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2010 Fiscal Year Final Research Report

Study on low energy-loss diamond power diodes

Research Project

  • PDF
Project/Area Number 20360147
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionNational Institute for Materials Science

Principal Investigator

TERAJI Tokuyuki  National Institute for Materials Science, センサ材料センター, 主任研究員 (50332747)

Project Period (FY) 2008 – 2010
Keywordsダイヤモンド / ショットキーダイオード / 高耐圧 / 表面終端 / 界面輸送特性 / オーミック電極
Research Abstract

Origin of inducing the leakage current of diamond Schottky diodes (SBDs) were investigated. It was found that there are several factors of leakage current increase, which are categorized into the essential factor coming from the solid-state properties of diamond, device structural factors of diamond SBDs, and the extrinsic factors of crystalline defects of diamond. Among those, strong correlation between the leakage current level and the Schottky barrier height was observed, that is due to the formation of the localized low Schottky barrier height. This feature is essential problem of diamond because the diamond SBD utilizes surface termination properties and diamond has low dielectric constant. As for the effect of crystalline defects, we proposed the non-destructive detection method of the killer defects of diamond SBDs. Thermal stability of diamond SBDs was found to occur by the desorption of the interface oxygen.

  • Research Products

    (46 results)

All 2011 2010 2009 2008

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (30 results) Book (3 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Schottky diode architectures on p-type diamond for fast switching, high forward current density and high breakdown field rectifiers2011

    • Author(s)
      P.Muret, P.-N.Volpe, T.-N.Tran-Thi, J.Pernot, C.Hoarau, F.Omns, T.Teraji
    • Journal Title

      20

      Pages: 285-289

    • Peer Reviewed
  • [Journal Article] Extreme dielectric strength in boron doped homoepitaxial diamond2010

    • Author(s)
      P.N.Volpe, P.Muret, J.Pernot, F.Omnes, T.Teraji, Y.Koide, F.Jomard, D.Planson, P.Brosselard, N.Dheilly, B.Vergne, S.Scharnholz
    • Journal Title

      Appl.Phys.Lett. 97

      Pages: 223501 1-3

    • Peer Reviewed
  • [Journal Article] High breakdown voltage Schottky diodes synthesized on p-type CVD diamond layer2010

    • Author(s)
      P.N.Volpe, P.Muret, J.Pernot, F.Omnes, T.Teraji, F.Jomard, D.Planson, P.Brosselard, N.Dheilly, B.Vergne, S.Scharnholz
    • Journal Title

      phys.status solide. 207

      Pages: 2088-2092

    • Peer Reviewed
  • [Journal Article] Hall hole mobility in boron-doped homoepitaxial diamond2010

    • Author(s)
      J.Pernot, P.N.Volpe, F.Omns, P.Muret, V.Mortet, K.Haenen, T.Teraji
    • Journal Title

      Phys.Rev.B 81

      Pages: 205203 1-6

    • Peer Reviewed
  • [Journal Article] Effects of shallow traps on the reverse current of diamond Schottky diode : An electrical transient study2010

    • Author(s)
      Y.Garino, T.Teraji, S.Koizumi, Y.Koide, T.Ito
    • Journal Title

      phys.stat.sol.(a) 207

      Pages: 1460-1463

    • Peer Reviewed
  • [Journal Article] p-type diamond Schottky diodes fabricated by vacuum ultraviolet light/ozone surface oxidation : Comparison with diodes based on wet-chemical oxidation2009

    • Author(s)
      Y.Garino, T.Teraji, S.Koizumi, Y.Koide, T.Ito
    • Journal Title

      phys.stat.sol.(a) 206

      Pages: 2082-2085

    • Peer Reviewed
  • [Journal Article] High-temperature stability of Au/p-type diamond Schottky diode2009

    • Author(s)
      T.Teraji, Y.Koide, T.Ito
    • Journal Title

      phys.stat.sol. RRL 3

      Pages: 211-213

    • Peer Reviewed
  • [Journal Article] Low-leakage p-type diamond Schottky diodes prepared using vacuum ultraviolet light/ozone treatment2009

    • Author(s)
      T.Teraji, Y.Garino, Y.Koide, T.Ito
    • Journal Title

      J.Appl.Phys. 105

      Pages: 126109

    • Peer Reviewed
  • [Journal Article] Deep levels in homoepitaxial boron-doped diamond films studied by capacitance and current transient spectroscopies2008

    • Author(s)
      P.Muret, J.Pernot, T.Teraji, T.Ito
    • Journal Title

      phys.stat.sol.(a) 205

      Pages: 2179-2183

    • Peer Reviewed
  • [Journal Article] Ohmic contact for p-type diamond without post-annealing2008

    • Author(s)
      T.Teraji, S.Koizumi, Y.Koide
    • Journal Title

      J.Appl.Phys. 104

      Pages: 016104 1-3

    • Peer Reviewed
  • [Journal Article] Electric field breakdown of lateral-type Schottky diodes formed on lightly-doped homoepitaxial diamond2008

    • Author(s)
      T.Teraji, S.Koizumi, Y.Koide, T.Ito
    • Journal Title

      Appl.Surf.Sci. 254

      Pages: 6273-6276

    • Peer Reviewed
  • [Journal Article] Near-Surface Defects in Boron-Doped Diamond Schottky Diodes Studied From Capacitance Transients2008

    • Author(s)
      P.Muret, J.Pernot, T.Teraji, T.Ito
    • Journal Title

      Appl.Phys.Exp. 1

      Pages: 035003 1-3

    • Peer Reviewed
  • [Presentation] 大型単結晶基板上へ成長したホモエピタキシャルダイヤモンド薄膜2011

    • Author(s)
      寺地徳之
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川大学,厚木
    • Year and Date
      2011-03-26
  • [Presentation] 炭化タングステン/p型ダイヤモンドショットキーダイオードの逆方向特性2011

    • Author(s)
      寺地徳之,アレキサンダ フィオリ,桐谷範彦,谷本智,小出康夫
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川大学,厚木
    • Year and Date
      2011-03-26
  • [Presentation] ダイヤモンド縦型ショットキーバリアダイオードにおける漏れ電流評価2011

    • Author(s)
      大曲新矢,寺地徳之,小出康夫
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川大学,厚木
    • Year and Date
      2011-03-26
  • [Presentation] Diamond Schottky interfaces with low barrier height patches2011

    • Author(s)
      T.Teraji, A.Fiori, N.Kiritani, S.Tanimoto, S.Ohmagari, Y.Koide
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XVI
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2011-02-21
  • [Presentation] Excess tunnel current in {111}-oriented homoepitaxial diamond p-n junction2011

    • Author(s)
      Y.Garino, T. Teraji, A.Lazea, S.Koizumi
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XVI
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2011-02-21
  • [Presentation] 金属/p型ダイヤモンド界面の安定性とショットキーダイオード特性2011

    • Author(s)
      寺地徳之
    • Organizer
      応用物理学会 応用電子物性分科会
    • Place of Presentation
      機械振興会館,港区
    • Year and Date
      2011-01-18
  • [Presentation] 炭化タングステン/p型ダイヤモンドショットキーダイオードの耐圧特性2010

    • Author(s)
      寺地徳之,FIORI Alexandre,桐谷範彦,谷本智,小出康夫,
    • Organizer
      第24回ダイヤモンドシンポジウム
    • Place of Presentation
      東京工業大学,中目黒
    • Year and Date
      2010-11-19
  • [Presentation] 縦型ダイヤモンドショットキーバリアダイオードの逆方向特性評価2010

    • Author(s)
      大曲新矢,寺地徳之,小出康夫
    • Organizer
      第24回ダイヤモンドシンポジウム
    • Place of Presentation
      東京工業大学,中目黒
    • Year and Date
      2010-11-19
  • [Presentation] 大型単結晶基板上へのダイヤモンド薄膜ホモエピタキシャル成長2010

    • Author(s)
      寺地徳之
    • Organizer
      第24回ダイヤモンドシンポジウム
    • Place of Presentation
      東京工業大学,中目黒
    • Year and Date
      2010-11-17
  • [Presentation] 電子デバイス用ホウ素ドープ高品質{111}ホモエピタキシャルダイヤモンド薄膜2010

    • Author(s)
      LAZEA Andrada,寺地徳之,小泉聡
    • Organizer
      第24回ダイヤモンドシンポジウム
    • Place of Presentation
      東京工業大学,中目黒
    • Year and Date
      2010-11-17
  • [Presentation] 低ショットキー障壁パッチがもたらすダイヤモンドショットキーダイオード逆方向電流の増加2010

    • Author(s)
      寺地徳之,Alexandre FIORI,桐谷範彦,谷本智,小出康夫,
    • Organizer
      第19回シリコンカーバイド(SiC)及び関連ワイドギャップ半導体研究会
    • Place of Presentation
      つくば国際会議場,つくば市
    • Year and Date
      2010-10-22
  • [Presentation] ダイヤモンドモットダイオード2010

    • Author(s)
      寺地徳之,小出康夫
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      東海大学,平塚
    • Year and Date
      2010-03-18
  • [Presentation] Stability of p-type diamond Schottky diode in high-temperature operation2010

    • Author(s)
      T.Teraji, Y.Garino, Y.Koide, T.Ito
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XV
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2010-02-24
  • [Presentation] Breakdown voltage higher than 7.5 kV in Schottky diamond diodes2010

    • Author(s)
      P.Volpe, P.Muret, F.Omnes, J.Pernot, T.Teraji, F.Jomard, D.Planson, P.Brosselard, S.Scharnholz, B.Vergne
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XV
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2010-02-24
  • [Presentation] High forward current density and fast switching diodes made of low and high boron doped stacked diamond structure2010

    • Author(s)
      P.Volpe, P.Muret, T.Teraji, F.Omnes, J.Pernot, F.Jomard
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XV
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2010-02-22
  • [Presentation] Au/p-diamondショットキー界面のキャリヤ輸送機構2009

    • Author(s)
      寺地徳之,GARINO Yiuri,小泉聡,小出康夫,伊藤利道
    • Organizer
      第18回シリコンカーバイド(SiC)及び関連ワイドギャップ半導体研究会
    • Place of Presentation
      神戸国際会議場,神戸市
    • Year and Date
      2009-12-17
  • [Presentation] 真空紫外線/オゾン処理を用いて形成したp型ダイヤモンドショットキーダイオード2009

    • Author(s)
      寺地徳之,小泉聡,小出康夫
    • Organizer
      第23回ダイヤモンドシンポジウム
    • Place of Presentation
      千葉工業大学,津田沼
    • Year and Date
      2009-11-20
  • [Presentation] 下地研磨プロセスに起因するダイヤモンド表面形態の変化2009

    • Author(s)
      寺地徳之
    • Organizer
      第23回ダイヤモンドシンポジウム
    • Place of Presentation
      千葉工業大学,津田沼
    • Year and Date
      2009-11-18
  • [Presentation] Low reverse current diamond Schottky diodes prepared by VUV/ozone treatment2009

    • Author(s)
      T.Teraji, Y.Garino, Y.Koide, T.Ito
    • Organizer
      20^<th> European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes and Nitrides
    • Place of Presentation
      Athens Ledra Marriott Hotel, Athens, Greece
    • Year and Date
      2009-09-08
  • [Presentation] High quality boron doped diamond layers for power electronic devices2009

    • Author(s)
      P.Volpe, P.Muret, T.Teraji, J.Pernot, F.Omnes, F.Jomard
    • Organizer
      20^<th> European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes and Nitrides
    • Place of Presentation
      Athens Ledra Marriott Hotel, Athens, Greece
    • Year and Date
      2009-09-07
  • [Presentation] 低漏れ電流p型ダイヤモンド横型ショットキーダイオード2009

    • Author(s)
      寺地徳之,Yiuri Garino,小出康夫,伊藤利道
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学,つくば
    • Year and Date
      2009-04-01
  • [Presentation] p型ボロンドープダイヤモンドへの熱処理を伴わないオーミック電極の形成2009

    • Author(s)
      寺地徳之,小泉聡,小出康夫
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学,つくば
    • Year and Date
      2009-04-01
  • [Presentation] Low-leakage p-diamond Schottky diodes with lateral configuration2009

    • Author(s)
      T.Teraji, Y.Garino, Y.Koide, T.Ito
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XIV
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2009-03-04
  • [Presentation] Electrical characterization of {111}-oriented homoepitaxial diamond p-n junction2009

    • Author(s)
      Y.Garino, T.Teraji, S.Koizumi
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XIV
    • Place of Presentation
      Hasselt Univ., Hasselt, Belgium
    • Year and Date
      2009-03-02
  • [Presentation] p型ホモエピタキシャルダイヤモンド薄膜に形成した横型ショットキーダイオード2008

    • Author(s)
      寺地徳之,GARINO Yiuri,小泉聡,小出康夫,伊藤利道
    • Organizer
      第17回シリコンカーバイド(SiC)及び関連ワイドギャップ半導体研究会
    • Place of Presentation
      大田区産業プラザ,大田区
    • Year and Date
      2008-12-08
  • [Presentation] Charging behavior in reverse characteristics of diamond Schottky diodes2008

    • Author(s)
      Yiuri Garino,寺地徳之,小泉聡,小出康夫,伊藤利道
    • Organizer
      第22回ダイヤモンドシンポジウム
    • Place of Presentation
      早稲田大学,新宿
    • Year and Date
      2008-10-22
  • [Presentation] p型ホウ素ドープダイヤモンドへの室温オーミックコンタクトの形成2008

    • Author(s)
      寺地徳之,小泉聡,小出康夫
    • Organizer
      第22回ダイヤモンドシンポジウム
    • Place of Presentation
      早稲田大学,新宿
    • Year and Date
      2008-10-22
  • [Presentation] ダイヤモンドショットキーダイオードの界面輸送機構2008

    • Author(s)
      寺地徳之,Yiuri Garino,小出康夫,伊藤利道
    • Organizer
      第22回ダイヤモンドシンポジウム
    • Place of Presentation
      早稲田大学,新宿
    • Year and Date
      2008-10-21
  • [Presentation] Reverse current transient behavior in diamond lateral Schottky diodes2008

    • Author(s)
      Yiuri Garino,寺地徳之,小泉聡,小出康夫,伊藤利道
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学,春日井
    • Year and Date
      2008-09-02
  • [Presentation] p型ダイヤモンドのショットキーダイオード界面の輸送機構2008

    • Author(s)
      寺地徳之,Yiuri Garino,小出康夫,伊藤利道
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学,春日井
    • Year and Date
      2008-09-02
  • [Book] Physics and Applications of CVD Diamond(Eds. Satoshi Koizumi, Christoph Nebel, Milos Nesladek)(Chemical Vapor Deposition of Homoepitaxial Diamond Films)2008

    • Author(s)
      寺地徳之
    • Total Pages
      29-76
    • Publisher
      Wiley-VCH
  • [Book] ダイヤモンドエレクトロニクスの最前線(p型ホモエピタキシャルダイヤモンド薄膜の半導体特性 ISBN: 978-4-7813-0049-8)2008

    • Author(s)
      寺地徳之
    • Total Pages
      75-85
    • Publisher
      CMC出版
  • [Book] ダイヤモンドエレクトロニクスの最前線(オーミックコンタクト ISBN:978-4-7813-0049-8)2008

    • Author(s)
      小出康夫,寺地徳之
    • Total Pages
      162-179
    • Publisher
      CMC出版
  • [Patent(Industrial Property Rights)] ダイヤモンド半導体デバイス2008

    • Inventor(s)
      寺地徳之,小泉聡,小出康夫
    • Industrial Property Rights Holder
      独立行政法人物質・材料研究機構
    • Industrial Property Number
      特許,JP2008/062111
    • Filing Date
      2008-07-03

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Published: 2012-01-26   Modified: 2016-04-21  

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