2010 Fiscal Year Final Research Report
Cylinder rod surface coating using sputtering deposition method with modulated magnetic field
| Project/Area Number |
20340164
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Sasebo National College of Technology |
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Principal Investigator |
KAWASAKI Hiroharu Sasebo National College of Technology, 電気電子工学科, 教授 (10253494)
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| Co-Investigator(Renkei-kenkyūsha) |
OHSHIMA Tamiko 佐世保工業高等専門学校, 電気電子工学科, 准教授 (00370049)
YAGYU Yoshihito 佐世保工業高等専門学校, 電気電子工学科, 准教授 (40435483)
SUDA Yoshiaki 佐世保工業高等専門学校, 電気電子工学科, 教授 (20124141)
JOHNO Yuuki 佐世保工業高等専門学校, 物質工学科, 准教授 (80353233)
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| Project Period (FY) |
2008 – 2010
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| Keywords | マグネトロンスパッタリング / ハードコーティング / 変調磁界 |
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| Research Abstract |
Tungsten, carbon and titanium thin films were prepared on the carbide steel cylinder rod using new magnetron sputtering deposition method to prevent their corrosion and/or increasing friction resistance. In the deposition, plasmas were generated between cylinder rod anode substrate and cylinder pipe targets. Experimental results suggest that plasma density distribution move to the axial direction using modulated magnetic field generated by low frequency alternating coil current. Deposition rate and film uniformity increased using modulated magnetic field, and corrosion resistance and friction resistance were increased by this hard coating.
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[Journal Article]2010
Author(s)
Takeaki Matsunaga, Tamiko Ohshima, Hiroharu Kawasaki, Tatsuya Kaneko, Yoshihito Yagyu, Yoshiaki Suda
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Journal Title
Jpn.J.Appl.Phys. 49
Pages: 08JF04
Peer Reviewed
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[Presentation]2010
Author(s)
Hiroharu Kawasaki, Toshinobu Shigematsu, Yoshirou Terasaki, Tamiko Ohshima, Yoshihito Yagyu, Yoshiaki Suda
Organizer
ICRP-7/SPP-28/GEC-63 CPT-I-9
Place of Presentation
Maison de la Chimie, Paris, France
Year and Date
2010-10-05
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[Presentation]2010
Author(s)
Takeru Kanazawa, Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Yoshiaki Suda
Organizer
ICRP-7/SPP-28/GEC-63 CPT-I-10
Place of Presentation
Maisonde la Chimie, Paris, France
Year and Date
2010-10-05
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[Presentation]2010
Author(s)
Tamiko Ohshima, Yuuki Murakami, Hiroharu Kawasaki, Yoshiaki Suda, Yoshihito Yagyu
Organizer
ICRP-7/SPP-28/GEC-63
Place of Presentation
Maison de la Chimie, Paris, France
Year and Date
2010-10-05
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[Presentation]2010
Author(s)
吉富創,島多美子大,川崎仁晴,須田義昭,柳生義人
Organizer
H22電気関係学会九州支部大会06-1P-15
Place of Presentation
九州産業大学
Year and Date
2010-09-25
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[Presentation]2010
Author(s)
田島由衣,晴川崎仁,須田義昭,大島多美子,柳生義人,青木振一
Organizer
H22電気関係学会九州支部大会06-1P-14
Place of Presentation
九州産業大学
Year and Date
2010-09-25
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[Presentation]2010
Author(s)
川島明慎,大島多美子,川崎仁晴,須田義昭,柳生義人
Organizer
H22電気関係学会九州支部大会06-1P-06
Place of Presentation
九州産業大学
Year and Date
2010-09-25
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[Presentation]2010
Author(s)
村上雄紀,大島多美子,川崎仁晴,須田義昭,柳生義人
Organizer
H22電気関係学会九州支部大会06-1P-05
Place of Presentation
九州産業大学
Year and Date
2010-09-25
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[Presentation]2010
Author(s)
柳生義人,坂本翔太,山崎隆志,林信哉,川崎仁晴,大島多美子,須田義昭
Organizer
平成22年度第71回応用物理学学術講演会16a-ZH-6
Place of Presentation
長崎大学
Year and Date
2010-09-17
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[Presentation]2010
Author(s)
大島多美子,村上雄紀,川崎仁晴,須田義昭,柳生義人
Organizer
平成22年度第71回応用物理学学術講演会17a-NE-5
Place of Presentation
長崎大学
Year and Date
2010-09-17
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[Presentation]2010
Author(s)
川崎仁晴,重松利信,大島多美子,柳生義人,須田義昭
Organizer
平成22年度第71回応用物理学学術講演会14a-P2-17
Place of Presentation
長崎大学
Year and Date
2010-09-14
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