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2010 Fiscal Year Final Research Report

Development of an integrated model of the hybrid pumping plasma light source based on laser assisted discharge

Research Project

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Project/Area Number 20340166
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

SASAKI Akira  独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (10215709)

Co-Investigator(Kenkyū-buntansha) NISHIHARA Katsunobu  大阪大学, レーザーエネルギー学研究センター, 特任研究員 (40107131)
SUNAHARA Atsushi  (財)レーザー技術総合研究所, 研究員 (00370213)
FURUKAWA Hiroyuki  (財)レーザー技術総合研究所, 副主任研究員 (70222271)
KOIKE Fumihiro  北里大学, 医学部, 准教授 (90095505)
NISHIKAWA Takeshi  岡山大学, 自然科学研究科, 助教 (80243492)
Co-Investigator(Renkei-kenkyūsha) KAI Takeshi  大阪大学, レーザーエネルギー学研究センター, 特任研究員 (70403037)
NUNAMI Masanori  自然科学研究機構, 核融合科学研究所, 助教 (40397203)
Project Period (FY) 2008 – 2010
Keywordsプラズマ制御・レーザー / プラズマ光源 / シミュレーション
Research Abstract

Modeling methods of laser-plasma hybrid pumping plasma light sources are investigated. On the modeling of plasma atomic processes, a model, which calculates level population, emissivity and opacity of the plasma with a reasonable accuracy and is capable of reproducing emission spectrum, is developed. Calculated dependence of the plasma radiation pressure, which shows non-monotonic behavior with respect to density, suggests instability of the plasmas. The model is also applied to evaluate the emission characteristics of Tb plasma for future EUV applications. On the modeling of plasma radiation hydrodynamics, importance of modeling methods, which can calculate the temporal and spatial structure formation, is discussed. Instead of existing MHD and other fluid and particle approach, it is found that using the percolation model, the initial structure of the discharge can be reproduced.

  • Research Products

    (12 results)

All 2011 2010 2009 2008

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (4 results) Book (1 results)

  • [Journal Article] レーザー生成XUV光源の放射物理と将来の短波長化への展望2010

    • Author(s)
      佐々木明、西原功修
    • Journal Title

      レーザー研究

      Volume: vol.38 Pages: 969-957

    • Peer Reviewed
  • [Journal Article] Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultra-violet light sources based on terbium plasmas2010

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, T. Nishikawa, and F. Koike
    • Journal Title

      Appl. Phys. Lett

      Volume: 97 Pages: 231501

    • DOI

      DOI:10.1063/1.3524494

    • Peer Reviewed
  • [Journal Article] Percolation simulation of laser guided electrical discharge2010

    • Author(s)
      A. Sasaki, Y. Kishimoto, E. Takahashi, S. Kato, T. Fujii, and S. Kanazawa
    • Journal Title

      Phys. Rev. Lett

      Volume: 105 Pages: 075004

    • DOI

      DOI:10.1103/PhysRevLett.105.075004

    • Peer Reviewed
  • [Journal Article] Modeling of radiative properties of Sn plasmas for EUV source2010

    • Author(s)
      A. Sasaki, A. Sunahara, H. Furukawa, K. Nishihara, S. Fujioka, T. Nishikawa, F. Koike
    • Journal Title

      J. Appl. Phys

      Volume: 107 Pages: 113303

    • DOI

      DOI:10.1063/1.3373427

    • Peer Reviewed
  • [Journal Article] EUV emission spectra in collisions of multiply charged Sn ions with He and Xe2010

    • Author(s)
      H. Ohashi, S. Suda, H. Tanuma, S. Fujioka, H. Nishimura, A. Sasaki, and K. Nishihara
    • Journal Title

      J. Phys

      Volume: B43 Pages: 065204

    • DOI

      DOI:10.1088/0953-4075/43/6/065204

    • Peer Reviewed
  • [Journal Article] Optimization of extreme ultraviolet emission from laser-produced tin plasmas based on radiation hydrodynamics simulations2008

    • Author(s)
      A. Sunahara, K. Nishihara, A. Sasaki
    • Journal Title

      Plasma Fusion Res

      Volume: 3 Pages: 043

    • URL

      http://www.jspf.or.jp/PFR/PFR_articles/pfr2008/pfr2008_03-043.html

    • Peer Reviewed
  • [Journal Article] 極端紫外光源の原子モデルと最適設計2008

    • Author(s)
      西原功修、砂原淳、佐々木明、田沼肇、小池文博、藤岡慎介、西村博明、島田義則
    • Journal Title

      レーザー研究

      Volume: vol.36 Pages: 690-699

    • Peer Reviewed
  • [Presentation] Formation mechanism of non-uniform structure in the gain distribution and its effect to the plasma x-ray lasers2011

    • Author(s)
      A. Sasaki
    • Organizer
      Proceedings SPIE, X-ray lasers and coherent x-ray sources
    • Year and Date
      20110000
  • [Presentation] Modeling of atomic and plasma processes in the LPP and LA-DPP EUV sources2010

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Fujrukawa, T. Nishikawa, F. Koike
    • Organizer
      Proceedings SPIE, Extreme Ultraviolet(EUV) Lithography
    • Year and Date
      20100000
  • [Presentation] Atomic modeling of the plasma EUV sources, II2009

    • Author(s)
      A. Sasaki, A. Sunahara, H. Furukawa, K. Nishihara, T. Nishikawa, F. Koike and H. Tanuma
    • Organizer
      14^<th> international workshop on radiative properties of hot dense matter
    • Year and Date
      20090000
  • [Presentation] Proceedings"Atomic processes in the LPP and LA-DPP EUV sources"2009

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, T. Nishikawa, F. Koike
    • Organizer
      SPIE, Alternative Lithographic Technologies
    • Year and Date
      20090000
  • [Book] 第14章「レーザー生成プラズマ」「プラズマ原子分子過程ハンドブック」プラズマ・核融合学会編2011

    • Author(s)
      浜口智志、村上泉、加藤太治
    • Total Pages
      319-329
    • Publisher
      大阪大学出版会

URL: 

Published: 2013-07-31  

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