Steric control of molecular beam induced surface reactions and its ultra-high speed and high energy resolution photoemission spectroscopic analysis

2010 Fiscal Year Final Research Report

• Project/Area Number: 20360024
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: TERAOKA Yuden Japan Atomic Energy Agency, 量子ビーム応用研究部門, 研究主幹 (10343922)
• Co-Investigator(Kenkyū-buntansha): YOSHIGOE Akitaka 独立行政法人日本原子力研究開発機構, 究副主幹 (00283490)
• Project Period (FY): 2008 – 2010
• Keywords: 放射光 / 表面反応 / 分子ビーム / 光電子分光

Research Abstract

A continuous expansion type supersonic molecular beam source and related devices were fabricated to overwhelm insufficient beam flux density. Ion current of a high speed atomic and molecular (ion) beam apparatus was enhanced by reconstruction of the plasma ion source. High speed measurements of photoemission spectra were improved by replacing a measurement system to new one which is corresponding to a 5 channels detector. Various kinds of surface reaction mechanisms of many molecular beam induced surface reactions were clarified by high speed photoemission spectroscopy using newly developed experimental devices.

Research Products

• [Journal Article] Oxidation of TiNi surface with hyperthermal oxygen molecular beams (2011)
  • Author(s): M.Okada, M.Souwa, T.Kasai, Y.Teraoka
  • Journal Title: Applied Surface Science 257 Pages: 4257-4263
  • Peer Reviewed
• [Journal Article] Immediate product after exposing Si(111)-7×7 surface to O_2 at 300 K (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Journal Title: Japanese Journal of Applied Physics 49 Pages: 115704-1-6
  • Peer Reviewed
• [Journal Article] Adsorption dynamics on Si(111)-7×7 surface induced by supersonic O_2 beam studied using real-time photoelectron spectroscopy (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Journal Title: Journal of Physical Chemistry C 114 Pages: 22539-22545
  • Peer Reviewed
• [Journal Article] Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen (2010)
  • Author(s): M.Tagawa, K.Yokota, A.Kitamura, K.Matsumoto, A.Yoshigoe, Y.Teraoka, K.Kanda, M.Niibe
  • Journal Title: Applied Surface Science 256 Pages: 7678-7683
  • Peer Reviewed
• [Journal Article] Active oxidation of Cu3Au(110) using hyperthermal O_2 molecular beam (2010)
  • Author(s): M.Okada, Y.Teraoka
  • Journal Title: Applied Surface Science 256 Pages: 5676-5680
  • Peer Reviewed
• [Journal Article] 放射光光電子分光によるSiO_2薄膜の有効減衰長の実験的決定 (2010)
  • Author(s): 井上敬介、寺岡有殿
  • Journal Title: 電気学会論文誌C 130 Pages: 1817-1818
  • Peer Reviewed
• [Journal Article] TiA1表面酸化のシンクロトロン放射光を用いた光電子分光研究 (2010)
  • Author(s): 橋之口道宏、角本雄一、戸出真由美、James Harries、岡田美智雄、寺岡有殿、笠井俊夫
  • Journal Title: 電気学会論文誌C 130 Pages: 723-1729
  • Peer Reviewed
• [Journal Article] 放射光光電子分光による重水素イオン注入V_<25>Cr_<40>Ti_<35>表面の熱変性分析 (2010)
  • Author(s): 戸出真由美、James Harries、寺岡有殿、角本雄一、井上敬介、吉越章隆
  • Journal Title: 電気学会論文誌C 130 Pages: 1819-1820
  • Peer Reviewed
• [Journal Article] Kinetics of oxygen adsorption and initial oxidation on Cu(110) by hyperthermal oxygen molecular beams (2009)
  • Author(s): K.Moritani, M.Okada, Y.Teraoka, A.Yoshigoe, T.Kasai
  • Journal Title: J.Phys.Chem.A 113 Pages: 15217-15222
  • Peer Reviewed
• [Journal Article] Atomic layer fluorination of highly oriented pyrolytic graphite using hyperthermal atomic fluorine beam (2009)
  • Author(s): M.Tagawa, K.Yokota, K.Maeda, A.Yoshigoe, Y.Teraoka
  • Journal Title: Applied Physics Express 2 Pages: 066002-1-3
  • Peer Reviewed
• [Journal Article] Hydrogen desorption from a diamond-like carbon film by hyperthermal atomic oxygen exposures (2009)
  • Author(s): K.Yokota, M.Tagawa, A.Kitamura, K.Matsumoto, A.Yoshigoe, Y.Teraoka
  • Journal Title: Applied Surface Science 255 Pages: 6710-6714
  • Peer Reviewed
• [Journal Article] Synchrotron Radiation Photoemission Spectroscopy for Native Oxide Layer on Vanadium and VCrTa (2009)
  • Author(s): Y.Teraoka, A.Yoshigoe, J.Harries
  • Journal Title: Journal of Surface Analysis 15 Pages: 303-306
  • Peer Reviewed
• [Journal Article] Si-doping for the protection of hydrogenated diamond-like carbon films in a simulated atomic oxygen environment in low earth orbit, Transactions of the Japan Society for Aeronautical and Space Sciences (2009)
  • Author(s): K.Yokota, M.Tagawa, A.Kitamura, K.Matsumoto, A.Yoshigoe, Y.Teraoka, J.Fontaine, M.Belin
  • Journal Title: Space Technology Japan 7(ists26) Pages: Pc_37-Pc_42
  • Peer Reviewed
• [Journal Article] Initial oxidation of Si(110) as studied by real-time synchrotron-radiation x-ray photoemission spectroscopy (2009)
  • Author(s): M.Suemitsu, Y.Yamamoto, H.Togashi, Y.Enta, A.Yoshigoe, Y.Teraoka
  • Journal Title: J.Vac. Sci.and Technol.B 27 Pages: 547-550
  • Peer Reviewed
• [Journal Article] 超熱酸素分子線による銅ならびに銅合金表面の酸化反応研究(解説) (2009)
  • Author(s): 岡田美智雄,寺岡有殿
  • Journal Title: Journal of the Vacuum Society of Japan 52 Pages: 80-84
  • Peer Reviewed
• [Journal Article] Cu_3Au表面自然酸化のシンクロトロン放射光を用いた光電子分光研究 (2009)
  • Author(s): 宗和誠、山崎大地、岡田美智雄、吉越章隆、寺岡有殿、笠井俊夫
  • Journal Title: 電気学会論文誌C 129 Pages: 229-232
  • Peer Reviewed
• [Presentation] Energy band structure of thermally grown SiO_2/4H-SiC interfaces and its modulation induced by post-oxidation treatments (2010)
  • Author(s): T.Kirino, Y.Kagei, A.Yoshigoe, Y.Teraoka, S.Mitani, Y.Nakano, T.Nakamura, T.Hosoi, T.Shimura, H.Watanabe
  • Organizer: 41^<st> IEEE Semiconductor Interface Specialists Conference
  • Place of Presentation: San Diego (USA)
  • Year and Date: 2010-12-02
• [Presentation] Influence of oxide over-layers formed by supersonic O_2 beam on deuterium desorption from V(001) (2010)
  • Author(s): Y.Teraoka, M.Tode, J.Harries, A.Yoshigoe
  • Organizer: Nano and Surface Science Approaches to Production and Storage of Hydrogen
  • Place of Presentation: Noordwijkerhout(The Netherlands)
  • Year and Date: 2010-11-14
• [Presentation] Oxidation kinetics of SiGe alloy layer studied by real-time XPS (2010)
  • Author(s): H.Hozumi, S.Ogawa, A.Yoshigoe, S.Ishidzuka, J.R.Harries, Y.Teraoka, Y.Takakuwa
  • Organizer: 5^<th> International Symposium on Practical Surface Analysis (PSA-10)
  • Place of Presentation: Gyeongju (Korea)
  • Year and Date: 2010-10-03
• [Presentation] 【Invited】Orientation-mediated control of interfacial structure in epitaxial graphene on silicon substrates (2010)
  • Author(s): M.Suemitsu, H.Fukidome, R.Takahashi, K.Imaizumi, H.Handa, A.Yoshigoe, Y.Teraoka
  • Organizer: 2^<nd>International Symposium on the Science and Technology of Epitaxial Graphene
  • Place of Presentation: Amelia Island (Florida, USA)
  • Year and Date: 2010-09-14
• [Presentation] In-situ STM observation after exposing Si(111)-7x7 surface to supersonic O_2 beam at 300 K (2010)
  • Author(s): A.Yoshigoe, Y.Teraoka
  • Organizer: 27^<th> European Conference on Surface Science
  • Place of Presentation: Groningen (The Netherlands)
  • Year and Date: 2010-08-29
• [Presentation] Thermal degradation analysis of deuterium ion implanted hydrogen storage materials (TiFe and V_<25>Cr_<40>Ti_<35>)using synchrotron radiation photoelectron spectroscopy (2010)
  • Author(s): M.Tode, J.R.Harries, Y.Teraoka, A.Yoshigoe
  • Organizer: International Symposium on Metal-Hydrogen Systems MH2010
  • Place of Presentation: Moscow (Russia)
  • Year and Date: 2010-07-19
• [Presentation] AlN thin film formed by exposing Al(111) to 2.0 eV N_2 molecules and studied in real time and in situ using synchrotron XPS (2010)
  • Author(s): J.R.Harries, Y.Teraoka, A.Yoshigoe
  • Organizer: 37^<th> International Conference on Vacuum Ultraviolet and X-ray Physics (VUVX2010)
  • Place of Presentation: Vancouver (Canada)
  • Year and Date: 2010-07-11
• [Presentation] 【Invited】Viability of graphene-on-silicon technology toward fusion of graphene with advanced Si-CMOS technologies (2010)
  • Author(s): H.Fukidome, R.Takahashi, Y.Miyamoto,H.Handa, H.-C.Kang, H.Karasawa, T.Suemitsu, T.Otsuji, A.Yoshigoe, Y.Teraoka, M.Suemitsu
  • Organizer: 8^<th>International Workshop on Epitaxial Semiconductors on Patterned Substrates and Novel Index Surfaces
  • Place of Presentation: Como (Italy)
  • Year and Date: 2010-06-14
• [Presentation] 【Invited】Interface engineering of ZrO_2/Ge gate stacks by post-deposition annealing and Al_2O_3 capping layers (2010)
  • Author(s): H.Watanabe, G.Okamoto, K.Kutsuki, J.Harries, A.Yoshigoe, Y.Teraoka, T.Hosoi, T.Shimura
  • Organizer: International Symposium on Technology Evolution for Silicon Nano-Electronics
  • Place of Presentation: Tokyo Tech Front (Tokyo)
  • Year and Date: 2010-06-03
• [Presentation] Controlling the interface between graphene and SiC by use of graphene-on-silicon technology (2010)
  • Author(s): H.Fukidome, R.Takahashi, K.Imaizumi, H.Handa, M.Suemitsu, A.Yoshigoe, Y.Teraoka
  • Organizer: 2010 Material Research Society Spring Meeting
  • Place of Presentation: San Francisco (USA)
  • Year and Date: 2010-04-05
• [Presentation] Real-time photoelectron spectroscopy study of 3C-SiC nucleation and growth on Si(001) surface by carbonization with ethylene (2009)
  • Author(s): H.Hozumi, S.Ogawa, A.Yoshigoe, S.Ishidzuka, J.Harries, Y.Teraoka, Y.Takakuwa
  • Organizer: 7^<th> International Symposium on Atomic Level Characterizations for New Materials and Devices'09
  • Place of Presentation: Hawaii (USA)
  • Year and Date: 2009-12-06
• [Presentation] Photoemission spectroscopic analysis with synchrotron radiation of direct nitridation of Al(111) by supersonic N_2 molecular beam (2009)
  • Author(s): Y.Teraoka, J.Harries, A.Yoshigoe
  • Organizer: 22^<nd> International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Sheraton Sapporo Hotel (Hokkaido)
  • Year and Date: 2009-11-16
• [Presentation] In-situ XPS depth-profiling of hydrogen storage material VCrTi during thermal annealing (2009)
  • Author(s): J.R.Harries, Y.Teraoka, A.Yoshigoe, M.Tode
  • Organizer: AVS 56^<th> International Symposium and Exhibition
  • Place of Presentation: San Jose (USA)
  • Year and Date: 2009-11-08
• [Presentation] Real-time observation of oxidation of Si(111)-7x7 surface at 300K by using synchrotron radiation XPS, LEED and STM (2009)
  • Author(s): A.Yoshigoe, Y.Teraoka
  • Organizer: International Workshop on Electronic Spectroscopy for Gas-phase Molecules and Solid Surfaces
  • Place of Presentation: Hotel Matsushima Taikanso (Miyagi)
  • Year and Date: 2009-10-12
• [Presentation] Induced oxidation on Ni(111) by kinetic energy of O_2 molecular beams (2009)
  • Author(s): Y.Teraoka, Y.Kawakami, A.Yoshigoe, J.Harries, A.Hiraya
  • Organizer: 11^<th> International Conference on Electronic Spectroscopy and Structure
  • Place of Presentation: Nara Prefectural New Public Hall (Nara)
  • Year and Date: 2009-10-06
• [Presentation] Synchrotron radiation photoemission study on native oxides of VCrTi alloy and its modification by deuterium ion implantation (2009)
  • Author(s): Y.Teraoka, J.Harries, M.Tode, A.Yoshigoe
  • Organizer: 10^<th> Atomically Controlled Surface, Interface and Nanostructures
  • Place of Presentation: Granada (Spain)
  • Year and Date: 2009-09-21
• [Presentation] Role of translational kinetic energy of O_2 in adsorption process on Si(111)-7x7 surface at room temperature (2009)
  • Author(s): A.Yoshigoe, Y.Teraoka
  • Organizer: 26^<th> European Conference on Surface Science
  • Place of Presentation: Parma (Italy)
  • Year and Date: 2009-08-30
• [Book] American Scientific Publishers, Fabrication of Cu oxides on single crystal Cu surfaces using hyperthermal O_2 molecular beams, eds.(Vol.1, Chapter 6, Metal Oxide Nanostructures and Their Applications) (2010)
  • Author(s): M.Okada, K.Moritani, L.Vattuone, L.Savio, Y.Teraoka, T.Kasai, M.Rocca
  • Total Pages: 33
  • Publisher: Ahmad Umar and Yoon-Bong Hahn
• [Patent(Industrial Property Rights)] グラフェンの形成方法およびグラフェンの形成装置 (2010)
  • Inventor(s): 寺岡有殿、吉越章隆、吹留博一、末光眞希、今泉京
  • Industrial Property Rights Holder: 独立行政法人日本原子力研究開発機構、国立大学法人東北大学
  • Industrial Property Number: 特許,特願2010-45842
  • Filing Date: 2010-03-02