Fundamental study of face-to-face settled superconducting magnetron sputtering technique

2010 Fiscal Year Final Research Report

• Project/Area Number: 20560006
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials science/Crystal engineering
• Research Institution: Niigata University
• Principal Investigator: OKA Tetsuo Niigata University, 自然科学系, 教授 (40432091)
• Co-Investigator(Kenkyū-buntansha): FUKUI Satoshi 新潟大学, 自然科学系, 准教授 (70293199) ; OGAWA Jun 新潟大学, 自然科学系, 准教授 (60377182) ; SHIMIZU Hidehiko 新潟大学, 自然科学系, 准教授 (00313502)
• Project Period (FY): 2008 – 2010
• Keywords: 超伝導体

Research Abstract

We constructed a novel type of magnetron sputtering device characterized by its strong magnetic field generation with face-to-face settled target cathodes. By using the device, strong magnetic field of 3.2 T enabled us to obtain a novel sputtering source. As a result of experimental operations, we observed DC plasma discharges under the circumstance of strong field 1 T with the power application up to 650 V. The difference of the property of plasma discharges showed us a plasma magnetron discharge which varied its shapes with changing magnetic field distributions. The deposition rate of 0.06nm/min derived from the results of rate measurement by ICP analysis was estimated as same level of commercially-supplied sputtering devices, which showed possible high rate sputtering machines. We succeeded in obtaining a new sputtering equipment and actual deposition of copper film with several ten times faster than usual magnetic field equipped in ordinary sputtering machines. Sustainable and stable plasma discharge was observed by containing plasma and magnetic field between the poles.

Research Products

• [Journal Article] Development of a small-size superconducting bulk magnet system using a 13 K refrigerator (2010)
  • Author(s): K.Yokoyama, T.Oka, K.Noto
  • Journal Title: IEEE Transactions on Applied Superconductivity 22 Pages: 973-976
• [Journal Article] Evaluation of Magnetic Force Distribution On a Pair of Superconducting Bulk Magnet (2010)
  • Author(s): K.Yokoyama, T.Oka, K.Note
  • Journal Title: Physica C 470 Pages: 1201-1206
• [Journal Article] 対向型超伝導スパッタ装置の製作と動作特性の取得 (2010)
  • Author(s): 関崎大輔
  • Journal Title: 新潟大学大学院自然科学研究科 数理・情報電子工学専攻
• [Journal Article] 対向型バルク磁石を使った超伝導スパッタ装置の開発と放電現象の観測 (2009)
  • Author(s): 村本大輔
  • Journal Title: 新潟大学工学部電気電子工学科
• [Presentation] Magnetic Separation Technique for Ground Water by Five HTS Melt-Processed Bulk Magnets Arranged in a Line (2010)
  • Author(s): T.Oka, H.Seki, T.Kimura, D.Mimura, S.Fukui, J.Ogawa, T.Sato, M.Ooizumi, H.Fujishiro, H.Hayashi, K.Yokoyama, C.Stiehler
  • Organizer: 23rd International Symposium On Superconductivity (ISS2010)
  • Year and Date: 20101101-20101103
• [Presentation] Improvement of a Magnetization Method on a Small-Size Superconducting Bulk Magnet System (2010)
  • Author(s): K.Yokoyama, T.Oka, K.Noto
  • Organizer: 23rd International Symposium On Superconductivity (ISS2010)
  • Year and Date: 20101101-20101103
• [Presentation] 対向型超伝導マグネトロンスパッタ装置の開発 (2010)
  • Author(s): 関崎大輔, 村本大輔, 小川純, 福井聡, 佐藤孝雄, 岡徹雄
  • Organizer: 電気学会東京支部新潟支所
  • Place of Presentation: 新潟
  • Year and Date: 2010-11-27
• [Presentation] Evaluation of pulsed field magnetization on a superconducting bulk magnet system using a 13 K refrigerator (2010)
  • Author(s): K.Yokoyama, T.Oka, K.Noto
  • Organizer: Applied Superconductivity Conference (ASC 2010)
  • Year and Date: 2010-08-04
• [Presentation] Performances of Trapped Magnetic Field in Superconducting Bulk Magnets Activated by Pulsed Field Magnetization (2010)
  • Author(s): T.Oka, H.Seki, J.Ogawa, S.Fukui, T.Sato, K.Yokoyama
  • Organizer: Applied Superconductivity Conference (ASC 2010)
  • Year and Date: 2010-08-03