2010 Fiscal Year Final Research Report
Fabrication Process Improvement of Multi-channel Optical MEMS Switch Using a Belt-shaped Thin Film Mirror
| Project/Area Number |
20560233
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
OKUTSU Kazutoshi 東京工業大学, 大学院・総合理工学研究科, 助教 (40401567)
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| Co-Investigator(Kenkyū-buntansha) |
SATO Kaiji 東京工業大学, 大学院・総合理工学研究科, 准教授 (00215766)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 光スイッチ / MEMS / 薄膜 / 静電力 / ミラー |
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| Research Abstract |
This paper describes fabrication process improvement of a multi-channel optical MEMS switch using a belt-shaped thin film mirror. This switch has advantages of simple structure and no wear. However its suitable fabrication process is not clarified yet and the prototype switches were manually assembled. In this paper, the suitable fabrication process was discussed and the effects of the fabrication process improvement on the switching accuracy and the driving voltage were examined. The optical switch made through the improved fabrication process controlled the spot position more accurately than the previous switches. In addition, the minimum driving voltage of the switch reduced. These experimental results quicken the realization of the multi-channel optical MEMS switch using a belt-shaped thin film mirror.
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