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2010 Fiscal Year Final Research Report

Fabrication and evaluation of 3 dimensional bio-nanotool byfocused-ion-beam

Research Project

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Project/Area Number 20310068
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionUniversity of Hyogo

Principal Investigator

MATSUI Shinji  University of Hyogo, 高度産業科学技術研究所, 教授 (00312306)

Co-Investigator(Kenkyū-buntansha) KANDA Kazuhiro  兵庫県立大学, 高度産業科学技術研究所, 教授 (20201452)
HATTA Kohei  兵庫県立大学, 大学院・生命理学研究科, 教授 (40183909)
Project Period (FY) 2008 – 2010
Keywords集束イオンビーム / FIB / CVD / バイオツール
Research Abstract

The bio-nano-tool was developed on a top of glass capillary by using focused-ion-beam -CVD (FIB-CVD) and the excellent performance was demonstrated in a bio-experiment.

  • Research Products

    (14 results)

All 2011 2010 2009 2008 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (6 results) Book (2 results) Remarks (1 results)

  • [Journal Article] Mrcahnical Characteristics of Nanospring fabricated by Focused-Ion-Beam Chemical Vapor deposition Using Ferrocene Source Gas2010

    • Author(s)
      Y. Nakai, Y. Kang, M. Okada, Y. haruyama, K. kanda, T. Ichihashi, S. Matsui
    • Journal Title

      Jpn.J.Appl.Phys. Vol.49

      Pages: 06GH07-1-06GH07-4

    • Peer Reviewed
  • [Journal Article] Room-Temperature Nanoimprinting Using Liquid-Phase Hydrogen Silsesquioxane2010

    • Author(s)
      Y. Kang, M. Okada, C. Minari. K. Kanda, Y. Haruyama, S. Matsui
    • Journal Title

      Jpn.J.Appl.Phys. Vol.49

      Pages: 011005-1011005-5

    • Peer Reviewed
  • [Journal Article] Education Position contral of Incorporated Gallium in Diamond-Like Carbon Deposition by Focused-Ion-Beam Chermical Vapor Deposition2008

    • Author(s)
      Y. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito, S. Matsui
    • Journal Title

      Jpn.J.Appl.Phys. Vol.47

      Pages: 5032-5035

    • Peer Reviewed
  • [Journal Article] Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemcal Vapor Depopsition2008

    • Author(s)
      K. Kand J. Igaku, A. saikubo, R. Kometani, T.Suzuki, K. Nishihara, H. Satoh, S. Matsui
    • Journal Title

      Jpn.J.Appl.Phys. Vol.47

      Pages: 7464-7466

    • Peer Reviewed
  • [Journal Article] Nanoimprint aplication of nonplanar nanostructure fabricated by focused-ion-beam chemical vapor deposition

    • Author(s)
      Y. Kang, S. Omoto, Y. Nakai, M. Okada. K. Kanda, Y. Haruyama, S. Matsui
    • Journal Title

      J.Vac.Sci.Technol. Vol.B20

      Pages: 06GL13-106GL13-5

    • Peer Reviewed
  • [Presentation] FIB-CVDで成膜したFe-Ga含有DLC膜のアニールによるFeおよびGaの挙動観察2011

    • Author(s)
      中井康喜、姜有志、岡田真、神田一浩、春山雄一、市橋徹也、松井真二
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-26
  • [Presentation] Annealing effect of Fe-Ga doped DLC film formed by Focused-ion-beam chemical vapor deposition using ferrocene source gas2010

    • Author(s)
      Y.Nakai, Y. Kang, M.Okada, Y.Haruyama, K.Kanda, S.Matsui
    • Organizer
      23rd International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      リーガロイヤルホテル小倉
    • Year and Date
      2010-11-12
  • [Presentation] FIB-CVD法で成膜されたFe0Ga含有薄膜のアニール効果2010

    • Author(s)
      中井康喜、姜有志、岡田真、神田一浩、春山雄一、松井真二
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
  • [Presentation] 集束イオンビーム励起化学気相成長法で作成した鉄含有ナノスプリングへのアニール効果2010

    • Author(s)
      中井康喜、姜有志、岡田真、神田一浩、春山雄一、市橋徹也、松井真二
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-19
  • [Presentation] Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas2009

    • Author(s)
      Y.Nakai, Y. Kang, M.Okada, Y.Haruyama, K.Kanda, S.Matsui
    • Organizer
      22^<nd> International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      シェラトン札幌
    • Year and Date
      2009-11-18
  • [Presentation] FIB-CVD法で成膜したDLC薄膜に対するアニール効果2009

    • Author(s)
      神田一浩、岡田真、姜有志、松井真二
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-01
  • [Book] 細胞分離・操作技術の最前線(分担出版)第4章 集束イオンビームを用いたバイオナノツールの作製と応用2008

    • Author(s)
      松井真二、米谷玲皇
    • Total Pages
      31-41
    • Publisher
      シーエムシ出版
  • [Book] ナノイメージング(分担執筆)、第4章 第3章 集束イオンビームCVDによる立体ナノ構造形成の動的観測2008

    • Author(s)
      松井真二、米谷玲皇
    • Total Pages
      341-348
    • Publisher
      (株)エヌ・テイ・エス
  • [Remarks] ホームページ

    • URL

      http://www.lasti.u-hyogo.ac.jp/nanostructure/index.html

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Published: 2012-01-26   Modified: 2016-04-21  

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