / 電子増強ラマン散乱効果 / 光周波数コム・ラマン散乱解析 / ナノ局所界面計測 |
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| Outline of Final Research Achievements |
The novel in-situ measurement method of machining phenomena using ultrashort laser pulses is proposed to establish in-process machining control. In this study, in-situ measurements of laser ablation using a photonic nanojet were conducted. In water medium, it was experimentally clarified that cavitation bubbles generated by laser irradiation interfere with continuous pulse irradiation. We also established a method to detect the shock waves generated by laser irradiation by measuring vibrations of a microsphere probe. The in-situ measurement method for machining phenomena will not only contribute to further clarifying the phenomena of ultrashort laser pulse laser machining, but also to establishing a method for making high-quality micro structures.
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| Free Research Field |
機械工学・生産工学・加工計測
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| Academic Significance and Societal Importance of the Research Achievements |
超短パルスレーザーによるサブマイクロメートルオーダーの加工現象は，液中および空気中ともに未解明な部分が多い．したがって，超短パルスレーザーを用いた加工におけるインプロセス加工制御は未開拓な分野である．本研究の成果である加工現象のその場計測技術の確立は，超短パルスレーザー加工のさらなる現象解明に貢献するのみならず，付加価値の高い表面微細構造の作製手法の確立に貢献することができる．
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