2010 Fiscal Year Final Research Report
Study on high resolution inchworm-type multi-DOF actuator and precise position measurement
| Project/Area Number |
20560245
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
TORII Akihiro Aichi Institute of Technology, 工学部, 准教授 (70267889)
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| Project Period (FY) |
2008 – 2010
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| Keywords | インチワーム / 超精密位置決め / 超精密位置計測 / 圧電素子 / 位置計測素子 / アクチュエータ |
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| Research Abstract |
An inchworm-type actuator, which was operated by the adhesion of electromagnets and deformation of piezoelectric elements, was developed. Flexible motion could be realized by six combined piezoelectric elements. Six-DOF motion was realized by the principle of a parallel mechanism and three-DOF displacement was realized by the principle of an inchworm. The position of the actuator was measured by the use of laser light sources and position sensitive detectors, which were installed on the actuator. The position was measured by the position of the light sources and the output of the detectors. The accuracy was about a few microns.
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