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2010 Fiscal Year Final Research Report

Increase in Adhesion Strength of SiC Film with Super Low Friction Coefficient by Formation Technique of Nano-precipitates at Interface

Research Project

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Project/Area Number 20560134
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionHiroshima University

Principal Investigator

KATO Masahiko  Hiroshima University, 大学院・工学研究院, 准教授 (70274115)

Co-Investigator(Kenkyū-buntansha) SUGETA Atsushi  広島大学, 大学院・工学研究院, 教授 (60162913)
AKEBONO Hiroyuki  広島大学, 大学院・工学研究院, 助教 (50447215)
Project Period (FY) 2008 – 2010
KeywordsSiC薄膜 / はく離強度 / 界面制御 / アンカー効果
Research Abstract

In this research, improvement of delamination strength of sputtered film was attempted by utilizing an anchor effect of fine conical precipitates formed at interface. Fine conical precipitates were formed on a tool steel substrate (JIS : SKH51) by sputter etching treatment under various conditions, and the relationship between the etching condition and shape of the precipitates was investigated. The result showed that height and radius of the precipitates was controllable by etching time, power, and pressure. The delamination strength of the amorphous SiC film formed on the substrates with fine conical precipitates using helicon sputtering apparatus was measured by micro edge-indent method. The delamination strength of the SiC film varied with the size and density of the precipitates, and exceeded that of un-etched specimens, when appropriate size precipitates were formed on the substrate.

  • Research Products

    (4 results)

All 2010 2009 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (2 results) Remarks (1 results)

  • [Journal Article] Measurement of Delamination Energy of Sputtered SiC Film Coated on Tool Steel Substrate2010

    • Author(s)
      Masahiko KATO, Koumei FUJIOKA, Hiroyuki AKEBONO, Atsushi SUGETA
    • Journal Title

      Journal of JSEM vol.10

      Pages: 141-145

    • Peer Reviewed
  • [Presentation] SiCスパッタ薄膜のはく離強度に及ぼす界面微細突起物の影響2010

    • Author(s)
      加藤昌彦, 林真人, 曙紘之, 菅田淳
    • Organizer
      日本材料学会第59期学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2010-05-22
  • [Presentation] Improvement of Delamination Energy of Sputtered SiC Film by Forming Conical Precipitates at Interface2009

    • Author(s)
      加藤昌彦, 林真人, 曙紘之, 菅田淳
    • Organizer
      4th International Symposium on Advanced Fluid/Solid Science and Technology in Experimental Mechanics
    • Place of Presentation
      Niigata
    • Year and Date
      2009-11-28
  • [Remarks] ホームページ等

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Published: 2012-01-26   Modified: 2015-07-22  

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