Study on fabrication technology of photonic crystals composed of visible-light emitting tantalum-oxide thin films

2009 Fiscal Year Final Research Report

• Project/Area Number: 20760217
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electron device/Electronic equipment
• Research Institution: Gunma University
• Principal Investigator: MIURA Kenta Gunma University, 大学院・工学研究科, 助教 (40396651)
• Project Period (FY): 2008 – 2009
• Keywords: 酸化タンタル / エルビウム / 緑色発光 / スパッタリング / フォトニック結晶

Research Abstract

Er-doped TaOx films were prepared by using rf magnetron sputtering. Visible light emission was observed from the films after annealing under excitation with a He-Cd laser (λ=325nm). Two peaks having wavelengths around 550 nm and 670 nm were observed from the films annealed at 800-1100oC. The strongest intensity of the 550-nm (green) peak was obtained from the film with 0.96 mol% of Er concentration after annealing at 900oC for 20 min. Such sputtered films which emit visible light can be useful as high-index materials for novel active devices using autocloned photonic crystals.

Research Products

• [Journal Article] Intense photoluminescence from erbium-doped tantalum oxide thin films deposited by sputtering (2009)
  • Author(s): M.K. Singh, G. Fusegi, K. Kano, J.P. Bange, K. Miura, O. Hanaizumi
  • Journal Title: IEICE Electronics Express vol.6,no.23 Pages: 1676-1682
  • Peer Reviewed
• [Journal Article] Modified finite-difference time-domain method for triangular lattice photonic crystals (2009)
  • Author(s): A.V. Umenyi, K. Miura, O. Hanaizumi
  • Journal Title: IEEE/OSA Journal of Lightwave Technology vol.27,no.22 Pages: 4995-5001
  • Peer Reviewed
• [Journal Article] Observation of blue-light emission from tantalum oxide films deposited by radio-frequency magnetron sputtering (2008)
  • Author(s): K. Miura, H. Miyazaki, O. Hanaizumi
  • Journal Title: IEICE Transactions on Electronics vol.E91-C,no.10 Pages: 1669-1672
  • Peer Reviewed
• [Journal Article] Fabrication of ultraviolet-light emitting Si/SiO2 multilayered films using radio-frequency magnetron sputtering and high-temperature annealing (2008)
  • Author(s): K. Miura, Y. Kato, H. Hoshino, O. Hanaizumi
  • Journal Title: Thin Solid Films vol.516,no.21 Pages: 7732-7734
  • Peer Reviewed
• [Presentation] プロトンビーム描画による波長1. 5μm帯用PMMA導波路の試作(II) (2010)
  • Author(s): 三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 平塚
  • Year and Date: 2010-03-18
• [Presentation] プロトンビーム描画による波長1. 5・m帯用シングルモードPMMA導波路 (2009)
  • Author(s): 三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
  • Organizer: 電子情報通信学会光エレクトロニクス研究会
  • Place of Presentation: 東京
  • Year and Date: 2009-12-18
• [Presentation] Fabrication and optimization of green light emitting Er-TaO, films (2009)
  • Author(s): M.K. Singh, G. Fusegi, K. Kano, J.P. Bange, K. Miura, O. Hanaizumi
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-11
• [Presentation] Structural analysis of RF sputtered Er doped Ta2O5 films (2009)
  • Author(s): J.P. Bange, M.K. Singh, K. Kano, K. Miura, O. Hanaizumi
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-11
• [Presentation] Fabrication of polymer optical waveguides using proton beam writing (2009)
  • Author(s): Y. Machida, M. Uehara, K. Miura, O. Hanaizumi, Y. Ishii, T. Satoh, K. Takano, T. Ohkubo, A. Yamazaki, A. Inouye, M. Koka, A. Yokoyama, T. Kamiya, T. Kojima, H. Nishikawa
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-11
• [Presentation] Fabrication and evaluation of wavelength-conversion devices composed of zinc oxide thin films (2009)
  • Author(s): M. Tanaka, H. Miyazaki, K. Miura, O. Hanaizumi
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-11
• [Presentation] Visible-light emitting tantalum-oxide films produced by radio-frequency sputtering (2009)
  • Author(s): K. Miura, K. Kano, G. Fusegi, M.K. Singh, O. Hanaizumi
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-11
• [Presentation] Application of Si/SiO2 materials to photonic devices (2009)
  • Author(s): O. Hanaizumi K. Miura
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-10
• [Presentation] Novel photonic crystal waveguides utilizing Si-ion implantation (2009)
  • Author(s): S. Kawashiri, M. Honmi, A.V. Umenyi, T. Shinagawa, K. Miura, O. Hanaizumi, S. Yamamoto, A. Inouye, M. Yoshikawa
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-10
• [Presentation] FDTD analysis of fused-silica substrates fabricated by Si-ion implantation for photonic crystals devices (2009)
  • Author(s): A.V. Umenyi, S. Kawashiri, K. Miura, O. Hanaizumi
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-10
• [Presentation] Study on fabrication and conversion-efficiency improvement of ZnO thin film solar cells (2009)
  • Author(s): N. Hirasawa, K. Miura, O. Hanaizumi
  • Organizer: 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
  • Place of Presentation: Kiryu
  • Year and Date: 2009-12-10
• [Presentation] UV and visible light emitting fused-silica substrates fabricated by Si-ion implantation (2009)
  • Author(s): A. Umenyi, M. Honmi, K. Miura, O. Hanaizumi, S. Yamamoto, A. Inouye, M. Yoshikawa
  • Organizer: 16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009)
  • Place of Presentation: Tokyo
  • Year and Date: 2009-09-14
• [Presentation] スパッタリング法で作製したEr:TaOx薄膜の可視発光特性 (2009)
  • Author(s): 三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山
  • Year and Date: 2009-09-10
• [Presentation] プロトンビーム描画による波長1. 5μm帯用PMMA導波路の試作 (2009)
  • Author(s): 三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山
  • Year and Date: 2009-09-08
• [Presentation] Light emission from Er-doped Ta-oxide films fabricated by RF-sputtering (2009)
  • Author(s): M.K. Singh, G. Fusegi, K. Kanou, K. Miura, O. Hanaizumi
  • Organizer: The International Conference on Physics of Optical Materials and Devices (IC0M2009
  • Place of Presentation: Herceg Novi, Montenegro
  • Year and Date: 2009-08-28
• [Presentation] Siイオン注入により発現する溶融石英基板からの紫外発光 (2009)
  • Author(s): 三浦健太, 本美勝史, 花泉修, 山本春也, 井上愛知, 吉川正人
  • Organizer: 第42回照明学会全国大会
  • Place of Presentation: 札幌
  • Year and Date: 2009-08-28
• [Presentation] スパッタリング法によるErドープTaOx薄膜の作製とその発光特性 (2009)
  • Author(s): 三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
  • Organizer: 電子情報通信学会光エレクトロニクス研究会
  • Place of Presentation: 仙台
  • Year and Date: 2009-08-21
• [Presentation] Simple finite-difference time-domain method for triangular lattice photonic crystals (2009)
  • Author(s): A.V. Umenyi, K. Miura, O. Hanaizumi
  • Organizer: The 14th Optoelectronics and Communications Conference (OECC 2009)
  • Place of Presentation: Hong Kong
  • Year and Date: 2009-07-15
• [Presentation] A new approach to simple and easy FDTD method for triangular lattice photonic crystals (2009)
  • Author(s): アマラチュクウメイニ, 三浦健太, 花泉修
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: つくば
  • Year and Date: 2009-03-31
• [Presentation] Modified FDTD method for triangular lattice photonic crystals (2008)
  • Author(s): アマラチュクバレンタインウメイニ, 三浦健太, 花泉修
  • Organizer: 電子情報通信学会光エレクトロニクス研究会
  • Place of Presentation: 東京
  • Year and Date: 2008-12-19
• [Presentation] Fabrication of blue-light emitting tantalum oxide films by radio-frequency sputtering (2008)
  • Author(s): K. Miura, H. Miyazaki, O. Hanaizumi
  • Organizer: IEEE Photonics Global 2008
  • Place of Presentation: Singapore
  • Year and Date: 2008-12-10
• [Presentation] SiO2媒質中に分散形成されたナノ結晶シリコンが実現する青色発光体 (2008)
  • Author(s): 三浦健太, 花泉修, 山本春也, 高野勝昌, 杉本雅樹, 吉川正人
  • Organizer: 第3回高崎量子応用研究シンポジウム
  • Place of Presentation: 高崎
  • Year and Date: 2008-10-09
• [Presentation] Improvement of emission efficiency of Si:SiO2 sputtered films by introducing two-dimensional periodic structures (2008)
  • Author(s): K. Miura, T. Hayakawa, O. Hanaizumi
  • Organizer: The 6th International Conference on Optics-photonics Design and Fabrication (ODF'08)
  • Place of Presentation: Taipei, Taiwan
  • Year and Date: 2008-06-10