2010 Fiscal Year Final Research Report
Development of High Response Shape Memory Alloy Micro-Actuator Material
| Project/Area Number |
20560083
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | University of Hyogo |
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Principal Investigator |
INOUE Shozo University of Hyogo, 大学院・工学研究科, 教授 (50193587)
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| Co-Investigator(Renkei-kenkyūsha) |
NAMAZU Takahiro 兵庫県立大学, 大学院・工学研究科, 准教授 (90347526)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 形状記憶合金 / 薄膜 / マイクロアクチュエータ / スパッタリング |
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| Research Abstract |
In order to improve the response speed of Ti-Ni shape memory alloy micro-actuator, we have investigated the mechanical properties of Ti-Ni-X ternary alloy thin films prepared by sputtering. It is confirmed that the 15at% addition of Cu into Ti-Ni alloy is effective to increase their critical stress against plastic deformation and to have a faster actuator response. Furthermore, the diaphragm type micro-actuator using this material showed an actuation response to a pulse current of more than 200Hz.
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