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2010 Fiscal Year Final Research Report

Si single-electron transfer devices using potential fluctuation by a few dopants

Research Project

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Project/Area Number 20246060
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShizuoka University

Principal Investigator

TABE Michiharu  静岡大学, 電子工学研究所, 教授 (80262799)

Co-Investigator(Kenkyū-buntansha) INOKAWA Hiroshi  静岡大学, 電子工学研究所, 教授 (50393757)
SATOH Hiroaki  静岡大学, 電子工学研究所, 助教 (00380113)
IKEDA Hiroya  静岡大学, 電子工学研究所, 准教授 (00262882)
Project Period (FY) 2008 – 2010
Keywords少数電子素子 / 電子デバイス・機器 / 半導体超微細化 / シリコン
Research Abstract

In this work, the following results have been obtained.(1) Even under existence of many phosphorous donors, a single donor determines sub-threshold characteristics.(2) In a device, where three phosphorous atoms determine the sub-threshold characteristics, single-electron transfer has been demonstrated.(3) By low-temperature Kelvin probe force microscopy, individual charged donors and acceptors were observed, and then potential change due to electron injection into the dopant was observed.

  • Research Products

    (42 results)

All 2011 2010 2009 2008 Other

All Journal Article (17 results) (of which Peer Reviewed: 17 results) Presentation (20 results) Book (2 results) Remarks (3 results)

  • [Journal Article] Kelvin Probe Force Microsco pe me as urement uncertainty2011

    • Author(s)
      M. Ligowski, M. Tabe and R. Jablonski
    • Journal Title

      Advanced Materials Research

      Volume: 222 Pages: 114-117

    • Peer Reviewed
  • [Journal Article] Memory effects based on dopant atoms innano-FETs2011

    • Author(s)
      D. Moraru, E. Hamid, J. C. Tarido, S. Miki, T. Mizuno and M. Tabe
    • Journal Title

      Advanced Materials Research

      Volume: 222 Pages: 122-125

    • Peer Reviewed
  • [Journal Article] Si-based single-dopant atom devices2011

    • Author(s)
      M. Tabe, D. Moraru, A. Udhiarto, S. Miki, M. Anwar, Y. Kawai and T. Mizuno
    • Journal Title

      Advanced Materials Research

      Volume: 222 Pages: 205-208

    • Peer Reviewed
  • [Journal Article] Single-photon detection by Si single-electron FETs2011

    • Author(s)
      M. Tabe, A. Udhiarto, D. Moraru and T. Mizuno
    • Journal Title

      Phys. Status Solidi A

      Volume: 208 Pages: 646-651

    • Peer Reviewed
  • [Journal Article] KFM Observation of Electron Charging and Discharging in Phosphorus-Doped SOI Channel2011

    • Author(s)
      M. Anwar, D. Moraru, Y. Kawai, M. Ligowski, T. Mizuno, R. Jablonski, M. Tabe
    • Journal Title

      Key Engineering Materials

      Volume: 470 Pages: 33-38

    • Peer Reviewed
  • [Journal Article] Tunable Single-Electron Turnstile using Discrete Dopants in Nanoscale SOI-FETs2011

    • Author(s)
      D. Moraru, K. Yokoi, R. Nakamura, S. Miki, T. Mizuno and M. Tabe
    • Journal Title

      Key Engineering Materials

      Volume: 470 Pages: 27-32

    • Peer Reviewed
  • [Journal Article] Single-electron transfer between two donors in nanoscale thin silicon-on-insulator field-effect transistors2010

    • Author(s)
      E. Hamid, D. Moraru, J. C. Tarido, S. Miki, T. Mizuno and M. Tabe
    • Journal Title

      Appl. Phys. Lett.

      Volume: 97 Pages: 262101-1-3

    • Peer Reviewed
  • [Journal Article] Electrical control of capacitance dispersion for single-electron turnstile operation in common-gated junction arrays2010

    • Author(s)
      K. Yokoi, D. Moraru, T. Mizuno and M. Tabe
    • Journal Title

      J. Appl. Phys.

      Volume: 108 Pages: 053710-1-5

    • Peer Reviewed
  • [Journal Article] Single-Electron Transpo rtthrough Single Dopants in a Dopant-Rich Environment2010

    • Author(s)
      M. Tabe, D. Moraru, M. Ligowski, M. Anwar, R. Jablonski, Y. Ono and T. Mizuno
    • Journal Title

      Phys. Rev. Lett.

      Volume: 105 Pages: 016803-1-4

    • Peer Reviewed
  • [Journal Article] Observation of Discrete Do pant Potential and Its Application to Si Single-Electron Devices2010

    • Author(s)
      M. Tabe, D. Moraru, M. Ligowski, M. Anwar, K. Yokoi, R. Jablonski and T. Mizuno
    • Journal Title

      Thin Solid Films

      Volume: 518 Pages: S38-S43

    • Peer Reviewed
  • [Journal Article] Detection of in dividual dopants in single-electron devices-A study by KFM observation and simulation2009

    • Author(s)
      M. Ligowski, D. Moraru, M. Anwar, J. C. Tarido, T. Mizuno, M. Tabe, R. Jablonski
    • Journal Title

      Journal of Automation, Mobile Robotics & Intelligent Systems

      Volume: 3 Pages: 130-133

    • Peer Reviewed
  • [Journal Article] Single-electron transport characte ristics in quantum dot arrays due to ionized dopants2009

    • Author(s)
      D. Moraru, M. Ligowski, J. C. Tarido, S. Miki, R. Nakamura, K. Yokoi, T. Mizuno, M. Tabe
    • Journal Title

      Journal of Automation, Mobile Robotics & Intelligent Systems

      Volume: 3 Pages: 52-54

    • Peer Reviewed
  • [Journal Article] A photon position sensor consisting of single-electron circuits2009

    • Author(s)
      A. K. Kikombo, M. Tabe and Y. Amemiya
    • Journal Title

      Nanotechinology

      Volume: 20 Pages: 405209-1-7

    • Peer Reviewed
  • [Journal Article] Single-Electron Transfer by Inter-Dopant Coupling Tuning in Doped Nanowire Silicon-On-Insulator Field-Effect Transistors2009

    • Author(s)
      D. Moraru, M. Ligowski, K. Yokoi, T. Mizuno and M. Tabe
    • Journal Title

      Appl. Phys. Express

      Volume: 2 Pages: 071201-1-3

    • Peer Reviewed
  • [Journal Article] Single-Gated Single-Electron Transfer in Nonuniform Arrays of Quantum Dots2009

    • Author(s)
      K. Yokoi, D. Moraru, M. Ligowski and M. Tabe
    • Journal Title

      Japan Journal Applied Physics

      Volume: 48 Pages: 024503-1-7

    • Peer Reviewed
  • [Journal Article] Si Single-Electron SOI-MOSFETs : Interplay with Individual Dopants and Photons2009

    • Author(s)
      M. Tabe, Z. A. Burhanudin, R. Nuryadi, D. Moraru, M. Ligowski, R. Jablonskiand T. Mizuno
    • Journal Title

      MRSfall meeting 2008 proceedings, 2009Materials Research Society

      Pages: 1-7

    • Peer Reviewed
  • [Journal Article] Observation of individual dopantsin a thin silicon layer by low tem perture Kelvin Prove Force Microscope2008

    • Author(s)
      M. Ligowski, D. Moraru, M. Anwar, T. Mizuno, R. Jablonski and M. Tabe
    • Journal Title

      Applied Physics Letters

      Volume: 93 Pages: 142101-1-3

    • Peer Reviewed
  • [Presentation] Current Intermittency in SOI-FETs under Continuous Light Illumination2011

    • Author(s)
      A. Udhiarto
    • Organizer
      電子情報通信学会SDM/ED合同研究会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2011-02-24
  • [Presentation] Single-electron transfer between two donors in thin nanoscalesilicon transistors2011

    • Author(s)
      D. Moraru
    • Organizer
      電子情報通信学会SDM/ED合同研究会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2011-02-24
  • [Presentation] Si Single Dopant Devices2011

    • Author(s)
      M. Tabe
    • Organizer
      The Int. Symp. on Nanoscale Transport and Technology(ISNTT2011)
    • Place of Presentation
      NTT厚木R & Dセンター(厚木市)
    • Year and Date
      2011-01-12
  • [Presentation] Observation of individual dopants in Si channel by Low-Temeperature KFM2010

    • Author(s)
      M. Tabe
    • Organizer
      18th Int. Colloquium on Scanning Probe Microscopy(ICSPM18)
    • Place of Presentation
      熱川ハイツ(東伊豆町)
    • Year and Date
      2010-12-11
  • [Presentation] Single dopant devices : Single-electron transport through single-dopants2010

    • Author(s)
      M. Tabe
    • Organizer
      ITRS Deterministic Doping Workshop 2
    • Place of Presentation
      UC Berkeley(USA)
    • Year and Date
      2010-11-12
  • [Presentation] Single-Photon Detection by Individual Dopants and the Effect of Channel Shape in SOI-FET2010

    • Author(s)
      A. Udhiarto
    • Organizer
      2010 Int. Conf. on Solid State Devices and Materials(SSDM 2010)
    • Place of Presentation
      東京大学(東京都)
    • Year and Date
      2010-09-23
  • [Presentation] KFM Observation of Single-Electron Filling in Isolated and Clustered Dopants2010

    • Author(s)
      M. Anwar
    • Organizer
      2010 Int. Conf. on Solid State Devices and Materials(SSDM 2010)
    • Place of Presentation
      東京大学(東京都)
    • Year and Date
      2010-09-22
  • [Presentation] Memory effects based on dopant atoms in nano-FETs2010

    • Author(s)
      D. Moraru
    • Organizer
      Inter-Academia 2010
    • Place of Presentation
      Riga Technical University(Latvia)
    • Year and Date
      2010-08-11
  • [Presentation] Si-based single-dopant atom devices2010

    • Author(s)
      M. Tabe
    • Organizer
      Inter-Academia 2010
    • Place of Presentation
      Riga Technical University(Latvia)
    • Year and Date
      2010-08-10
  • [Presentation] Control of dopant-induced quantum dots by channel geometry2010

    • Author(s)
      D. Moraru
    • Organizer
      2010 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Hilton Hawaiian Village(USA)
    • Year and Date
      2010-06-13
  • [Presentation] Single-photon detection by Si single-electron FETs2010

    • Author(s)
      M. Tabe
    • Organizer
      European MRS(E-MRS) Symp. J : Silicon-based nanophotonics
    • Place of Presentation
      Congress Center(France)
    • Year and Date
      2010-06-08
  • [Presentation] Towards Silicon-based Single Dopant Technology2010

    • Author(s)
      M. Tabe
    • Organizer
      Atom-scale Silicon Hybrid Nanotechnolgies for' More-than-Moore' and' Beyond CMOS' Era
    • Place of Presentation
      University of Southampton(UK)
    • Year and Date
      2010-03-01
  • [Presentation] Si Single-Dopant FETs and Observation of Single-Dopant Potential by LT-KFM2010

    • Author(s)
      M. Tabe
    • Organizer
      5th Int. Workshop on New Group IV Semiconductor Nanoelectronics
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2010-01-29
  • [Presentation] シングルドーパントデバイスの現状と課題2010

    • Author(s)
      田部道晴
    • Organizer
      応用物理学会シリコンテクノロジー分科会第117回研究集会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2010-01-22
  • [Presentation] シリコンドーパント原子デバイス2009

    • Author(s)
      田部道晴
    • Organizer
      電子情報通信学会北海道支部・IEEE札幌支部共催講演会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2009-12-11
  • [Presentation] Calibration and inaccuracy estimation of Kelvin Probe Force Microscopy technique2009

    • Author(s)
      M. Ligowski
    • Organizer
      Mechatronics 2009
    • Place of Presentation
      Brno University of Technology(Czech Republic)
    • Year and Date
      2009-11-18
  • [Presentation] Si Multi-dot FET Using Discrete Dopants2009

    • Author(s)
      M. Tabe
    • Organizer
      5th Handai Nanoscience and Nanotechnology International Symposiu
    • Place of Presentation
      大阪大学(吹田市)
    • Year and Date
      2009-09-03
  • [Presentation] Observation of discrete dopant potential and its application to Si single-electron devices2009

    • Author(s)
      M. Tabe
    • Organizer
      6th International Conference on Silicon Epitaxy and Heterostructures
    • Place of Presentation
      Ayres Hotel(USA)
    • Year and Date
      2009-05-18
  • [Presentation] Application and Observation of Discrete Dopant Potential for Si Single-Electron Devices2008

    • Author(s)
      M. Tabe
    • Organizer
      IUMRS International Conference in Asia 2008
    • Place of Presentation
      Nagoya Congress Center(名古屋市)
    • Year and Date
      2008-12-10
  • [Presentation] Si Single-Electron SOI-MOSFETs : Interplay with Individual Dopants and Photons2008

    • Author(s)
      M. Tabe
    • Organizer
      MRS fall meeting 2008
    • Place of Presentation
      Hynes Convention Center, Boston・MA
    • Year and Date
      2008-12-01
  • [Book] ナノシリコンの最新技術と応用展開第1章8「シリコン多重ドットFETの新機能:フォトン検出と単電子転送」2010

    • Author(s)
      田部道晴
    • Total Pages
      56-65
    • Publisher
      シーエムシー出版
  • [Book] 電子情報通信学会「知識ベース」S2群-2編-第1章「シリコンナノエレクトロニクス」2010

    • Author(s)
      田部道晴
    • Publisher
      オーム社
  • [Remarks] 静岡大学学術リポジトリ

    • URL

      http://ir.lib.shizuoka.ac.jp/

  • [Remarks] 電子工学研究所

    • URL

      http://www.rie.shizuoka.ac.jp/index.html

  • [Remarks] 田部研究室

    • URL

      http://www.rie.shizuoka.ac.jp/~nanohome/

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Published: 2013-07-31  

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