2010 Fiscal Year Final Research Report
Elementary processes of atmospheric-pressure molecular gas discharge plasmas in non-equilibrium state and their diagnostics with OES
| Project/Area Number |
20540480
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
AKATSUKA Hiroshi Tokyo Institute of Technology, 原子炉工学研究所, 准教授 (50231808)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUURA Haruaki 東京工業大学, 原子炉工学研究所, 助教 (70262326)
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| Co-Investigator(Renkei-kenkyūsha) |
YUJI Toshifumi 宮崎大学, 教育文化学部, 講師 (80418988)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 大気圧プラズマ / 非平衡プラズマ / 発光分光計測 / 励起状態の生成消滅 / レート方程式 / 窒素プラズマ / アルゴンプラズマ |
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| Research Abstract |
We review fundamentals of optical emission spectroscopy (OES) of plasmas of atmospheric pressure and, in particular, its applications to processing plasmas. Collisional radiative model is described to understand the excitation kinetics and population distributions of excited states in order to examine the electron temperature and density. It is shown that corona equilibrium is often adopted as justifiable assumption of excitation kinetics for general processing plasmas. Line intensity measurement methods are studied for atmospheric-pressure Ar plasma and low-pressure N2 plasma. Population densities of excited states of argon atoms are theoretically examined for ionizing argon plasma in a state of non-equilibrium under atmospheric pressure from the viewpoint of elementary processes with collisional radiative model. The dependence of excited state populations on the electron and gas temperatures is discussed.
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Research Products
(26 results)
