2011 Fiscal Year Final Research Report
Fabrication of ordered nano-and microstructures on semiconductors using self-organized materials and their applications
| Project/Area Number |
20241026
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | Kogakuin University |
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Principal Investigator |
ONO Sachiko 工学院大学, 工学部, 教授 (90052886)
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| Co-Investigator(Kenkyū-buntansha) |
ASOH Hidetaka 工学院大学, 工学部, 准教授 (80338277)
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| Co-Investigator(Renkei-kenkyūsha) |
SUGII Yasuhiko 工学院大学, 付置研究所, 准教授 (90345108)
YASUKAWA Yukiko 工学院大学, 付置研究所, ポストドクター (10458995)
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| Project Period (FY) |
2008 – 2011
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| Keywords | ナノ材料 / ナノバイオ / 先端機能デバイス / 半導体超微細加工 / 材料加工・処理 |
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| Research Abstract |
We developed novel fabrication techniques, which are not achievable by conventional lithography techniques based on the dry process, for semiconductors(Si, GaAs, and InP) and light metals(Al and Ti) to form ordered nano-and microstructures by wet process using the structural feature of spontaneously generated patterns.
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