Fabrication of carbon nanotube bipolar-FET by dielectrophoresis for sensor application

2022 Fiscal Year Final Research Report

• Project/Area Number: 20H02164
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21030:Measurement engineering-related
• Research Institution: Kyushu University
• Principal Investigator: Suehiro Junya 九州大学, システム情報科学研究院, 教授 (70206382)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: カーボンナノチューブ / 電界効果型トランジスタ / 誘電泳動 / ガスセンサ

Outline of Final Research Achievements

In this study, we fabricated bipolar field-effect transistors (CNT-FETs) with carbon nanotubes (CNTs) as channels by dielectrophoretic integration method and attempted to develop an application technology for sensitive detection of NO2, an environmental pollutant gas, with high sensitivity.
As a result, two types of reactions were observed: a steady-state current shift in the positive direction in the hole conduction region due to channel potential modulation and a sudden decrease in mutual conductance in the electronic conduction region due to Schottky barrier modulation, and NO2 gas with a concentration of 100 ppb at room temperature was successfully detected in a few minutes.

Free Research Field

静電気応用工学

Academic Significance and Societal Importance of the Research Achievements

①大気汚染の原因となる環境汚染ガスNO2を高感度で迅速に検出するセンサーの開発に貢献できる。
②近年、有機系のナノ半導体材料に大きな注目が集まっている。中でもカーボンナノチューブやグラフェンシートなどのカーボンナノ材料は、バイオセンサや電子デバイスへの応用が活発に研究されている。本研究の成果はこれら有機系ナノ半導体材料をチャンネルに用いたFETのセンシングメカニズム解明の一助となり得る。