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2009 Fiscal Year Final Research Report

Slicing of silicon by direct irradiation of laser beam transmitted through optical fiber

Research Project

  • PDF
Project/Area Number 20760082
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

HIDAI Hirofumi  Tokyo Institute of Technology, 大学院・理工学研究科, 助教 (60313334)

Project Period (FY) 2008 – 2009
Keywordsレーザ / ファイバ / スライス
Research Abstract

Solar cells and semiconductor substrates are manufactured by sliding ingots. Nowadays ingots are sliced by wire saw. Kerf loss by the slicing was approximately half of the ingots and the reduction of kerf loss is strongly required. In this project the reduction of karf loss was tried by using the laser light delivered through optical fibers.

  • Research Products

    (1 results)

All 2008

All Journal Article (1 results) (of which Peer Reviewed: 1 results)

  • [Journal Article] 光ファイバ伝送レーザ光を直接利用したシリコンのレーザアシストエッチング加工2008

    • Author(s)
      山下祥宣, 細野高史, 比田井洋史, 戸倉和
    • Journal Title

      精密工学会誌 74,5

      Pages: 463-467

    • Peer Reviewed

URL: 

Published: 2011-06-18   Modified: 2016-04-21  

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