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2011 Fiscal Year Final Research Report

Silicon Single-Dopant Electronics

Research Project

  • PDF
Project/Area Number 20241036
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionNTT Basic Research Laboratories

Principal Investigator

ONO Yukinori  日本電信電話株式会社NTT物性科学基礎研究所, 量子電子物性研究部, 主幹研究員 (80374073)

Co-Investigator(Kenkyū-buntansha) TSUCHIYA Toshiaki  島根大学, 総合理工学部, 教授 (20304248)
HORIGUCHI Seiji  工学資源学研究科, 教授 (60375219)
NISHIGUCHI Katsuhiko  日本電信電話株式会社NTT物性科学基礎研究所, 特別研究員 (00393760)
Co-Investigator(Renkei-kenkyūsha) YAMAGUCHI Toru  日本電信電話株式会社NTT物性科学基礎研究所, 主任研究員 (30393763)
MOHAMMED Khalafalla  日本電信電話株式会社NTT物性科学基礎研究所, 研究員 (70463627)
Project Period (FY) 2008 – 2011
Keywordsシングルドーパント / 単一電子制御
Research Abstract

In this project, we aim at the realization of technologies that enable us to manipulate single charges and spins, by using a true atom, or, dopant in silicon, rather than by using an artificial atoms, or quantum dots. Here, we established the way of identifying the position of individual dopants in a transistor and also clarified how each dopant had an impact on the transistor characteristics. In addition, we realized the "atom device" that controls motion of single charges by using a dopant embedded in silicon.

  • Research Products

    (61 results)

All 2012 2011 2010 2009 2008 Other

All Journal Article (24 results) (of which Peer Reviewed: 24 results) Presentation (34 results) Book (2 results) Remarks (1 results)

  • [Journal Article] Donor-Based Single Electron Pumps with Tunable Donor Binding Energy2012

    • Author(s)
      G. P. Lansbergen, Y. Ono, A. Fujiwara
    • Journal Title

      Nano Letters

      Volume: Vol.12 Pages: 763-768

    • Peer Reviewed
  • [Journal Article] Bound exciton photoluminescence from ion-implanted phosphorus in thin silicon layers2011

    • Author(s)
      H. Sumikura, K. Nishiguchi, Y. Ono, A. Fujiwara, M. Notomi
    • Journal Title

      Optics Express

      Volume: Vol.19, No.25 Pages: 2525-2562

    • Peer Reviewed
  • [Journal Article] Significance of the interface regarding magnetic properties of Mn-nanosilicide in silicon2011

    • Author(s)
      Y. Ono, Y. Miyazaki, S. Yabuuchi, H. Kageshima, M. Nagase, A. Fujiwara, E. Ohta
    • Journal Title

      Thin Solid Films

      Volume: Vol.519, No.24 Pages: 8505-8508

    • Peer Reviewed
  • [Journal Article] Impact of a few dopant positions controlled by deterministic single-ion doping on the transconductance of field-effect transistors2011

    • Author(s)
      M. Hori, T. Shinada, Y. Ono, A. Komatsubara, K. Kumagai, T. Tanii, T. Endoh, I. Ohdomari
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.99, No.6 Pages: 062103_1-3

    • Peer Reviewed
  • [Journal Article] Electrical measurements of terphenyl-based molecular devices2011

    • Author(s)
      T. Goto, H. Inokawa, Y. Ono, A. Fujiwara, K. Torimitsu
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol.50, No.7 Pages: 071603_1-6

    • Peer Reviewed
  • [Journal Article] Carrier transport in indium-doped p-channel silicon-on-insulator transistors doped with indium between 30 to 285 K2011

    • Author(s)
      M. A. H. Khalafalla, Y. Ono, J. Noborisaka, G. P. Lansbergen, A. Fujiwara
    • Journal Title

      J. Appl. Phys

      Volume: Vol.110, No.19 Pages: 014512_1-6

    • Peer Reviewed
  • [Journal Article] Single-electron counting statistics of shot noise in nanowire Si MOSFETs2011

    • Author(s)
      K. Nishiguchi, Y. Ono, A. Fujiwara
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.98, No.19 Pages: 193502_1-3

    • Peer Reviewed
  • [Journal Article] Enhancing secondary electron detection efficiency by applying a substrate bias voltage for deterministic single-ion Doping2011

    • Author(s)
      M. Hori, T. Shinada, K. Taira, A. Komatsubara, Y. Ono, T. Tanii, T. Endoh, I. Ohdomari
    • Journal Title

      Appl. Phys. Express

      Volume: Vol.4, No.3 Pages: 046501_1-2

    • Peer Reviewed
  • [Journal Article] Strong Stark effect in electroluminescence from phosphorous-doped silicon-on-insulator metal-oxide-semiconductor field-effect transistors2011

    • Author(s)
      J. Noborisaka, K. Nishiguchi, Y. Ono, H. Kageshima, A. Fujiwara
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.98, No.3 Pages: 033503_1-3

    • Peer Reviewed
  • [Journal Article] Capture/Emission Processes of Carriers in Heterointerface Traps Observed in the Transient Charge-Pumping Characteristics of SiGe/Si-Hetero-Channel pMOSFETs2011

    • Author(s)
      T. Tsuchiya
    • Journal Title

      Key Engineering Materials

      Volume: Vol.470 Pages: 201-206

    • Peer Reviewed
  • [Journal Article] Direct Observation of Fluctuations in the Number and Individual Electronic Properties of Interface Traps in Nanoscale Metal-Oxide-Semiconductor Field-Effect Transistors2010

    • Author(s)
      T. Tsuchiya
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol.49 Pages: 064001_1-5

    • Peer Reviewed
  • [Journal Article] Resonant escape over an oscillating barrier in a single-electron ratchet transfer2010

    • Author(s)
      S. Miyamoto, K. Nishiguchi, Y. Ono, K. M. Itoh, A. Fujiwara
    • Journal Title

      Phys. Rev. B

      Volume: Vol.82, No.3 Pages: 033303_1-4

    • Peer Reviewed
  • [Journal Article] Single-electron transport through single dopants in a dopant-rich environment Phys2010

    • Author(s)
      M. Tabe, D. Moraru, M. Ligowski, M. Anwar, R. Jablonski, Y. Ono, T. Mizuno
    • Journal Title

      Rev. Lett

      Volume: Vol.105, No.1 Pages: 016803_1-4

    • Peer Reviewed
  • [Journal Article] Tunneling spectroscopy of electron subbands in thin silicon-on-insulator metal-oxide-semiconductor field-effect transistors2010

    • Author(s)
      J. Noborisaka, K. Nishiguchi, H. Kageshima, Y. Ono, A. Fujiwara
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.96, No.11 Pages: 112102_1-3

    • Peer Reviewed
  • [Journal Article] Horizontal position analysis of single acceptors in Si nanoscale field-effect transistors2009

    • Author(s)
      M. A. H. Khalafalla, Y. Ono, K. Nishiguchi, A. Fujiwara
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.94, No.22 Pages: 223501_1-3

    • Peer Reviewed
  • [Journal Article] Electrons and holes in a 40nm thick silicon slab at cryogenic temperatures2009

    • Author(s)
      K. Takashina, K. Nishiguchi, Y. Ono, A. Fujiwara, T. Fujisawa, Y. Hirayama, K. Muraki
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.94, No.14 Pages: 142104_1-3

    • Peer Reviewed
  • [Journal Article] ナノスケールMOSデバイスにおける界面物性の揺らぎ-界面トラップ1個1個を検出して評価する-2009

    • Author(s)
      土屋敏章
    • Journal Title

      応用物理

      Volume: vol.78 Pages: 868-872

    • Peer Reviewed
  • [Journal Article] Escape dynamics of a few electrons in a single-electron ratchet using silicon nanowire metal-oxide-semiconductor field-effect transistor2008

    • Author(s)
      S. Miyamoto, K. Nishiguchi, Y. Ono, K. M. Itoh, A. Fujiwara
    • Journal Title

      Appl. Phys. Lett.

      Volume: Vol.93, No.22 Pages: 222103_1-3

    • Peer Reviewed
  • [Journal Article] Single-electron-resolution electrometer based on field-effect transistor2008

    • Author(s)
      K. Nishiguchi, C. Koechlin, Y. Ono, A. Fujiwara, H. Inokawa, H. Yamaguchi
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol.47, No.11 Pages: 8305-8310

    • Peer Reviewed
  • [Journal Article] Why the long-term charge offset drift in Si single-electron tunneling transistors is much smaller(better) than in metal-based ones : Two-level fluctuator stability2008

    • Author(s)
      N. M. Zimmerman, W. H. Huber, B. Simonds, E. Hourdakis, A. Fujiwara, Y. Ono, Y. Takahashi, H. Inokawa, M. Furlan, M. W. Keller
    • Journal Title

      J. Appl. Phys

      Volume: Vol.104, No. Pages: 033710_1-12

    • Peer Reviewed
  • [Journal Article] First-principles study on origin of ferromagnetism of MnSi1. 7 nanoparticles in Si2008

    • Author(s)
      S. Yabuuchi, H. Kageshima, Y. Ono, M. Nagase, A. Fujiwara, E. Ohta
    • Journal Title

      Phys. Rev. B

      Volume: Vol.78, No.4 Pages: 045307_1-7

    • Peer Reviewed
  • [Journal Article] Charge transport in boron-doped nano MOSFETs : Towards single-dopant electronics2008

    • Author(s)
      Y. Ono, M. Khalafalla, K. Nishiguchi, K. Takashina, A. Fujiwara, S. Horiguchi, H. Inokawa, Y. Takahashi
    • Journal Title

      Appl. Sur. Sci

      Volume: Vol.254, No.19 Pages: 6252-6256

    • Peer Reviewed
  • [Journal Article] Ferromagnetism of manganese-silicide nanopariticles in Silicon2008

    • Author(s)
      S. Yabuuchi, Y. Ono, H. Kageshima, M. Nagase, A. Fujiwara, E. Ohta
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol.47, No.6 Pages: 4487-4450

    • Peer Reviewed
  • [Journal Article] A gate-defined silicon quantum dot molecule2008

    • Author(s)
      H. W. Liu, T. Fujisawa, H. Inokawa, Y. Ono, A. Fujiwara, Y. Hirayama
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.92, No.22 Pages: 222104_1-3

    • Peer Reviewed
  • [Presentation] Charge transfer by multiple donors in a Si nanowire2011

    • Author(s)
      G. P. Lansbergen
    • Organizer
      2011 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Nagoya
    • Year and Date
      20110928-30
  • [Presentation] Quantum transport in deterministically implanted single-donors in Si FETs2011

    • Author(s)
      T. Shinada
    • Organizer
      2011 International Electron Devices Meeting
    • Place of Presentation
      San Fransisco, USA
    • Year and Date
      20110906-08
  • [Presentation] Subband energy manipulation by gate voltage in Si(100) hole system2011

    • Author(s)
      Y. Niida
    • Organizer
      The 18th International Conference on Electronic Properties of Two-Dimensional Systems
    • Place of Presentation
      Tallahassee, Florida
    • Year and Date
      20110725-29
  • [Presentation] Observation of new current peaks of Si single-electron transistor with a single-hole trap2011

    • Author(s)
      M. Sinohara
    • Organizer
      2011 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Kyoto
    • Year and Date
      20110612-13
  • [Presentation] Capture and emission kinetics of traps in MOSFETs2011

    • Author(s)
      G. P. Lansbergen
    • Organizer
      2011 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Kyoto
    • Year and Date
      20110612-13
  • [Presentation] Reliable Single Atom Doping and Discrete Dopant Effects on Transistor Performance2010

    • Author(s)
      T. Shinada
    • Organizer
      2010 International Electron Devices Meeting
    • Place of Presentation
      San Fransisco, USA
    • Year and Date
      20101206-08
  • [Presentation] KFM Observation of Single-Electron Filling in Dopant Arrays2010

    • Author(s)
      M. Anwar
    • Organizer
      2010 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tokyo
    • Year and Date
      20100922-24
  • [Presentation] Strong Stark effect of electroluminescence in thin SOI MOSFETs2010

    • Author(s)
      J. Noborisaka
    • Organizer
      2010 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tokyo
    • Year and Date
      20100922-24
  • [Presentation] Effect of Device Structure on Electrical Conduction of Terphenyl-based Molecule2010

    • Author(s)
      T. Goto
    • Organizer
      2010 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tokyo
    • Year and Date
      20100922-24
  • [Presentation] Electron-mobility suppression under valley-polarized region in Si quantum well2010

    • Author(s)
      Y. Niida
    • Organizer
      30^<th> International Conference on the Pysics of Semiconductors
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      20100725-30
  • [Presentation] Significance of the interface regarding magnetic properties of Mn nanosilicide in silicon2010

    • Author(s)
      Y. Ono
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides and Related materials Science and Technology Towards Sustainable Optoelectronics
    • Place of Presentation
      Tsukuba
    • Year and Date
      20100724-26
  • [Presentation] Enhancement of electron transport property in FET with asymmetric ordered dopant distribution2010

    • Author(s)
      M. Hori
    • Organizer
      18^<th> International Conference on Ion Implantation Technology
    • Place of Presentation
      Kyoto
    • Year and Date
      20100606-11
  • [Presentation] Fluctuations in Electronic Properties of Individual Interface Traps in Nanoscale MOSFETs2010

    • Author(s)
      T. Tsuchiya
    • Organizer
      International Symposium on Technology Evolution for Silicon Nano-Electronics
    • Place of Presentation
      Tokyo
    • Year and Date
      20100603-05
  • [Presentation] In plane transport in a double layer crystalline silicon stracture with an SiO_2 barrier2010

    • Author(s)
      K. Takashina
    • Organizer
      2010 International Symposium on Atom-scale Silicon Hybrid Nanotechnologies for'More. than-Moore' & 'Beyond CMOS' Era
    • Place of Presentation
      Southampton, UK
    • Year and Date
      20100301-02
  • [Presentation] Performance evaluation of MOSFETs with discrete dopant distribution by one-by-one doping method. SPIE Advanced Lithography-Alternative Lithographic Technologies II2010

    • Author(s)
      T. Shinada
    • Place of Presentation
      San Jose, USA
    • Year and Date
      20100221-25
  • [Presentation] Single-electron counting statistics of shot noise in nanowire Si MOSFETs2009

    • Author(s)
      K. Nishiguchi
    • Organizer
      2009 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sendai
    • Year and Date
      20091007-09
  • [Presentation] Tunnel spectroscopy of electron subbands in thin SOI MOSFETs2009

    • Author(s)
      J. Noborisaka
    • Organizer
      2009 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sendai
    • Year and Date
      20091007-09
  • [Presentation] Direct Observation of Fluctuations in Both the Number and Individual Carrier Capture Rate of Interface Traps in Small Gate-Area MOSFETs2009

    • Author(s)
      T. Tsuchiya
    • Organizer
      39th European Solid-State Device Research Conference
    • Place of Presentation
      Athens, Greece
    • Year and Date
      20090914-18
  • [Presentation] Single-electron devices based on silicon nanowire MOSFETs2009

    • Author(s)
      A. Fujiwara
    • Organizer
      Trends in NanoTechnology International Conference
    • Place of Presentation
      Barcelona, Spain
    • Year and Date
      20090907-11
  • [Presentation] Detection and position analysis of sinle and coupled acceptors in silicon nano field-effect transistors2009

    • Author(s)
      M. A. H. Khalafalla
    • Organizer
      2009 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Kyoto
    • Year and Date
      20090613-14
  • [Presentation] Effect ofδ-function-like boron charge sheet on p-channel ultra-thin SOI MOSFETs2009

    • Author(s)
      M. Kawach
    • Organizer
      2009 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Kyoto
    • Year and Date
      20090613-14
  • [Presentation] Fluctuation in Electronic Properties of Interface Traps in Nano-MOSFETs2009

    • Author(s)
      T. Tsuchiya
    • Organizer
      4th International Workshop on New Group IV Semiconductor Nanoelectronics
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      20090129-30
  • [Presentation] Asymmetric mobility of electrons and holes with respect to quantum-well potential in a double gate SIMOX MOSFET2009

    • Author(s)
      Y. Niida
    • Organizer
      International Symposium on Nanoscale Transport and Technology
    • Place of Presentation
      Atsugi
    • Year and Date
      20090120-23
  • [Presentation] In-plane transport in a double layer crystalline silicon structure with an SiO2 barrier2009

    • Author(s)
      K. Takashina
    • Organizer
      International Symposium on Nanoscale Transport and Technology
    • Place of Presentation
      Atsugi
    • Year and Date
      20090120-23
  • [Presentation] Detection and position analysis of sinle and coupled acceptors in silicon nano field-effect transistors2009

    • Author(s)
      M. A. H. Khalafalla
    • Organizer
      International Symposium on Nanoscale Transport and Technology
    • Place of Presentation
      Atsugi
    • Year and Date
      20090120-23
  • [Presentation] Capture/Emission Process of Carriers in Interface Traps Observed in the Transient Charge Pumping Characteristics of MOSFETs2008

    • Author(s)
      T. Tsuchiya
    • Organizer
      39th IEEE Semiconductor Interface Specialist Conference
    • Place of Presentation
      San Diego, USA
    • Year and Date
      20081211-13
  • [Presentation] Escape dynamics of electron in a single-electron ratchet using silicon nanowire MOSFETs2008

    • Author(s)
      S. Miyamoto
    • Organizer
      EEE Nanotechonology Materials and Devices Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      20081020-22
  • [Presentation] In-plane transport in a double layer crystalline silicon structure with an SiO2 barrier2008

    • Author(s)
      K. Takashina
    • Organizer
      IEEE Nanotechonology Materials and Devices Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      20081020-22
  • [Presentation] Single-electron devices and their circuit applications2008

    • Author(s)
      A. Fujiwara
    • Organizer
      2008 Tera-level nanodevices(TND) Technical Forum
    • Place of Presentation
      Korea
    • Year and Date
      20081006-07
  • [Presentation] Electron-hole transport in a 40 nm thick silicon slab

    • Author(s)
      K. Takashina
    • Organizer
      The 18th International Conference on Electronic Properties of Two-Dimensional Systems
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      00000719-24
  • [Presentation] Single-electron activation over an oscillating barrier in silicon nanowire MOSFETs

    • Author(s)
      S. Miyamoto
    • Organizer
      The 18th International Conference on Electronic Properties of Two-Dimensional Systems
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      00000719-24
  • [Presentation] Impact of a few dopant positions controlled by single-ion implantation on transconductance of FETs

    • Author(s)
      M. Hori
    • Organizer
      11th International Workshop on Junction Technology
    • Place of Presentation
      Kyoto
    • Year and Date
      00000609-10
  • [Presentation] Electroluminescence study of phosphorus ionization in silicon-on-insulator metal-oxide-semiconductor field-effect transistors

    • Author(s)
      J. Noborisaka
    • Organizer
      International Symposium on Nanoscale Transport and Technology
    • Place of Presentation
      Atsugi
    • Year and Date
      00000111-14
  • [Presentation] Charge switching in wire MOSFETs studied by separation of capture and emission

    • Author(s)
      G. P. Lansbergen
    • Organizer
      International Symposium on Nanoscale Transport and Technology
    • Place of Presentation
      Atsugi
    • Year and Date
      00000111-14
  • [Book] Silicon Single-Electron Devices, in" Device Applications of Silicon Nanocrystals and Nanostructures eds2009

    • Author(s)
      Y. Takahashi, Y. Ono, A. Fujiwara, K. Nishiguchi, and H. Inokaw, N. Koshida
    • Total Pages
      125-172
    • Publisher
      Springer
  • [Book] Single-electron transistor and its logic application, in "Information Technology II(volume 4) of Nanotechnology"2008

    • Author(s)
      Y. Ono, K. Nishiguchi, H. Inokawa, Y. Takahashi and A. Fujiwara
    • Total Pages
      45-68
    • Publisher
      Wiley-VCH Verlag
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/people/ono/index.html

URL: 

Published: 2013-07-31   Modified: 2015-06-03  

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