2009 Fiscal Year Final Research Report
Diagnostics of debris from laser-produced plasma with tin droplet target for EUV light source
| Project/Area Number |
20760025
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kyushu University |
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Principal Investigator |
NAKAMURA Daisuke Kyushu University, システム情報科学研究院, 助教 (40444864)
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| Project Period (FY) |
2008 – 2009
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| Keywords | EUV / レーザー生成プラズマ / ドロップレット / LIF |
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| Research Abstract |
The ablation dynamics of tin micro-droplet target irradiated by double pulses was investigated for extreme ultraviolet lithography source. Debris from Sn droplet target was visualized by the laser-induced fluorescence imaging and shadowgraph imaging.
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Research Products
(5 results)
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[Presentation] Diagnostics of Ablation Dynamics of Tin micro-Droplet for EUV Lithography Light Source2009
Author(s)
D. Nakamura, K. Okazaki, T. Akiyama, K. Toya, A. Takahashi, T. Okada, T. Yanagida, Y. Ueno, Y. Sasaki, T. Suganuma, M. Nakano, H. Komori, A. Sumitani, A. Endo
Organizer
CLEO Pacific Rim 2009
Year and Date
20090900
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