Subatomic 3D Ultra-Precision Measurement by Creation of Optical Comb Dimensional Conversion Optics and In-Situ Autonomous Calibration Method

2023 Fiscal Year Final Research Report

• Project/Area Number: 20H00211
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
• Research Institution: Tohoku University
• Principal Investigator: Gao Wei 東北大学, 工学研究科, 教授 (70270816)
• Co-Investigator(Kenkyū-buntansha): 清水 裕樹 北海道大学, 工学研究院, 教授 (70606384) ; 松隈 啓 東北大学, 工学研究科, 准教授 (90728370)
• Project Period (FY): 2020-04-01 – 2024-03-31
• Keywords: 精密位置決め / 加工計測 / 超精密計測

Outline of Final Research Achievements

An ultra-sensitive absolute XYZ position comb that uses an unequal-pitch absolute grid and the spectral action of a chromatic aberration lens to detect the XY-axis and Z-axis absolute position information of measurement points by converting it into an optical frequency scale comb have been proposed. An ultra-sensitive absolute XYZ position comb that detects the XY-axis and Z-axis absolute position information of a measurement point by converting it into an optical frequency scale comb has been newly proposed, a wavefront-division optical interference optics system to generate the large-area unequal-pitch absolute grid required for this system has been constructed. Furthermore, a new concept of "in-situ autonomous calibration system" that integrates measurement and calibration to simultaneously realize reliability assurance by directly connecting the optical frequency comb light source of the XYZ position comb to the national standard for "time" via GPS satellites have established.

Free Research Field

生産工学・加工学

Academic Significance and Societal Importance of the Research Achievements

光周波数域における独創的な差動型検出手法で，高感度かつロバストな極高精度XYZ絶対位置計測を世界に先駆けて実現できる．これは超精密光計測の学術分野を格段に発展させるもので，生産工学のみならず機械工学の幅広い分野への波及効果が高い．また絶対型XYZ位置コムにより，次世代「つながる工場」のコンセプトを超精密ものづくりに適用しIoT社会に波及させる．あらゆる計測量の中で一番高確度な「時間」の国家標準と直結した最高精度の信頼性保証サービスを，どこでも，いつでも必要な人に提供できる社会的インフラ基盤が実現し，国家標準を社会全体で容易に共有できることになり，今までにない価値を生み出すことができる．