2010 Fiscal Year Final Research Report
Combination of nano imprint and local mechano-chemical machining by micro robot
| Project/Area Number |
20360114
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Electro-Communications |
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Principal Investigator |
AOYAMA Hisayuki The University of Electro-Communications, 情報理工学研究科, 教授 (40159306)
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| Co-Investigator(Kenkyū-buntansha) |
IWATA Futoshi 静岡大学, 工学部, 教授 (30262794)
OOTA Akihiro 産業技術総合研究所, 計測標準部門, 室長 (80356641)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 超小型機構 / ナノインプリント / 電磁石 / 圧電素子 / ボイスコイルモータ / 局所化学反応 / SPM / リニアスケール |
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| Research Abstract |
In this project, the newly developed micro machining that is combined with nano imprint and local chemical micro reaction was proposed and the performances were experimentally proved. The micro actuator for nano imprint was also developed and implemented onto the micro robor that was composed of the piezo elements and electromagnets so that it could move like an inchworm with the nano stepping resolution. And the unique dispenser that can provide pico-liter resolution was designed and fabricated so that it could make such micro chemical reaction and successfully generate the accurate micro double layers capsule.
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Research Products
(16 results)
