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2010 Fiscal Year Final Research Report

Research on three dimensional wiring by 3-D patterning and vertical shape forming technologies.

Research Project

  • PDF
Project/Area Number 20360116
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionKagawa University

Principal Investigator

OOHIRA Fumikazu  Kagawa University, 工学部, 教授 (80325315)

Co-Investigator(Kenkyū-buntansha) SASAKI Minoru  豊田工業大学, 工学部, 教授 (70282100)
Co-Investigator(Renkei-kenkyūsha) MIHARA Yutaka  香川大学, 工学部, 特命教授 (50314901)
YOSIMURA Hidenori  香川大学, 工学部, 准教授 (30314412)
Project Period (FY) 2008 – 2010
Keywords三次元実装 / 垂直配線 / スプレーコート / 斜め露光 / 光モジュール
Research Abstract

The spray coating and inclined UV light exposure technologies were examined to realize the three dimensional wiring pattern. Also, electroplating condition was examined to form the wiring. The technologies were applied to the Chip on Glass optical module. The resistance of the wiring is 0.1~0.2Ω, and also reliability was good. As the result, these technologies can be applicable to the three dimensional wiring. Further, the high aspect ratio vertical Si shape could be formed by the unisotropic wet etching.

  • Research Products

    (7 results)

All 2011 2010 2009 2008 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (5 results) Remarks (1 results)

  • [Journal Article] Proposal of high-density packaging construction and conductive pattern forming method on vertical wall using spray coating technology2011

    • Author(s)
      Hiroki Morii, Fumikazu Oohira, et al
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines vol.131

      Pages: 40-44

    • Peer Reviewed
  • [Presentation] スプレーコーティングの気流解析と膜厚分布均一化2010

    • Author(s)
      佐々木実
    • Organizer
      第27回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      島根
    • Year and Date
      2010-10-14
  • [Presentation] Absorbent liquid immersion angled exposure for 3D Photolithography2010

    • Author(s)
      Hironori Kubo, Minoru Sasaki
    • Organizer
      IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
    • Place of Presentation
      Sapporo
    • Year and Date
      2010-08-12
  • [Presentation] Application of micro-nano technologies for optical and biological fields2009

    • Author(s)
      大平文和
    • Organizer
      MIPE2009
    • Place of Presentation
      Tsukuba
    • Year and Date
      2009-06-16
  • [Presentation] スプレーコート技術と斜め露光技術による垂直側面への配線形成技術2008

    • Author(s)
      森井裕貴、大平文和, 他
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      沖縄
    • Year and Date
      2008-10-22
  • [Presentation] Conductive pattern forming method on vertical wall using spray coating and angled exposure technologies.2008

    • Author(s)
      森井裕貴, 大平文和, et al.
    • Organizer
      IEEE Optical MEMS
    • Place of Presentation
      Freiburg
    • Year and Date
      2008-08-13
  • [Remarks] ホームページ等

    • URL

      http://www.eng.kagawa-u.ac.jp/~terao/

URL: 

Published: 2012-01-26   Modified: 2016-04-21  

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