Nanomechanical parametron devices

2010 Fiscal Year Final Research Report

• Project/Area Number: 20246064
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: NTT Basic Research Laboratories
• Principal Investigator: YAMAGUCHI Hiroshi NTT Basic Research Laboratories, 量子電子物性研究部, 部長 (60374071)
• Co-Investigator(Kenkyū-buntansha): NAGASE Masao 徳島大学, 大学院・ソシオテクノサイエンス研究部, 教授 (20393762) ; YAMAZAKI Kenji 日本電信電話株式会社NTT 物性科学基礎研究所, 量子電子物性研究部, 主任研究員 (40393764) ; YAMAGUCHI Toru 日本電信電話株式会社NTT 物性科学基礎研究所, 量子電子物性研究部, 主任研究員 (30393763) ; OKAMOTO Hajime 日本電信電話株式会社NTT 物性科学基礎研究所, 量子電子物性研究部, 研究主任 (20350465) ; ONOMITSU Koji 日本電信電話株式会社NTT 物性科学基礎研究所, 量子電子物性研究部, 研究主任 (30350466)
• Project Period (FY): 2008 – 2010
• Keywords: 電子デバイス / 集積回路 / 新規デバイス / マイクロマシン / ナノマシン

Research Abstract

The electromechanical properties of Micro/Nanomechanical resonators based on compound semiconductor heterostructures were studied and its possible applications were proposed. (1) Parametric frequency conversion was demonstrated and a novel method to construct logic operations was proposed, where multiple logic operations can be executed in parallel only with a single mechanical resonator. (2) A novel optomechanical coupling scheme using carrier excitation in GaAs was demonstrated. (3) The method to tune the resonance frequency was developed for coupled mechanical resonators. (4) Novel nanofabrication technique was developed for fabricating the micro/nanomechanical structures.

Research Products

• [Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators (2011)
  • Author(s): H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi.
  • Journal Title: Appl. Phys. Lett. 98 Pages: 014103
• [Journal Article] Vibration amplification, damping, and self-oscillations inmicro-mechanical resonators induced by opto-mechanical coupling through carrierexcitation (2011)
  • Author(s): H.Okamoto, D.Ito, K.Onomitsu, H.Sanada, H.Gotoh, T.Sogawa, H.Yamaguchi.
  • Journal Title: Phys. Rev. Lett. 106 Pages: 036801
• [Journal Article] In-ter-connect-free parallel logic cir-cuits ina single mechanical resonator (2011)
  • Author(s): I.Mahboob, E.Flurin, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Journal Title: Nature Communications 2 Pages: 198
• [Journal Article] Feedback cooling of a strained GaAs micromechanical beam resonator (2010)
  • Author(s): T.Watanabe, K.Onomitsu, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 3 Pages: 065201
• [Journal Article] A symmetry-breaking electromechanical detector (2010)
  • Author(s): I.Mahboob, C.Froitier, H.Yamaguchi.
  • Journal Title: Appl. Phys. Lett. 96 Pages: 213103
• [Journal Article] Enhanced force sensitivity and noisesqueezing in an electromechanical resonator (2010)
  • Author(s): I.Mahboob, E.Flurin, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Journal Title: Appl. Phys. Lett. 97 Pages: 243105
• [Journal Article] Tunablecoupling of mechanical vibration in GaAs micro-resonators (2010)
  • Author(s): H.Okamoto, T.Kamada,K.Onomitsu, I.Mahboob, H.Yamaguchi.
  • Journal Title: Physica E 42 Pages: 2849
• [Journal Article] Resist coating on vertical side faces using conventional spincoatingforcreating three-dimensional nanostructures insemiconductors (2010)
  • Author(s): K.Yamazaki, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 3 Pages: 106501
• [Journal Article] Tunable backaction of a dc SQUID on an inte-grated micromechanical resonator (2010)
  • Author(s): M.Poot, S.Etaki, I.Mahboob, K.Onomitsu, H.Yamaguchi, Ya. M.Blanter, H.S.J.van der Zant.
  • Journal Title: Phys. Rev. Lett. 105 Pages: 207203
• [Journal Article] Controlling Quality Factor in Micromechanical Resonators byCarrierExcitation (2009)
  • Author(s): H.Okamoto, D.Ito, K.Onomitsu, T.Sogawa, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 2 Pages: 035001
• [Journal Article] Room temperature piezoelectric displacement detection via a silicon field effect transistor (2009)
  • Author(s): I.Mahboob, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Journal Title: Appl. Phys. Lett. 95 Pages: 233102
• [Journal Article] Direct actuation of GaAs membrane with the microprobe of scanning probemicroscopy (2009)
  • Author(s): K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara.
  • Journal Title: Jpn. J.Appl. Phys. 48 Pages: 06FG06
• [Journal Article] evaluation of thermal mechanical vibration amplitude and mechanical properties of carbon nanopillars using scanning electron microscopy (2009)
  • Author(s): K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara.
  • Journal Title: Jpn. J.Appl. Phys. 48 Pages: 06FG07
• [Journal Article] Optical tuning of coupled micromechanical resonators (2009)
  • Author(s): H.Okamoto, T.Kamada,K.Onomitsu, I.Mahboob, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 2 Pages: 062202
• [Journal Article] Fabrication of nano-mechanical Structures from bulk-GaAs using angled Ion Etching (2009)
  • Author(s): V.K.Singh, K.Yamazaki, T.Tawara, H.Okamoto, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 2 Pages: 065001
• [Journal Article] Controlling quality factor in micromechanical resonators bycarrier excitation (2009)
  • Author(s): H.Okamoto, D.Ito, K.Onomitsu, T.Sogawa, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 2 Pages: 035001
• [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain (2008)
  • Author(s): H.Yamaguchi, K.Kato, Y.Nakai, K.Onomitsu, S.Warisawa, S.Ishihara.
  • Journal Title: Appl.Phys. Lett. 92 Pages: 251913
• [Journal Article] Thermoelastic dampingin GaAs micromechanical resonators (2008)
  • Author(s): H.Okamoto, D.Ito, K.Onomitsu, H.Yamaguchi.
  • Journal Title: Phys. Stat. Sol. 5 Pages: 2920
• [Journal Article] Motion detection of amicromechanical resonator embedded in a d.c. SQUID (2008)
  • Author(s): S.Etaki, M.Poot, I.Mahboob, K.Onomitsu, H.Yamaguchi, H.S.J.van der Zant.
  • Journal Title: Nature Phys. 4 Pages: 785
• [Journal Article] Flexible nanofabrication in three- dimensional electron-beam lithography enhanced by suppression of proximity effect (2008)
  • Author(s): K.Yamazaki, H.Yamaguchi.
  • Journal Title: Appl. Phys. Express 1 Pages: 09701
• [Journal Article] In-plane conductancemeasurement of graphene nanoislands using an integrated nanogap probe (2008)
  • Author(s): M.Nagase, H.Hibino, H.Kageshima, H.Yamaguchi.
  • Journal Title: Nanotechnology 19 Pages: 495701
• [Journal Article] Three-dimensional alignment with 10 nm order accuracy in electron-beam lithography on rotated sample for three-dimensional nanofabrication (2008)
  • Author(s): K.Yamazaki, H.Yamaguchi.
  • Journal Title: J.Vac. Sci. Technol. B26 Pages: 2529
• [Presentation] Carrier-mediated optome-chanical coupling inGaAs cantilevers (2011)
  • Author(s): H.Okamoto, D.Ito, K.Onomitsu, H.Sanada, H.Gotoh, T.Sogawa, H.Yamaguchi.
  • Organizer: Frontiers in Nano-scale Science and Technology(招待)
  • Place of Presentation: Saitama
  • Year and Date: 2011-01-06
• [Presentation] Dis-placement noise squeezing in an elec-tromechanical resonator (2011)
  • Author(s): I.Mahboob, E.Flurin, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Organizer: Frontiers in Nano-scale Science and Technology
  • Place of Presentation: Saitama
  • Year and Date: 2011-01-06
• [Presentation] Piezoelectric coupled nanomechanical oscillators based on GaAs/AlGaAs hetero structures (2010)
  • Author(s): H.Okamoto, C.-Y.Chang, K.Onomitsu, E.Y.Chang, H.Yamaguchi.
  • Organizer: 2010Workshop onInnovative Devices and Systems(WINDS2010)
  • Place of Presentation: Hawaii, US
  • Year and Date: 2010-12-09
• [Presentation] Quantum effects of motion (2010)
  • Author(s): H.Yamaguchi
  • Organizer: Japanese-American Frontier of Science Symposium(招待)
  • Place of Presentation: Chiba
  • Year and Date: 2010-12-05
• [Presentation] Detuning dependence of the nonlinear resonanceincoupled nanomechanical oscillators (2010)
  • Author(s): H.Okamoto, C.-Y.Chang, K.Onomitsu, E.Y.Chang, H.Yamaguchi.
  • Organizer: Workshop on Nano-Opto-ElectromechanicalSystems Approaching the Quantum Regime
  • Place of Presentation: Trieste, Italy
  • Year and Date: 2010-09-07
• [Presentation] Me-chanical to electrical energy trans-duction using a micromechanical 2DES cantilever (2010)
  • Author(s): H.Yamaguchi, H.Okamoto, Y.Maruta, S.Ishihara, Y.Hirayama.
  • Organizer: 16^<th> International Con-ference on Molecular Beam Epitaxy
  • Place of Presentation: Berlin(招待)
  • Year and Date: 2010-08-24
• [Presentation] Challenge for electro-mechanical logic systems using compound semiconductor heterostruc-tures (2010)
  • Author(s): H.Yamaguchi, I.Mahboob, H.Okamoto, K.Onomitsu
  • Organizer: 2010 Asia-Pacific Workshop on Fundamentals and Applications of Ad-vanced Semiconductor Devices
  • Place of Presentation: Tokyo(招待)
  • Year and Date: 2010-06-30
• [Presentation] Dis-placement noise squeezing in an elec-tromechanical resonator (2010)
  • Author(s): I.Mahboob, E.Flurin, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Organizer: 2010 Inter-national Symposium on Compound Semi-conductors
  • Place of Presentation: Takamatsu
  • Year and Date: 2010-06-04
• [Presentation] Sensitive chargedetection using perfectly-tuned couplednanomechanical oscillators (2010)
  • Author(s): H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi.
  • Organizer: Int. Workshop on Nano-mechanical Cantilever Sensors
  • Place of Presentation: Banff
  • Year and Date: 2010-05-27
• [Presentation] Perfect frequency tuning of coupled nanome-chanical resonators by piezoelectriceffect (2010)
  • Author(s): H.Okamoto, C.-Y.Chang, K.Onomitsu, E.Y.Chang, H.Yamaguchi.
  • Organizer: 2010 Gordon Research Confe-rence
  • Place of Presentation: Galveston, US
  • Year and Date: 2010-03-22
• [Presentation] Spin dynamics characterized using a micro-mechanicalGaMnAs cantilever (2010)
  • Author(s): K.Onomitsu, I.Mahboob, H.Okamoto, H.Yamaguchi.
  • Organizer: 2010 Gordon Research Conference
  • Place of Presentation: Galveston, US
  • Year and Date: 2010-03-22
• [Presentation] Elec-tromechanical logic gate (2010)
  • Author(s): I.Mahboob, E.Flurin, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Organizer: 2010 Gordon Research Conference
  • Place of Presentation: Gal-veston, US
  • Year and Date: 2010-03-22
• [Presentation] Micro/Nano- elec-tro-mechanical systems for advanced semiconductor devices (2010)
  • Author(s): H.Yamaguchi, I.Mahboob, H.Okamoto, K.Onomitsu.
  • Organizer: 2010 Interna-tional RCIQE/CREST Joint Workshop(招待)
  • Place of Presentation: Sapporo
  • Year and Date: 2010-03-02
• [Presentation] Micro/Nanoelectrome-chanical systems for advanced semi-conductor devices (2010)
  • Author(s): H.Yamaguchi, I.Mahboob, H.Okamoto, K.Onomitsu.
  • Organizer: 2010 Inter-national RCIQE/CREST Joint Workshop,(招待)
  • Place of Presentation: Sapporo
  • Year and Date: 2010-03-02
• [Presentation] Piezo-electricdisplacement detection in a micro-electromechanical resonator via a silicon field effect transistor (2009)
  • Author(s): I.Mahboob, K.Nishiguchi, A.Fujiwara, H.Yamaguchi.
  • Organizer: International Symposium on Advanced Nano-devices and Nano0technology
  • Place of Presentation: Hawaii, US
  • Year and Date: 2009-12-01
• [Presentation] Electromechanical systems for memory and logic (2009)
  • Author(s): I.Mahboob, H.Yamaguchi.
  • Organizer: InternationalConference on Solid State Devices and Materials (招待)
  • Place of Presentation: Sendai
  • Year and Date: 2009-10-08
• [Presentation] Dynamic characterization method of GaAs membrane resonator bydirect excitation using scanning probe microscopy (2009)
  • Author(s): K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, R.Kometani, S.Warisawa, S.Ishihara
  • Organizer: MNE2009
  • Place of Presentation: Belgium
  • Year and Date: 2009-09-30
• [Presentation] Compound Semiconductor Micro/Nanomechanical Systems (2009)
  • Author(s): H.Yamaguchi.
  • Organizer: Topical Workshop on Hetero-structure Micro-electronics(招待)
  • Place of Presentation: 長野
  • Year and Date: 2009-08-27
• [Presentation] Manipulating the dynamical potential well of a parametric reso-nator (2009)
  • Author(s): I.Mahboob, C.Froitier, H.Ya-maguchi.
  • Organizer: 14^<th> International Conference on Modulated Semiconductor Structures
  • Place of Presentation: Kobe
  • Year and Date: 2009-07-23
• [Presentation] Tunablecoupling ofmechanicalvibration inGaAsmicro-resonators (2009)
  • Author(s): H.Okamoto, T.Kamada, K.Onomitsu, I.Mahboob, H.Yamaguchi.
  • Organizer: 14^<th>-International Conference on Modulated SemiconductorStructures
  • Place of Presentation: Kobe
  • Year and Date: 2009-07-23
• [Presentation] Hetero-structure-base d Micro/Nano-mechanical Systems (2009)
  • Author(s): H.Yamaguchi.
  • Organizer: 18^<th> International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS18)(招待)
  • Place of Presentation: Kobe
  • Year and Date: 2009-07-20
• [Presentation] Micro/Nanomechanical systems based on compound semiconductor heterostructures (2009)
  • Author(s): H.Yamaguchi.
  • Organizer: Frontiers of Na-no-scale Science and Technologies Symposium(招待)
  • Place of Presentation: Boston
  • Year and Date: 2009-05-29
• [Presentation] Electro-mechancial parametric reso-nators fabricated from semiconductorheterostructures (2008)
  • Author(s): I.Mahboobl, H.Yamaguchi.
  • Organizer: Advanced Hete-ro-structures and NanostructuresWorkshop
  • Place of Presentation: Hawaii, US
  • Year and Date: 2008-12-09
• [Presentation] Novel-functionalities in semiconductor-based micro/nanome-chanical Systems (2008)
  • Author(s): H.Yamaguchi.
  • Organizer: 21st-International Micro-processes and Nanotechnology Conference
  • Place of Presentation: Fukuoka,(招待)
  • Year and Date: 2008-10-29
• [Presentation] Bit op-eration in a parametrically pumped electromechanical resonator (2008)
  • Author(s): M.Imran, H.Yamaguchi.
  • Organizer: 2008 International Symposium on Novel Na-no-electro-mechanical 3D Struc-tures
  • Place of Presentation: Ishikawa,(招待)
  • Year and Date: 2008-10-23
• [Presentation] Compound semi-conductor nano-mechanics (2008)
  • Author(s): H.Yamaguchi
  • Organizer: 35^<th>-International Symposium on Compound Semiconduc-tors
  • Place of Presentation: Rust,Germany(招待)
  • Year and Date: 2008-09-21
• [Presentation] Mi-cro/Nano-mechanical systems for in-formation Processing (2008)
  • Author(s): H.Yamaguchi, I.Mahboob.
  • Organizer: The 9^<th> Inter-national Symposium on Foundations of Quantum Mechanics in the Light of New Technology
  • Place of Presentation: Saitama,(招待)
  • Year and Date: 2008-08-27
• [Presentation] Thequantum Hall effect probed via a pa-rametrically pumped electromechanicalresonator (2008)
  • Author(s): I.Mahboob, H.Yamaguchi.
  • Organizer: Frontiers of Low- Temper-ature-Physics
  • Place of Presentation: London, UK
  • Year and Date: 2008-08-14
• [Presentation] Drastic improvement in mechanical properties of micromechanical resonators using a strain-engineered hetero-structures (2008)
  • Author(s): K.Kato, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi.
  • Organizer: 2008 International Conference on Mo-lecular Beam Epitaxy
  • Place of Presentation: Van-couver, Canada
  • Year and Date: 2008-08-07
• [Presentation] On-chipmicro-mechanical parametric resonatorbased on the piezo-electricity inGaAs/AlGaAs modulation-doped hete-ro-structures (2008)
  • Author(s): H.Yamaguchi, I.Mahboob.
  • Organizer: 66^<th>-Device-Research-Conference
  • Place of Presentation: SantaBarbara, CA, US
  • Year and Date: 2008-06-23
• [Presentation] 3Dalignment with 10-nm order accuracy in electron-beam lithography on rotatedsample for 3D nanofabrication (2008)
  • Author(s): K.Yamazaki, H.Yamaguchi.
  • Organizer: 52ndInternational Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
  • Place of Presentation: Portland, US
  • Year and Date: 2008-05-28
• [Remarks] ホームページ
  • URL: http://www.brl.ntt.co.jp/新聞報道他
• [Remarks] 子供の科学、100兆分の1メートルの振動をキャッチする板バネ、2008.11
• [Remarks] 日刊工業新聞、微細振動検出に成功、2008.9.1
• [Remarks] 日経新聞、100兆分の1メートルの振動検出、2008.9.1
• [Remarks] 日経産業新聞、100兆分の1メートルの振動検出、2008.9.1
• [Remarks] 日刊工業新聞、板バネの振動で演算、2011.2.16
• [Remarks] 通信興業新聞、ナノマシーンコンピュータへ一歩、2011.2.21
• [Remarks] 科学新聞、微妙な板バネの振動利用、2011.2.25