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2012 Fiscal Year Final Research Report

Sensing Based on Nanomechanical systems coupled with stochastic resonance

Research Project

  • PDF
Project/Area Number 20676001
Research Category

Grant-in-Aid for Young Scientists (S)

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionTohoku University

Principal Investigator

ONO Takahito  東北大学, 大学院・工学研究科, 教授 (90282095)

Project Period (FY) 2008 – 2012
Keywordsマイクロマシン
Research Abstract

Bistable states of the vibration amplitude of micro/nano-resonators are realized using its mechanical nonlinearity. Those resonators exhibit stochastic resonance state by applying external noise, in addition, respond to external stimulus. It is shown that the resonators can be applicable to robust sensors. For same purpose, an array of resonators with self-sensing function has been developed. In addition, possibility of mechanical logic devices has been shown using mechanically coupled resonators.

  • Research Products

    (21 results)

All 2012 2011 2010 2009 2008 Other

All Journal Article (11 results) (of which Peer Reviewed: 11 results) Presentation (7 results) Book (2 results) Remarks (1 results)

  • [Journal Article] Pico calorimeter for detection of heat produced in an individual brown fat cell2012

    • Author(s)
      Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, and Takahito Ono
    • Journal Title

      Applied Physics Letters

      Volume: 100 Pages: 154104-1~154104-4

    • DOI

      DOI:10.1063/1.3701720

    • Peer Reviewed
  • [Journal Article] Piezoresistive Silicon Microresonator for Measurements of Hydrogen Adsorption in Carbon Nanotubes2012

    • Author(s)
      Zhonglie An, Masayoshi Esashi, and Takahito Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Pages: 116601-4

    • DOI

      DOI:10.1143/JJAP.51.116601

    • Peer Reviewed
  • [Journal Article] Fabrication of Hermetically Packaged Silicon Resonator on LTCC Substrate2012

    • Author(s)
      Nguyen Van TOAN, Hidetoshi MIYASHITA, Masaya TODA, Yusuke KAWAI, and Takahito ONO
    • Journal Title

      Microsystem technologies

      Volume: 23

    • DOI

      DOI:10.1007/s00542-012-1716-5

    • Peer Reviewed
  • [Journal Article] Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid2012

    • Author(s)
      Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono
    • Journal Title

      Microsystem technologies

    • DOI

      DOI:10.1007/s00542-012-1698-3

    • Peer Reviewed
  • [Journal Article] Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures2011

    • Author(s)
      Yonggang Jiang, Masayoshi Esashi, Takahito Ono
    • Journal Title

      電気学会論文誌E

      Volume: 131 Pages: 195-196

    • DOI

      DOI:10.1541/ieejsms.131.195

    • Peer Reviewed
  • [Journal Article] Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz2010

    • Author(s)
      Akihiro Takahashi, Masayoshi Esashi and Takahito Ono
    • Journal Title

      Nanotechnology

      Volume: 21 Pages: 405502-1-405502-

    • DOI

      DOI:10.1088/0957-4484/21/40/405502

    • Peer Reviewed
  • [Journal Article] Mechanically coupled synchronized resonators for resonant sensing applications2010

    • Author(s)
      Jinyang Feng, Xiongying Ye, Masayoshi Esashi, and Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 20 Pages: 115001-1~115001-5

    • Peer Reviewed
  • [Journal Article] Temperature-dependent mechanical and electrical properties of boron-doped2009

    • Author(s)
      Yonggang Jiang, Takahito Ono, and Masayoshi Esashi
    • Journal Title

      piezoresistive nanocantilevers, Journal of Micromechanics and Microengineering

      Volume: 19 Pages: 065030

    • DOI

      DOI:10.1088/0960-1317/20/11/115001

    • Peer Reviewed
  • [Journal Article] Thermal imaging with tapping mode using a bimetal oscillator formed at the endof a cantilever2009

    • Author(s)
      Sang-Jin Kim, Takahito Ono, and Masayoshi Esashi
    • Journal Title

      Review of Scientific Instruments

      Volume: 80 Pages: 033703-1-033703-6

    • DOI

      DOI:10.1063/1.3095680

    • Peer Reviewed
  • [Journal Article] Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection2008

    • Author(s)
      Y. G. Jiang, T. Ono, and M. Esashi
    • Journal Title

      Measurement Science and Technology

      Volume: 19 Pages: 084011-1~084011~5

    • DOI

      DOI:1088/0957-0233/19/8/084011

    • Peer Reviewed
  • [Journal Article] Noise-enhanced Sensing of Light and Magnetic Force Based on a Nonlinear Silicon Microresonator2008

    • Author(s)
      Takahito Ono, Yusuke Yoshida, Yong-Gang Jiang, and Masayoshi Esashi
    • Journal Title

      Applied Physics Express

      Volume: 1 Pages: 123001-1-123001-3

    • DOI

      DOI:10.1143/APEX.1.123001

    • Peer Reviewed
  • [Presentation] Resonant Thermal Sensor for a living cell in liquid2012

    • Author(s)
      N. Inomata, M. Toda, M. Sato, A. Ishijima, and T. Ono
    • Organizer
      The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-04-01
  • [Presentation] Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element2012

    • Author(s)
      Keitaro Tanno, Yusuke Kawai, and Takahito Ono
    • Organizer
      The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-04-01
  • [Presentation] Microchanneled resonant heat sonsor for a living cell2011

    • Author(s)
      Masaya Toda, Tomoyuki Otake, Naoki Inomata, Takahito Ono
    • Organizer
      Microprocess and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-10-26
  • [Presentation] Coupled mechanical Si resonators and its entrainment condition2011

    • Author(s)
      Keitaro Tanno and Takahito Ono
    • Organizer
      Microprocess and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-10-25
  • [Presentation] Nonlinear Micromechanical Bistable Resonator Capable of Vibration Switching by Thermomechanical Noise at Room Temperature2010

    • Author(s)
      Yusuke Yoshida and Takahito Ono
    • Organizer
      The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, Perth
    • Place of Presentation
      Western Australia
    • Year and Date
      2010-07-07
  • [Presentation] Noise-enhanced sensing using micromechanical nonlinear resonator2009

    • Author(s)
      Yusuke Yoshida and Takahito Ono
    • Organizer
      The 2009 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sendai
    • Year and Date
      2009-10-07
  • [Presentation] Development of 100-nm-thick self-sensing nanocantilever and characterization of the temperaturedependence of the piezoresistivity and conductivity2009

    • Author(s)
      Yonggang Jiang, Takahito Ono, and Masayoshi Esashi
    • Organizer
      Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-24
  • [Book] Encyclopedia of Nanotechnology, Springer Science+Business Medhia B.V.2012

    • Author(s)
      Takahito Ono, Masayoshi Esashi
    • Total Pages
      1-13
    • Publisher
      Microfabricated Probe Technology
  • [Book] ナノ計測を可能にするツール,応用物理81,12012

    • Author(s)
      小野崇人
    • Total Pages
      45-50
    • Publisher
      日本応用物理学会
  • [Remarks]

    • URL

      http://www.nme.mech.tohoku.ac.jp/

URL: 

Published: 2014-08-29  

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