Frontier science and technology of nanoblock transport and arrangement

2010 Fiscal Year Final Research Report

• Project/Area Number: 20360040
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied physics, general
• Research Institution: Kyushu University
• Principal Investigator: SHIRATANI Masaharu Kyushu University, システム情報科学研究院, 教授 (90206293)
• Co-Investigator(Kenkyū-buntansha): KOGA Kazunori 九州大学, 大学院・システム情報科学研究院, 准教授 (90315127)
• Project Period (FY): 2008 – 2010
• Keywords: プラズマ / プラズマナノ工場

Research Abstract

In this project, we have studied transport, arrangement and deposition of nanoparticles. We have obtained following results.
(1) Localized potential structure on substrates allows us to arrange nanoparticles on the substrates.
(2) Novel developed 2-dementional in-situ laser light scattering method is useful for evaluating the initial growth phase of nanoparticles in 2-d ways.
(3) Nanoparticle-composit films show ultra low-k and high Young's medullas.
(4) Amplitude modulated pulse discharges are effective for realizing deposition profile control on fine structures.

Research Products

• [Journal Article] Effects of Ar Addition on Breakdown Voltage in a Si(CH_3)_2(OCH_3)_2 RF Discharge (2010)
  • Author(s): G.Uchida, S.Nunomura, H.Miyata, S.Iwashita, D.Yamashita, H.Matsuzaki, K.Kamataki, N.Itagaki, K.Koga, M.Shiratani
  • Journal Title: Proceedings of IEEE TENCON 2010 Pages: 2199-2201
  • Peer Reviewed
• [Journal Article] LHD Experimental Group, Carbon Dust Particles Generated Due to H_2 Plasma-Carbon Wall Interaction (2010)
  • Author(s): H.Miyata, K.Nishiyama, S.Iwashita, H.Matsuzaki, D.Yamashita, G.Uchida, N.Itagaki, K.Kamataki, K.Koga, M.Shiratani, N.Ashikawa, S.Masuzaki, K.Nishimura, A.Sagara
  • Journal Title: Proceedings of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas Pages: CTP.00114
• [Journal Article] Detection of nano-particles formed in CVD plasmas using a two-dimensional photon counting laser light scattering method (2009)
  • Author(s): H.Miyahara, S.Iwashita, H.Miyata, H.Matsuzaki, K.Koga, M.Shiratani
  • Journal Title: Journal of Plasma and Fusion Research Series vol.8 Pages: 700-704
  • Peer Reviewed
• [Journal Article] Control of Three Dimensional Transport of Nano-blocks by Amplitude Modulated Pulse RF Discharges using an Electrode with Needles (2009)
  • Author(s): S.Iwashita, H.Miyata, H.Matsuzaki, K.Koga, M.Shiratani
  • Journal Title: Journal of Plasma and Fusion Research Series vol.8 Pages: 582-586
  • Peer Reviewed
• [Journal Article] Porosity Control of Nano-Particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation (2009)
  • Author(s): S.Iwashita, H.Miyata, K.Koga, H.Matsuzaki, M.Shiratani, M.Akiyama
  • Journal Title: Proceedings of 2009 International Symposium on Dry Process Pages: 99-100
• [Journal Article] Rapid transport of nano-particles having a fractional elemental charge on average in capacitively coupled rf discharges by amplitude modulating discharge voltage (2008)
  • Author(s): M.Shiratani, K.Koga, S.Iwashita, S.Nunomura
  • Journal Title: Faraday Discussions Vol.137 Pages: 127-138
  • Peer Reviewed
• [Journal Article] Nanoparticle coagulation in fractionally charged and charge fluctuating dusty plasmas (2008)
  • Author(s): S.Nunomura, M.Shiratani, K.Koga, M.Kondo, Y.Watanabe
  • Journal Title: Art. vol.15 Pages: No.080703
  • Peer Reviewed
• [Presentation] Flux measurements of carbon dust particles towards biased substrates in H2 helicon discharge plasmas (2011)
  • Author(s): K.Nishiyama, K.Koga, M.Shiratani, 他5名
  • Organizer: The 12th International Workshop on Advanced Plasma Processing and Diagnostics
  • Place of Presentation: 九州大学,福岡市
  • Year and Date: 2011-01-06
• [Presentation] Effects of Ar Addition on Breakdown Voltage in a Si(CH3)2(OCH3)2 RF Discharge (2010)
  • Author(s): G.Uchida, K.Koga, M.Shiratani, 他7名
  • Organizer: IEEE TENCON 2010
  • Place of Presentation: 福岡国際センター,福岡市
  • Year and Date: 2010-11-22
• [Presentation] In-Situ Collection of Dust Particles Produced Due to Interaction between Helicon Discharge Plasmas and Graphite on Substrates with Bias Voltage (2010)
  • Author(s): 白谷正治, 古閑一憲, 他12名
  • Organizer: 11th Workshop on Fine Particle Plasmas
  • Place of Presentation: 核融合科学研究所,土岐市
  • Year and Date: 2010-11-20
• [Presentation] Manipulation of Nano-Objects Using Plasmas for a Plasma Nano-Factory (2010)
  • Author(s): M.Shiratani, K.Koga, 他3名
  • Organizer: The 11th Asia Pacific Physics Conference
  • Place of Presentation: 上海,中国
  • Year and Date: 2010-11-14
• [Presentation] Deposition of Nanoparticles Using Substrate Bias Voltage (2010)
  • Author(s): 古閑一憲, 白谷正治, 他8名
  • Organizer: 23rd International Microprocesses and Nanotechnogy Conference
  • Place of Presentation: リーガロイヤルホテル小倉,小倉市
  • Year and Date: 2010-11-11
• [Presentation] Rapid Transport of Nano-Particles as a Key Technology for Fabrication of Quantum-dot Solar Cells (2010)
  • Author(s): K.Nishiyama, K.Koga, M.Shiratani, 他3名
  • Organizer: Third International Workshop on Thin Film Silicon Solar Cells
  • Place of Presentation: ANAホテル長崎,長崎市
  • Year and Date: 2010-10-14
• [Presentation] Carbon Dust Particles Generated Due to H2 Plasma-Carbon Wall Interaction (2010)
  • Author(s): 宮田大嗣, 古閑一憲, 白谷正治, 他12名
  • Organizer: 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
  • Place of Presentation: パリ,フランス
  • Year and Date: 2010-10-05
• [Presentation] 水素プラズマとグラファイトの相互作用で発生したダストの壁へのフラックスに対する壁電位の影響 (2010)
  • Author(s): 宮田大嗣, 古閑一憲, 白谷正治, 他11名
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学,長崎市
  • Year and Date: 2010-09-15
• [Presentation] Control of Nano-Block Transport Using Amplitude Modulated Pulse RF Discharges (2010)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他2名
  • Organizer: 20th European Conference on the Atomic and Molecular Physics of Ionized Gases
  • Place of Presentation: ノビサダ,セルビア
  • Year and Date: 2010-07-15
• [Presentation] Flux Measurements of Dust Particles during Hydrogen Discharges in LHD (2010)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他7名
  • Organizer: The 19th International Conference on Plasma Surface Interactions in Controlled Fusion Devices
  • Place of Presentation: サンディエゴ,アメリカ
  • Year and Date: 2010-05-25
• [Presentation] Control of surface roughness of nano-particle composite low-k film deposited in CVD plasma (2010)
  • Author(s): 宮田大嗣, 古閑一憲, 白谷正治, 他3名
  • Organizer: 2nd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
  • Place of Presentation: 名城大学
  • Year and Date: 2010-03-10
• [Presentation] プラズマCVDによるSiOCHナノ粒子構造の多孔質低誘電率膜 (2009)
  • Author(s): 宮田大嗣, 古閑一憲, 白谷正治, 他4名
  • Organizer: 19th Academic Symposium of MRS-Japan 2009
  • Place of Presentation: 横浜情報文化センター
  • Year and Date: 2009-12-09
• [Presentation] Amplitude modulated pulse RF discharges for producing and driving nano-blocks (2009)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他2名
  • Organizer: American Vacuum Society 56th International Symposium
  • Place of Presentation: San Jose, USA
  • Year and Date: 2009-11-11
• [Presentation] Nanoblock manipulation in CVD plasmas (2009)
  • Author(s): 宮田大嗣, 古閑一憲, 白谷正治, 他3名
  • Organizer: 62nd Gaseous Electronics Conference
  • Place of Presentation: Saratoga Springs, NY, USA
  • Year and Date: 2009-10-22
• [Presentation] Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation 2009 (2009)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他3名
  • Organizer: International Symposium on Dry Process
  • Place of Presentation: Busan, Korea
  • Year and Date: 2009-09-24
• [Presentation] Deposition of porous low-k films having nano-grained structures using amplitude modulated pulse rf discharges (2009)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他3名
  • Organizer: Seventh Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2009
  • Place of Presentation: Busan, Korea
  • Year and Date: 2009-09-24
• [Presentation] ナノ粒子含有多孔質低誘電率膜物性の粒子サイズ依存性 (2009)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他3名
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-10
• [Presentation] Amplitude modulated pulse RF discharges for synthesizing nano-particle composite porous low-k films Memorial Symposium for the Retirement of Professor Tachibana (2009)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治, 他3名
  • Organizer: Toward the Next Generation of Plasma Science and Technology
  • Place of Presentation: 京都大学
  • Year and Date: 2009-05-30
• [Presentation] Plasma manipulation of nano-blocks and its application to ULK film deposition (2009)
  • Author(s): M.Shiratani, K.Koga, 他3名
  • Organizer: 1st International Symposium on Advance Plasma Science and its Applications (ISPlasma 2009)
  • Place of Presentation: 愛知県
  • Year and Date: 2009-03-11
• [Presentation] Nano-particle manipulation using pulse RF discharges with amplitude modulation (2008)
  • Author(s): 岩下伸也, 古閑一憲, 白谷正治
  • Organizer: 61st Annual Gaseous Electronics Conference
  • Place of Presentation: 米国
  • Year and Date: 2008-10-16
• [Presentation] Formation and transport of nano-particles using pulse RF discharges with amplitude modulation (2008)
  • Author(s): S.Iwashita, H.Miyata, H.Matsuzaki, K.Koga, M.Shiratani
  • Organizer: ICPP2008 Satellite Meeting on Plasma Physics and Advanced Applications in Aso
  • Place of Presentation: 熊本県
  • Year and Date: 2008-09-13
• [Book] Chapter 31. Title : "Nano-block Assembly Using RF Discharge with Amplitude Modulation (Wiley-VCH Verlag GmbH & Co.) (2010)
  • Author(s): S.Iwashita, H.Mityata, K.Koga, M.Shiratani
  • Total Pages: 377-383
  • Publisher: Industrial Plasma Technology
• [Remarks] ホームページ等