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2010 Fiscal Year Final Research Report

Fabrication of ultra high density nanohole array using combination of top-down and bottom-up approaches and its application for a high density magnetic storage media

Research Project

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Project/Area Number 20241027
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionKansai University

Principal Investigator

SINGUBARA Shoso  Kansai University, システム理工学部, 教授 (10231367)

Co-Investigator(Kenkyū-buntansha) TANAKA Syukichi  情報通信研究機構(独), 主任研究員 (40284608)
Co-Investigator(Renkei-kenkyūsha) SHIMIZU Tomohiro  関西大学, システム理工学部, 助教 (80581165)
Project Period (FY) 2008 – 2010
Keywords磁性体 / 磁気記録媒体 / ナノワイヤ / ナノホール / 自己組織化 / トップダウン / ボトムアップ / ナノインプリント
Research Abstract

We succeeded in the fabrication of ultra high density ferromagnetic nanorod array which density was ranged from 200 Giga to 2.5 Tera per square inch, using porous alumina nanohole array formed on Si substrate. The smallest diameter of nanorod is 10 nm, and the coercivity at room temperature is 2.0 kOe. Furthermore, we succeeded in shrinkage of the ordered nanohole array using a combination of top-down and bottom-up technology, namely, ion beam etching with electron beam lithography and anodic oxidation of aluminum.

  • Research Products

    (27 results)

All 2011 2010 2009 2008

All Journal Article (6 results) (of which Peer Reviewed: 5 results) Presentation (19 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Preparation of Ultra High Density Magnetic Nanowire Arrays beyond 1 Tera Bit/Inch^2 on Si Substrate Using AAO Template2011

    • Author(s)
      T.Shimizu, K.Aoki, Y.Tanaka, T.Terui, S.Shingubara
    • Journal Title

      Jpn.J.Appl.Phys. (to be published)

    • Peer Reviewed
  • [Journal Article] Large Magnetoresistance Switching Phenomena in Nanoconduction Path Formed with Dielectric Breakdown of SiO_2 Multilayered with Ferromagnetic Film2011

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Journal Title

      Jpn.J.Appl.Phys.

    • Peer Reviewed
  • [Journal Article] Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting2010

    • Author(s)
      S..Shingubara, S.Maruo, T.Yamashita, M.Nakao, T.Shimizu
    • Journal Title

      Micro-electronic Engineering 87

      Pages: 1451-1454

    • Peer Reviewed
  • [Journal Article] TRIAXIS MAGNETO-RESISTIVE (MR) SENSOR USING PERMALLOY PLATE OF DISTORTING MAGNETIC FIELD2010

    • Author(s)
      Suzuki M, Fukutani T, Hirata T, Aoyagi S, Shingubara S, Tajiri H , Yoshikawa Y, Nagahata T
    • Journal Title

      MEMS 2010 : 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, Proc.of IEEE MICRO ELECTRO MECHANICAL SYSTEMS

      Pages: 671-674

    • Peer Reviewed
  • [Journal Article] Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition2009

    • Author(s)
      H.Mori, T.Korenaga, N.Hosomi, T.Terui, S.Shingubara
    • Journal Title

      ECS Transactions 16(45)

      Pages: 65-71

    • Peer Reviewed
  • [Journal Article] Enormous Resistance Switching Phenomena Observed In Nickel-Aluminum-Oxide Nanocomposite2009

    • Author(s)
      S.Shingubara, S.Yamanishi, Y.Shiotani, S.Aoyagi, N.Tagawa, S.Nakahara, K.Saitoh, S.Tamura, T.Yamaguchi
    • Journal Title

      Science and Technology Report of Kansai University

      Pages: 1-9

  • [Presentation] Huge magnetoresistance switching in a ferromagnetic nano-conduction-path formed by dielectric breakdown2011

    • Author(s)
      T.Shimizu, Y.Shiotani, K.Shimomura, S.Shingubara
    • Organizer
      MORIS
    • Year and Date
      2011-06-23
  • [Presentation] Huge Resistance Switching Induced by Magnetic Field in a Ferro Magnetic Nano-Conduction Path (FNCP)2011

    • Author(s)
      T.Shimizu, Y.Shiotani, K.Shimomura, S.Shingubara
    • Organizer
      IEEE INTERMAG
    • Year and Date
      2011-04-26
  • [Presentation] Reduction of pitch of nanohole array by self-organizing anodic oxidation after pre-patterning with IBE on the surface of Al film2010

    • Author(s)
      Y.Ishida, S.Tanaka, T.Shimizu, S.Shinguhara
    • Organizer
      ICMNE 2010
    • Year and Date
      2010-12-15
  • [Presentation] Large magnetoresistance observed in a nano-conduction path formed with dielectric breakdown of SiO_2 connected with ferromagnetic layer2010

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Organizer
      ICAUMS 2010
    • Year and Date
      2010-12-06
  • [Presentation] Large magnetoresistance switching phenomena in a nano-conduction path formed with dielectric breakdown2010

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Organizer
      MNC2010
    • Year and Date
      2010-11-11
  • [Presentation] Change in magnetoresistance property depending on the state of Ni-oxide memory device2010

    • Author(s)
      K.Suzuki, Y.Shiotani, Y.Sumita, T.Shimizu, S.Shingubara
    • Organizer
      MNC2010
    • Year and Date
      2010-11-11
  • [Presentation] Preparation of ultra high density magnetic nanowire arrays beyond 1 tera bit/inch2 on Si substrate using AAO template2010

    • Author(s)
      K.Aoki, Y.Tanaka, T, Terui, T.Shimizu, S.Shingubara,
    • Organizer
      MNC2010
    • Year and Date
      2010-11-10
  • [Presentation] Enormous Magnetoresistance Switching Observed in partially Ni-filled AAO on Si2009

    • Author(s)
      S.Yamanishi, Y.Shiotani, K.Murakami, M.Takai, T.Shimizu, S.Shingubara
    • Organizer
      MNC 2009
    • Year and Date
      2009-11-09
  • [Presentation] Fabrication of Metal Nanowires Sandwiched with Gold for Self-Assembling of NW sensors2009

    • Author(s)
      M.Yamanaka, K.Aoki, Y.Ishida, Y.Ohya, S.Tanaka, T.Shimizu, S. Shingubara
    • Organizer
      MNC 2009
    • Year and Date
      2009-11-09
  • [Presentation] 陽極酸化アルミナを用いたSi基板上の磁性体ナノワイヤの形成2009

    • Author(s)
      青木和茂、前原誠、坂田智裕、新宮原正三
    • Organizer
      表面科学会講演会
    • Year and Date
      2009-10-15
  • [Presentation] AAOナノホールをテンプレートとしたハイブリットナノワイヤーの形成2009

    • Author(s)
      石田康晴、青木和茂、新宮原正三、大矢裕一
    • Organizer
      表面科学会講演会
    • Year and Date
      2009-10-15
  • [Presentation] Reduction of the Pitch of the Nano-Hole Array by Self-Organizing Anodic Oxidation After Nano-Imprinting2009

    • Author(s)
      S.Maruo, T.Yamashita, M.Nakao, T.Shimizu, S.Shingubara
    • Organizer
      MNE2009
    • Place of Presentation
      Ghent,Belgium
    • Year and Date
      2009-09-29
  • [Presentation] 新宮原正三"Ni-アルミナ・ナノコンポジットにおける巨大磁気抵抗スイッチング現象"2009

    • Author(s)
      塩谷裕一、山西卓、村上勝久、清水智弘
    • Organizer
      磁気学会2009年度学術講演会
    • Place of Presentation
      長崎市
    • Year and Date
      2009-09-14
  • [Presentation] Enormous Magneto-resistance Switching Observed in Ni-diffused Anodic Aluminum Oxide2009

    • Author(s)
      S.Yamanishi, Y.Shiotani, K.Murakami, T.Shimizu, S.Shingubara
    • Organizer
      Inter.Conf. on Magnetism 2009
    • Place of Presentation
      Karlsruhe, Germany
    • Year and Date
      2009-07-27
  • [Presentation] Enormaous resistance switching phenomena observed in Nickel-Alumina oxide nanocomposite2009

    • Author(s)
      S.Yamanishi, Y.Siotani, K.Murakami, T.Shimizu, S.Shingubara
    • Organizer
      IEEE Intermag 2009
    • Place of Presentation
      Sacramento, USA
    • Year and Date
      2009-05-06
  • [Presentation] Realizing 1/3 pitch of the alumna nano-hole array by self-organizing anodic oxidation after nano-imprinting2008

    • Author(s)
      S.Maruo, T.Yamashita, M.Nakao, T.Shimizu, S.Shingubara
    • Organizer
      2008 International Conference of MNC
    • Year and Date
      2008-10-18
  • [Presentation] Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition2008

    • Author(s)
      H.Mori, T.Korenaga, N.Hosomi, T.Terui, S.Shingubara
    • Organizer
      ECSPRIME 2008
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2008-10-15
  • [Presentation] Aspect Ratio Dependence of M-H Switching Characteristics of Oblong Ferromagnetic Film2008

    • Author(s)
      H.Oka, S.Yamanishi, S.Shingubara, K.Akabane
    • Organizer
      IUMRS 2008
    • Year and Date
      2008-10-10
  • [Presentation] Niナノワイヤの形成と磁気伝導特性評価2008

    • Author(s)
      山西卓、河上茂太、新宮原正三、清水智弘
    • Organizer
      第69回応用物理学会学術講演会
    • Year and Date
      2008-09-03
  • [Patent(Industrial Property Rights)] 巨大磁気抵抗素子及びその作製法2010

    • Inventor(s)
      新宮原正三、清水智弘、塩谷裕一
    • Industrial Property Rights Holder
      関西大学
    • Industrial Property Number
      特許,2010-251196
    • Filing Date
      2010-11-09
  • [Patent(Industrial Property Rights)] 陽極酸化アルミナの製造方法、陽極酸化アルミナ、および高密度構造体2008

    • Inventor(s)
      新宮原正三、山下尊史、中尾正史
    • Industrial Property Rights Holder
      関西大学、情報通信研究機構
    • Industrial Property Number
      特許,2008-031052
    • Filing Date
      2008-02-12

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Published: 2012-01-26   Modified: 2016-04-21  

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