2010 Fiscal Year Final Research Report
Study on the development of position sensor for ultra precision control
| Project/Area Number |
20760271
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Measurement engineering
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
UCHIDA Yoshihisa Aichi Institute of Technology, 工学部, 准教授 (20367626)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 位置センサ / 回折格子 / 位置決め / アライナー / 変位センサ / 角度センサ |
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| Research Abstract |
In this research, ultra precision position sensors for manufacturing of electric and mechanical devices and controlling of atoms and molecules were proposed. These sensors based on the diffraction phenomenon have simple configuration and high repetition accuracy. Automatic alignment sensor and automatic position sensor were developed. Multi-axis automatic sensing and control for 2 axes position senor and angle sensor were realized. The positioning accuracies of the standard deviations 0.07nm (X-axis) and 0.23nm (Y-axis) are estimated.
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