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2012 Fiscal Year Final Research Report

An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications

Research Project

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Project/Area Number 20226010
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

ISHIDA Makoto  豊橋技術科学大学, 大学院・工学研究科, 教授 (30126924)

Co-Investigator(Kenkyū-buntansha) SAWADA Kazuaki  豊橋技術科学大学, 大学院・工学研究科, 教授 (40235461)
KAWASHIMA Takahiro  豊橋技術科学大学, 大学院・工学研究科, 准教授 (50378270)
KAWANO Takeshi  豊橋技術科学大学, 大学院・工学研究科, 准教授 (70452216)
Project Period (FY) 2008 – 2012
Keywords選択VLS成長 / シリコンプローブアレイ / マイクロチューブアレイ / 集積回路技術 / 細胞記録/刺激/薬剤投与 / 埋込み型マイクロデバイス / 脳神経科学 / ブレイン-マシ
Research Abstract

The goal of this project is to developtechnologies for integration of very fine out-of-plane silicon microprobe, silicon-dioxide microtubearrays with microelectronics using a “selective vapor-liquid-solid (VLS)growth”techniqueand three-dimensional microfabrication processes. Major achievements of the researchduring the project period includei) integration of microscalediameter probe electrode and tube arrays for simultaneous electrical recording, stimulation, and drug delivery system with a high spatialresolution, ii) realization of the microprobes with various lengths for three-dimensional recording/stimulationof neurons in a neuronal tissue, and iii) on-chip CMOS interface circuitry for high performanceelectronics includingamplifications and filtering of recorded neural signals, and data/power wireless transmission system. From these achievements,theproposed devicecould become apowerful technique to assist inunderstanding nervous systems and offerneural recording/stimulation and drug delivery in medical applications.

  • Research Products

    (33 results)

All 2012 2011 2010 2009 2008 Other

All Journal Article (15 results) (of which Peer Reviewed: 15 results) Presentation (13 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Vibration Analysis and Transmission Characteristics Of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr, Ti)O3 Thin Films on γ-Al2O3/Si Substrate2012

    • Author(s)
      D. Akai, K. Ozaki, Y. Numata, K. Suzuki,N. Nagaya and M. Ishida
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol.51 Pages: 11PA04

    • DOI

      DOI 10.1143/JJAP.51.11PA04

    • Peer Reviewed
  • [Journal Article] An overhanging carbon nanotube/parylene core-shell nanoprobe electrode2012

    • Author(s)
      T. Kawano, C. Y. ChoandL. Lin
    • Journal Title

      Sensors and Actuators A

      Volume: No.187 Pages: 79-83

    • DOI

      DOI 10.1016/j.sna.2012.08.025

    • Peer Reviewed
  • [Journal Article] Nanoscale Tipped Microwire Arrays Enhance Electrical Trap and Depth Injection of Nanoparticles2012

    • Author(s)
      A. Goryu, R. Numano,A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.23, No.41 Pages: 415301-7

    • DOI

      DOI 10.1088/0957-4484/23/41/415301

    • Peer Reviewed
  • [Journal Article] CMOS RF Transmitter Using Pulse width Modulation for Wireless Smart Sensors2012

    • Author(s)
      W. H. Lee,H. Takao, K.Sawadaand M. Ishida
    • Journal Title

      IEEE Trans. Comp., Pack. & Manufac. Tech.

      Volume: Vol.2, No. 9 Pages: 1501-1509

    • DOI

      DOI 10.1109/TCPMT.2012.2207956

    • Peer Reviewed
  • [Journal Article] RF Transmitter Using Dual Pulse Position Modulation Method for Low Power Smart Micro Sensing Chip2012

    • Author(s)
      B. J. Gu,W. H. Lee, K. Sawadaand M. Ishida
    • Journal Title

      IEEE Trans. Electrical & Electronic Eng.

      Volume: Vol.7, Issue 3 Pages: 337-341

    • DOI

      DOI 10.1002/tee.21737

    • Peer Reviewed
  • [Journal Article] Silicon based On-chip Antenna using an LC resonator for Near-field RF Systems2012

    • Author(s)
      K. Okabe, W. H. Lee, Y. Harada and M. Ishida
    • Journal Title

      Solid-State Electron.

      Volume: Vol.67 Pages: 100-104

    • DOI

      DOI 10.1016/j.sse.2011.08.002

    • Peer Reviewed
  • [Journal Article] Wireless Smart Sensor with Small Size Spiral Atnenna on Si-substrate2011

    • Author(s)
      B. J. Gu, W. H. Lee, K. Sawadaand M. Ishida
    • Journal Title

      Microelectron. J.

      Volume: Vol. 42 Pages: 1066-1073

    • DOI

      DOI 10.1016/j.mejo.2011.06.009

    • Peer Reviewed
  • [Journal Article] Heterogeneously Integrated Vapor-liquid-solid Grown Silicon probes/(111) and Silicon MOSFETs/(100)2011

    • Author(s)
      A. Okugawa, K. Mayumi, A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      IEEE Electron DeviceLett.

      Volume: Vol. 32, No.5 Pages: 683-685

    • DOI

      DOI 10.1109/LED.2011.2120590

    • Peer Reviewed
  • [Journal Article] Out-of-plane High-density Piezoresistive Silicon Microwire/p-n Diode Array for Force and Temperature Sensitive Artificial Whisker Sensors2011

    • Author(s)
      A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      J. Micromech. & Microeng.

      Volume: Vol. 21, No. 3 Pages: 035007(7)

    • DOI

      DOI 10.1088/0960-1317/21/3/035007

    • Peer Reviewed
  • [Journal Article] Enlarged Gold-tipped Silicon Microprobe Arrays and Signal Compensation for Multi-site Electroretinogram Recordings in the Isolated Carp Retina2011

    • Author(s)
      T. Harimoto, K. Takei, T. Kawano, A. Ishihara, T. Kawashima, H. Kaneko, M. Ishidaand S. Usui
    • Journal Title

      Biosensors & Bioelectron.

      Volume: Vol.26,No.5 Pages: 2368-2375

    • DOI

      DOI 10.1016/j.bios.2010.10.014

    • Peer Reviewed
  • [Journal Article] Nanoscale Sharpening Tips of Vapor-liquid-solid Grown Silicon Microwire Arrays2010

    • Author(s)
      A. Goryu, A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.21, No.12 Pages: 125302(5)

    • DOI

      DOI 10.1088/0957-4484/21/12/125302

    • Peer Reviewed
  • [Journal Article] Electrical Interfacing between Neurons and Electronics via Vertically-integrated Sub-4 Micron-diameter Silicon Probe Arrays Fabricated by Vapor-liquid-solid Growth2010

    • Author(s)
      T. Kawano, T. Harimoto, A. Ishihara, K. Takei, T. Kawashima, S. Usuiand M. Ishida
    • Journal Title

      Biosensors & Bioelectron.

      Volume: Vol.25, No.7 Pages: 1809-1815

    • DOI

      DOI 10.1016/j.bios.2009.12.037

    • Peer Reviewed
  • [Journal Article] Microtube-based Electrode Arrays for Low Invasive Extracellular Recording with a High Signal-to-noise Ratio2010

    • Author(s)
      K. Takei, T. Kawano, T. Kawashima, K.Sawada, H. Kanekoand M. Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol. 12, No. 1 Pages: 41-48

    • DOI

      DOI 10.1007/s10544-009-9356-y

    • Peer Reviewed
  • [Journal Article] Vertically aligned silicon microwire arrays of various lengths by repeated selective vapor-liquid-solid growth of n-type silicon/n-type silicon2009

    • Author(s)
      A. Ikedo, T. Kawashima, T. Kawanoand M. Ishida
    • Journal Title

      Appl. Phys. Lett.

      Volume: Vol.95, No.3 Pages: 033502(3)

    • DOI

      DOI 10.1063/1.3178556

    • Peer Reviewed
  • [Journal Article] Out-of-plane Microtube Arrays for Drug Delivery-Liquid Flow Properties and an Application to the Nerve Block Test2009

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Kaneko, K. Sawadaand M.Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol.11, No.3 Pages: 539-545

    • DOI

      DOI 10.1007/s10544-008-9259-3

    • Peer Reviewed
  • [Presentation] Bio-Medical Applications of smart sensing devices2012

    • Author(s)
      M. Ishida
    • Organizer
      2012 International Conference on Solid State Devices and Materials (SSDM2012)
    • Place of Presentation
      Kyoto
    • Year and Date
      2012-09-27
  • [Presentation] SmartMicro Sensing Chips for Life Innovation2012

    • Author(s)
      M. Ishida
    • Organizer
      2012 MRS Spring meeting & Exhibit
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2012-04-12
  • [Presentation] Three Dimensional Micro/nanowire Arrays for Sensing Applications2012

    • Author(s)
      T. Kawano
    • Organizer
      Japan Institute of Electronics Packaging (JIEP)
    • Place of Presentation
      Tokyo
    • Year and Date
      2012-03-07
  • [Presentation] Vertically Integrated Silicon Wires for Neural Interface and Artificial Whisker Electronics2011

    • Author(s)
      T. Kawano
    • Organizer
      KAIST Seminar
    • Place of Presentation
      Daejeon, Republic of Korea
    • Year and Date
      2011-02-25
  • [Presentation] Neural Interface Microprobe/Tube Array Devices2011

    • Author(s)
      T. Kawano
    • Organizer
      Ritsumeikan University
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-01-26
  • [Presentation] Smart Microchips for Intelligent Sensing2010

    • Author(s)
      M. Ishida, T. Kawanoand K. Sawada
    • Organizer
      2010 Seventh International Conference on IEEE Networked Sensing Systems(INSS)
    • Place of Presentation
      Kassel, Germany
    • Year and Date
      2010-06-16
  • [Presentation] Integrated Silicon Microprobe/Tube Arrays for Neural Interface2010

    • Author(s)
      T. Kawano
    • Organizer
      2nd UK-Japan Workshop on the Brain-Machine Interface
    • Place of Presentation
      Newcastle, UK
    • Year and Date
      2010-02-25
  • [Presentation] Integrated Neuroprobe/Tube Arrays: Microdevices for Neural Interface2010

    • Author(s)
      T. Kawano
    • Organizer
      International workshop on Advances in Neuroengineering(Osaka University Global COE Program)
    • Place of Presentation
      Osaka
    • Year and Date
      2010-02-01
  • [Presentation] Integrated Neuroprobe/Tube Arrays: Microdevices for Neural Interface2009

    • Author(s)
      T. Kawano
    • Organizer
      International Symposium on Toyohashi Global COE Program
    • Place of Presentation
      Tokyo
    • Year and Date
      2009-11-05
  • [Presentation] TUT Global COE and Core University Program2008

    • Author(s)
      M. Ishida
    • Organizer
      International Forum of Centers of Excellence(SRC/ERC)
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2008-12-12
  • [Presentation] Sensor Applications of Micro-process and Nanotechnology2008

    • Author(s)
      M. Ishida
    • Organizer
      21st International Microprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka
    • Year and Date
      2008-10-29
  • [Presentation] Siliconsmart microchips for intelligent sensing2008

    • Author(s)
      M. Ishida, T. Kawano, H. Takao and K. Sawada
    • Organizer
      2008 Symposium on VLSI Technology
    • Place of Presentation
      Honolulu, HI, USA
    • Year and Date
      2008-06-17
  • [Presentation] Bio-medical Si microchips with sensors and IC2008

    • Author(s)
      M. Ishida
    • Organizer
      The fourth international nanotechnology conference on communication and cooperation(INC4) International nanotechnology conference on communication and cooperation(INC4)
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-04-16
  • [Book] 新インターユニバーシティ集積回路2011

    • Author(s)
      石田誠, 石井仁
    • Total Pages
      184
    • Publisher
      株式会社オーム社
  • [Book] バイオテクノロジーシリーズ「ヘルスケアとバイオ医療のための先端デバイス機器(Advanced BioMedical Devices and Equipmentsfor Health Care)」2009

    • Author(s)
      石田誠, 澤田和明
    • Total Pages
      385
    • Publisher
      シーエムシー出版
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/

  • [Patent(Industrial Property Rights)] 差動増幅器およびこれを使用する信号増幅装置2012

    • Inventor(s)
      秋田一平,石田誠
    • Industrial Property Rights Holder
      秋田一平,石田誠
    • Industrial Property Number
      特願2012-267878
    • Filing Date
      2012-12-07
  • [Patent(Industrial Property Rights)] 中空マイクロチューブ構造およびその作製方法ならびに生体検査装置2010

    • Inventor(s)
      石田誠, 河野剛士, 川島貴弘, 竹井邦晴
    • Industrial Property Rights Holder
      豊橋技術科学大学
    • Industrial Property Number
      PCT/JP2010/54893
    • Filing Date
      2010-06-19

URL: 

Published: 2014-08-29  

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