Development of micro three-dimensional fabrication by laser-assisted electrophoretic deposition and plasmon heated sintering

2022 Fiscal Year Final Research Report

• Project/Area Number: 20H02044
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Shizuoka University
• Principal Investigator: Iwata Futoshi 静岡大学, 電子工学研究所, 教授 (30262794)
• Co-Investigator(Kenkyū-buntansha): 小野 篤史 静岡大学, 電子工学研究所, 教授 (20435639) ; 中澤 謙太 静岡大学, 工学部, 助教 (50824520)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: レーザートラップ / 電気泳動堆積 / ナノ微粒子 / アディティブマニュファクチャリング / 微細加工

Outline of Final Research Achievements

This research is to establish a method of localized heating and sintering of metallic nanoparticles on a substrate surface while depositing them on the substrate surface in laser-assisted electrophoretic deposition (LAEPD), which is a method of microstructuring with sub-micron precision. The LAEPD method is a stereolithographic fabrication method in which nanoparticles trapped in the focused laser spot are deposited locally on the substrate by electrophoretic deposition. In this study, we developed a method to locally heat and sinter nanoparticle aggregates in-process by irradiating the nanoparticles during deposition with a near-infrared laser beam. Experimental results demonstrated that the Young's modulus of the deposited microstructures was improved by using the developed method, and that this method can be a practical microfabrication technique.

Free Research Field

微細加工

Academic Significance and Societal Importance of the Research Achievements

これまでの金属ナノ微粒子の物理吸着での微細立体造形であったLAEPD法に対して，本研究は焼結しながら高効率に堆積することで機械物性を飛躍的に改善した．焼結手法としてコロイド溶液の劣化や沸騰を避けるため，堆積した金属ナノ微粒子凝集体の吸収波長帯である近赤外レーザーを照射することで，堆積した微粒子のみを焼結させる手法を実現した．このように，ナノ微粒子の電気泳動堆積とプラズモン加熱焼結を組み合わせた本手法は学術的意義が高く，また本手法は電子デバイスやMEMSプロセスなど工学分野での応用展開が期待できるなど社会的意義も高い．