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2010 Fiscal Year Final Research Report

Accurate measurements of lattice strains and electric conductivity in nanometer-scale areas

Research Project

  • PDF
Project/Area Number 20360007
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNagoya University

Principal Investigator

SAITOH Koh  Nagoya University, エコトピア科学研究所, 准教授 (50292280)

Co-Investigator(Kenkyū-buntansha) TANAKA Nobuo  名古屋大学, エコトピア科学研究所, 教授 (40126876)
Project Period (FY) 2008 – 2010
Keywords半導体歪み解析 / 電気伝導 / 収束電子回折 / 電子顕微鏡
Research Abstract

The present study has been aimed to reveal the correlation between lattice strains and electric conductivities in nanometer-scale areas. The results are the followings. (i) A method to determine lattice parameters and parameters characterizing lattice bending simultaneously with a spatial resolution of 10nm has been developed. (ii) A GUI-based software, in which the present algorithm is implemented, has been developed. (iii) An automated system for the pattern acquisition with a 2D beam-scanning and the lattice-strain analysis has been constructed. (iv) A method to determine the 3D lattice-strain-field from the HOLZ rocking curves using the Fourier iterative phase retrieval method has been developed. (v) A highly precise method to determine lattice parameters at the vicinity of interfaces of hetero-layers using the nano-beam diffraction technique has been developed. (vi) A high-voltage electron microscope has been used to apply the present method to relatively thick specimens, which has less influenced by the surface relaxation due to specimen thinning。(vii) I-V curves and lattice strains have been measured simultaneously by using an STM holder and HOLZ line analysis.

  • Research Products

    (11 results)

All 2010 2009 2008 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (6 results) Remarks (1 results)

  • [Journal Article] Atom-column distinction by Kikuchi pattern observed by an aberration-corrected convergent electron probe2010

    • Author(s)
      K.Saitoh, Y.Tatara, N.Tanaka
    • Journal Title

      Journal of Electron Microscopy 59

      Pages: 387-394

    • Peer Reviewed
  • [Journal Article] Determination of a lattice strain field by iterative phase retrieval of rocking curves of HOLZ reflections2010

    • Author(s)
      K.Saitoh, M.Hamabe, S.Morishita, J.Yamasaki, N.Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 2

      Pages: 120-121

    • Peer Reviewed
  • [Journal Article] Automated mapping of lattice parameters and lattice bending strain near a SiGe/Si interface by using split HOLZ line patterns2010

    • Author(s)
      K.Saitoh, Y.Yasuda, N.Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 2

      Pages: 38-39

    • Peer Reviewed
  • [Journal Article] Automated lattice-parameter determination by using HOLZ line patterns2008

    • Author(s)
      K.Saitoh, Y.Yasuda, N.Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 1

      Pages: 90-91

    • Peer Reviewed
  • [Presentation] Determination of 3D Lattice Displacements of Strained Semiconductors by Convergent-Beam Electron Diffraction2010

    • Author(s)
      齋藤晃, 濱邊麻衣子, 森下茂幸, 山崎順, 田中信夫
    • Organizer
      The 17th IFSM International Microscopy Congress
    • Place of Presentation
      Rio de Janeiro, Brazil.
    • Year and Date
      20100919-20100924
  • [Presentation] HOLZ線ロッキングカーブの反復位相回復による格子湾曲変位場の再生2010

    • Author(s)
      齋藤晃, 濱邊麻衣子, 森下茂幸, 山崎順, 田中信夫
    • Organizer
      日本顕微鏡学会66回学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      20100523-20100526
  • [Presentation] Strain mapping near Si/SiGe interfaces using HOLZ line CBED patterns2009

    • Author(s)
      齋藤晃, 濱邊麻衣子, 田中信夫
    • Organizer
      AsCA'09 Beijing, Joint Conference of the Asian Crystallographic Association and Chinese Crystallographic Society
    • Place of Presentation
      Beijing, China.
    • Year and Date
      2009-10-25
  • [Presentation] CBED法をもちいた格子湾曲歪みを含むSiGe/Si界面近傍の二次元格子歪み解析2009

    • Author(s)
      濱邊麻衣子、齋藤晃、田中信夫
    • Organizer
      日本顕微鏡学会第65回学術講演会
    • Place of Presentation
      仙台国際センター
    • Year and Date
      2009-05-26
  • [Presentation] A method for the determination of a bending strain of a lattice by CBED2008

    • Author(s)
      濱邊麻衣子, 齋藤晃, 田中信夫
    • Organizer
      Development of Advanced Instruments for New Electron Microscopy and Diffraction, IUCr2008 satellite
    • Place of Presentation
      名古屋大学
    • Year and Date
      2008-09-01
  • [Presentation] 分裂したHOLZ線を含むCBED図形の解析による湾曲格子歪み計測法の研究2008

    • Author(s)
      齋藤晃、浜辺麻衣子、田中信夫
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都国際会議場
    • Year and Date
      2008-05-21
  • [Remarks] ホームページ等

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Published: 2012-01-26   Modified: 2016-04-21  

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