2010 Fiscal Year Final Research Report
Development of depth profile analysis of nano materials using X-ray energy variable XPS
| Project/Area Number |
20510110
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
YOSHIKAWA Hideki National Institute for Materials Science, ナノ計測センター, 主幹研究員 (20354409)
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| Project Period (FY) |
2008 – 2010
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| Keywords | XPS / 放射光 / エネルギー可変 / 断層解析 / DDF / 非対称パラメーター |
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| Research Abstract |
Hard X-ray photoemission spectroscopy (HX-XPS) has been developed for the analysis of nano materials using energy-variable hard X-ray at synchrotron radiation facilities. The depth profile analysis by HX-XPS is promising as a quantitative nondestructive depth profile technique. For the further development of this technique, the asymmetry parameter, the emission depth distribution function (EDDF) and energy loss function which govern the HX-XPS spectra should be evaluated quantitatively. This work developed the precise algorism which evaluates these quantities by the combination of the angle-resolved&energy-resolved HX-XPS measurements, Monte Carlo simulation and REELS analysis. As an example, HX-XPS analysis of nano particles, which has core-shell structure (core : Ag, shell: polydiacetylene), has been carried out successfully.
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