2010 Fiscal Year Final Research Report
Non-volatile resonant frequency control of vibratory MEMS structures using ferroelectric polarization
| Project/Area Number |
20560299
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Kyoto Institute of Technology |
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Principal Investigator |
YAMASHITA Kaoru Kyoto Institute of Technology, 工芸科学研究科, 准教授 (40263230)
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| Co-Investigator(Kenkyū-buntansha) |
FUJITA Takayuki 兵庫県立大学, 工学研究科, 准教授 (50336830)
NODA Minoru 京都工芸繊維大学, 工芸科学研究科, 教授 (20294168)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 圧電体 / 強誘電体 / 分極 / MEMS / 共振 |
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| Research Abstract |
Frequency control technique of resonant MEMS (micro-electro-mechanical systems) structures using piezoelectric materials has been proposed. The role of a static deflection of the piezoelectric diaphragm structure has been clarified in the relationship between the piezoelectrically generated stress and the resonant behavior. The results have led a novel ultrasonic measurement technique with much higher accuracy than a conventional one.
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