2010 Fiscal Year Final Research Report
Sensing system using optical micromachine
| Project/Area Number |
20560404
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Measurement engineering
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| Research Institution | Kanazawa Institute of Technology |
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Principal Investigator |
IWAOKA Hideto Kanazawa Institute of Technology, ものづくり研究所, 教授 (70440485)
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| Co-Investigator(Renkei-kenkyūsha) |
HIGURASHI Eiji 東京大学, 先端科学技術研究センター, 准教授 (60372405)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 計測システム |
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| Research Abstract |
Basic concept by the results of marketing research and computer simulations of the elements of the sensing system, optical fiber system and the ideas for several sensor heads were developed. A MEMS vibrating sensor, temperature sensor, is excited by optical pulses from an optical fiber connected to a laser diode. The optical pulse frequency is tuned to the resonant frequency of the MEMS sensor. The resonant frequency of this vibrating sensor can reflect physical quantities such as temperature, pressure, and gas density. The main features of the sensing system are its ability to be used as an isolated sensor with no electronic circuit or power supply. At the last year (2010), the result of this research was reported at international conference, and the technical survey based international conferences were developed.
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