2010 Fiscal Year Final Research Report
Thermal nanoimprinting of ultraprecision glass-optical devices
| Project/Area Number |
20560071
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Shinshu University |
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Principal Investigator |
ARAI Masahiro Shinshu University, 工学部, 教授 (30260532)
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| Co-Investigator(Renkei-kenkyūsha) |
ITO Hiroaki 信州大学, 工学部, 助教 (70534981)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 熱インプリント成形 / ガラスデバイス / 有限要素法 / 熱粘弾性 / クリープ試験 / 数値シミュレーション / 引張強度 |
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| Research Abstract |
Some experimental testing and numerical simulations by FEM for thermal imprinting of glass-optical devices were investigated. Thermo-viscoelastic property of the glass material was estimated using compression creep tests. In this study, D263 was used as glass material. Glass thermal imprint tests were carried out with amorphous carbon dies that were given to line & space or micro-lens array pattern machined by focused ion beam (FIB). The optimum condition of imprinting temperature which given appropriate transcription profile of the glass was investigated. Moreover, numerical simulations for thermal imprinting of the glass were carried out by finite element method. Comparing experimental results with numerical ones, the transcription of height of groove or micro-lens obtained by experimental tests approximately agreed with numerical values. In addition, the relationship between tensile strength, temperature and strain rate was obtained by the uniaxial tensile test.
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