2009 Fiscal Year Final Research Report
Development of Ultraprecise Positioning XY Table Composed of Pneumatic Servo Bearing Actuators
| Project/Area Number |
20760100
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Doshisha University |
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Principal Investigator |
HIRAYAMA Tomoko Doshisha University, 理工学部, 准教授 (00340505)
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| Project Period (FY) |
2008 – 2009
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| Keywords | 軸受 / アクチュエータ / 超精密位置決め / XYテーブル |
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| Research Abstract |
We proposed and developed 'pneumatic servo bearing actuator' as a new actuator for ultraprecise positioning. This actuator mainly consisted of a pneumatic servo valve and an aerostatic thrust bearing. It overcame some demerits such as low stiffness and poor response. We confirmed the minimum positioning resolution of the prototype actuator with spherical bearing was 2 nm. As a practical application of the pneumatic servo spherical bearing actuator, a prototype of ultraprecise X-Y stage which consisted of six pneumatic servo bearing actuators was developed. As a result, we confirmed the minimum positioning resolution of the X-Y stage was about 10 nm even without any feedback controls.
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