2010 Fiscal Year Final Research Report
Development of scanning nanopipette probe microscope for 0.1 atto little deposition
| Project/Area Number |
20560105
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Shizuoka University |
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Principal Investigator |
IWATA Futoshi Shizuoka University, 工学部, 教授 (30262794)
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| Co-Investigator(Renkei-kenkyūsha) |
NAKAO Hidenobu 独立行政法人物質・材料研究機構, 主任研究員 (80421395)
SASAKI Akira 静岡大学, 工学部, 教授 (80022309)
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| Project Period (FY) |
2008 – 2010
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| Keywords | ナノ・マイクロ加工 / ナノピペット / プローブ / SPM / マニピュレーション / 微細加工 / 堆積微細加工 / 滴下制御 |
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| Research Abstract |
We developed a novel volume control technique for local metal-plating deposition using a scanning probe microscope with a nanopipette probe. The nanopipette probe was filled with CuSO_4 electrolyte solution. A Cu dot was electrochemically deposited on an Au surface by applying a dc bias voltage between the electrolyte solution and the surface. The volume of the deposited Cu dot was dependent on the electric charge during the electrochemical reaction. By controlling the electric charge during the deposition, it was possible to control the volume of the Cu dot.
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