2010 Fiscal Year Final Research Report
Dual-axis micro friction force miscroscopy pobe for dynamic measurements
| Project/Area Number |
20360077
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Nagoya University |
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Principal Investigator |
FUKUZAWA Kenji Nagoya University, 大学院・工学研究科, 教授 (60324448)
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| Co-Investigator(Kenkyū-buntansha) |
SHIKIDA Mitsuhiro 名古屋大学, 大学院・工学研究科, 准教授 (80273291)
ITOH Shintaro 名古屋大学, 大学院・工学研究科, 講師 (50377826)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 走査型プローブ顕微鏡 / 摩擦力顕微鏡 / トライボロジー / マイクロマシン |
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| Research Abstract |
Friction force microscopy, a type of scanning probe microscopy, is a core method for measuring micro/nanotribological phenomena. In this study, we succeeded in developing a probe with an electrostatic actuator, which can provide the dynamic measurement and probe position control. In this probe, the lateral and vertical forces are measured without interfering with each other, by detecting the lateral and vertical forces with the double-cantilever and torsion beams, respectively. The electrode part that faces the double-cantilever beam was successfully fabricated by using micromachining techniques, which can provide an electrostatic actuator that drives the probe laterally.
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