Development of a Nanoscale Thermal Transport Measurement Method Using pulsed TEM

2023 Fiscal Year Final Research Report

• Project/Area Number: 20H02093
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 19020:Thermal engineering-related
• Research Institution: National Institute for Materials Science
• Principal Investigator: KAWAMOTO Naoyuki 国立研究開発法人物質・材料研究機構, マテリアル基盤研究センター, 主幹研究員 (70570753)
• Co-Investigator(Kenkyū-buntansha): 三留 正則 国立研究開発法人物質・材料研究機構, 技術開発・共用部門, 室長 (50354410)
• Project Period (FY): 2020-04-01 – 2024-03-31
• Keywords: 電子顕微鏡 / 熱輸送計測 / パルス電子線 / 熱電対 / 温度波 / 位相 / ゼーベック効果 / 熱拡散

Outline of Final Research Achievements

In this study, we developed a pulse STEM-based Thermal Analytical Microscopy (p-STAM) method based on Transmission Electron Microscopy (TEM). By incorporating an Electrostatic Dose Modulor (EDM) into the existing TEM setup, we successfully generated thermal waves in the TEM specimens. Temperature measurements were conducted using our uniquely designed nanothermocouple, and the phase and amplitude of the thermal waves were measured using a lock-in amplifier. Furthermore, we developed a system to record phase and amplitude images during pulse electron beam scanning, enabling the quantitative measurement of thermal diffusivity in TEM specimens.

Free Research Field

電子顕微鏡

Academic Significance and Societal Importance of the Research Achievements

本測定手法の開発により、TEM試料上の任意の区間における定量的な熱拡散率測定を実現しており、従来法では測定が難しかった極小材料や界面の熱輸送評価が可能になり、放熱用複合材料、熱電材料などの様々な材料・デバイスの開発に役立つ。