2010 Fiscal Year Final Research Report
Study on fabrication technology of high-density silicon nanocrystals and its application to photonics elements
| Project/Area Number |
20560316
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Gunma University |
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Principal Investigator |
HANAIZUMI Osamu Gunma University, 大学院・工学研究科, 教授 (80183911)
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| Co-Investigator(Kenkyū-buntansha) |
MIURA Kenta 群馬大学, 大学院・工学研究科, 准教授 (40396651)
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| Co-Investigator(Renkei-kenkyūsha) |
YOSHIKAWA Masahito 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (40354948)
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| Project Period (FY) |
2008 – 2010
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| Keywords | シリコン / ナノ結晶 / イオン注入 / 発光 / フォトニック結晶 / 光デバイス |
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| Research Abstract |
We observed ultraviolet (UV)-light emission from Si-ion-implanted fused-silica substrates under an implanting condition different from our previous work. A single UV-light photoluminescence (PL) peak has been achieved. The implantation energy was 80 keV, with the implantation dose 2 x 10^<17> ions/cm^2. The Si-ion-implanted samples were annealed in ambient air at 1100, 1150, 1200, and 1250℃ for 25 min. UV-PL spectra having peaks around a wavelength of 370 nm were observed from all samples at room temperature under excitation using a He-Cd laser (・=325 nm). The maximum intensity was observed after annealing at 1250℃, and the longer wavelength PL peak around 800 nm observed from the samples annealed at 1100 and 1150℃ disappeared by annealing above 1200℃. We have successfully obtained only the UV-light emission peaks by selecting the proper annealing temperatures. UV-light emitting materials are expected to be useful as light sources for next-generation optical-disk systems whose data densities are higher than Blu-ray Disc systems.
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[Presentation] Y-junction waveguides for 1.5-・m band fabricated by proton beam writing2010
Author(s)
M.Uehara, H.Kiryu, K.Miura, O.Hanaizumi, T.Satoh, Y.Ishii, K.Takano, T.Ohkubo, M.Kohka, A.Yamazaki, W.Kada, A.Yokoyama, T.Kamiya, H.Nishikawa
Organizer
6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P37
Place of Presentation
Kiryu
Year and Date
2010-12-10
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[Presentation] Fabrication and evaluation of light-emitting SiO_2 substrates implanted with Ge ions2010
Author(s)
T.Shinagawa, A.V.Umenyi, S.Kikuchi, M.Aiba, K.Inada, K.Miura, O.Hanaizumi, S.Yamamoto, K.Kawaguchi, M.Yoshikawa
Organizer
6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P38
Place of Presentation
Kiryu
Year and Date
2010-12-10
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[Presentation] Fabrication of polymer optical waveguides using proton beam writing2009
Author(s)
Y.Machida, M.Uehara, K.Miura, O.Hanaizumi, Y.Ishii, T.Satoh, K.Takano, T.Ohkubo, A.Yamazaki, A.Inouye, M.Koka, A.Yokoyama, T.Kamiya, T.Kojima, H.Nishikawa
Organizer
5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 2P27
Place of Presentation
Kiryu
Year and Date
2009-12-11
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