A study and development on MQW strain control MEMS for wavelength tunable laser

2009 Fiscal Year Final Research Report

• Project/Area Number: 20710099
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: The University of Tokyo
• Principal Investigator: HIGO Akio The University of Tokyo, 先端科学技術研究センター, 助教 (60451895)
• Project Period (FY): 2008 – 2009
• Keywords: マイクロ・ナノデバイス / マイクロマシン / 量子井戸

Research Abstract

In this study, we introduce of micro electro mechanical systems (MEMS) to conventional compound semiconductor laser structures. At first, we proposed and fabricated the MEMS-grating structure with comb drive actuators but the estimate of wavelength shifts is quite small. Therefore, in order to apply external force to multiple quantum well (MQW) structure by MEMS, we developed the surface active bonding technology and compound semiconductor chips were successfully bonded on silicon. We also measured optical emitting by current injection from silicon to MQW.

Research Products

• [Presentation] Semiconductive Properties of Heterointegration of InP/InGaAs on High Doped Silicon Wire Waveguide for Silicon Hybrid Laser (2009)
  • Author(s): Ling-Han Li, Ryo Takigawa, Akio Higo, Masanori Kubota, Eiji Higurashi, Masakazu Sugiyama, Yoshiaki Nakano
  • Organizer: International Conference on Indium Phosphide and Related Materials (IPRM 2009)
  • Place of Presentation: Newport Beach, CA, USA
  • Year and Date: 20090510-20090514
• [Presentation] SiフォトニックMEMS gratingの作製方法についての検討 (2009)
  • Author(s): 石塚彰, 肥後昭男, 中野義昭
  • Organizer: 3-134, 平成21年電気学会全国大会
  • Year and Date: 20090317-20090319
• [Presentation] A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems (2009)
  • Author(s): A. Higo, K. Takahashi, H. Fujita, Y. Nakano, H. Toshiyoshi
  • Organizer: 15th Int. Conf. on Solid-State Sensors
  • Year and Date: 20090000
• [Presentation] MEMS Integrated with Silicon Photonic Wire Waveguides (2009)
  • Author(s): A. Higo, H. Toshiyoshi, H. Fujita, Y. Nakano
  • Organizer: in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit
  • Place of Presentation: Phoenix Seagaia Resort, Miyazaki, Japan
  • Year and Date: 20090000
• [Presentation] Design and fabrication of optical waveguide modulator integrated with silicon wire waveguide (2008)
  • Author(s): A. Higo, H. Fujita, H. Toshiyoshi, Y. Nakano
  • Organizer: in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
  • Place of Presentation: TAYIH Landis Hotel, Tainan, Taiwan
  • Year and Date: 20080622-20080625
• [Presentation] Design and Simulation of Hybrid Direct Coupling Laser with 3-5 MQW and Silicon Waveguide by Alignment Free Direct Bonding (2008)
  • Author(s): Ling-Han Li, Akio Higo, Masanori Kubota, Masakazu Sugiyama, Yoshiaki Nakano
  • Organizer: in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
  • Place of Presentation: TAYIH Landis Hotel, Tainan, Taiwan
  • Year and Date: 20080622-20080625