革新的な高機能・高信頼ダイヤンモンド MEMSの基盤構築と磁気センサの応用

2022 Fiscal Year Annual Research Report

• Project/Area Number: 20H02212
• Research Institution: National Institute for Materials Science
• Principal Investigator: 廖 梅勇 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (70528950)
• Co-Investigator(Kenkyū-buntansha): 戸田 雅也 東北大学, 工学研究科, 准教授 (40509890)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: ダイヤモンド / MEMS / 磁気センサ

Outline of Annual Research Achievements

In this proposal, we aim to develop diamond MEMS magnetic sensors with high reliability above 500oC and high magnetic sensitivity. We developed the heterointegration of magnetostrictive material FeGa on diamond MEMS resonators and created the novel transducer physical concept of on-chip self-sensing enhancing actuation for high-temperature magnetic sensing. In addition, we also developed a facile method to fabricate all-diamond MEMS resonators with ultra-high quality factors over 1 million at room temperature.Eventualy, we achieved diamond MEMS transducers with a high-sensitivity larger than 100 Hz/mT from room temperature to 500oC and a low noise level of ~ nT/Hz^1/2 up to 300oC. The minimum fluctuation of the resonance frequency is 1.9ppm at room temperature and 2.3 ppm at 300oC.

Research Progress Status

令和4年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

令和4年度が最終年度であるため、記入しない。

Research Products

• [Journal Article] Unconventional Giant “Magnetoresistance” in Bosonic Semiconducting Diamond Nanorings (2023)
  • Author(s): Zhang Gufei、Zulkharnay Ramiz、Ke Xiaoxing、Liao Meiyong、Liu Liwang、Guo Yujie、Li Yejun、Rubahn Horst‐G?nter、Moshchalkov Victor V.、May Paul W.
  • Journal Title: Advanced Materials Volume: 35 Pages: 2211129~2211129
  • DOI: 10.1002/adma.202211129
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film (2023)
  • Author(s): Zhang Zilong、Zhao Wen、Chen Guo、Toda Masaya、Koizumi Satoshi、Koide Yasuo、Liao Meiyong
  • Journal Title: Advanced Functional Materials Volume: 33 Pages: 2300805~2300805
  • DOI: 10.1002/adfm.202300805
  • Peer Reviewed
• [Journal Article] Effect of gas pressure on the quality-factor of single-crystal diamond micro cantilevers (2022)
  • Author(s): Chen Yinling、Sang Liwen、Koizumi Satoshi、Koide Yasuo、Liu Xiaoxi、Liao Meiyong
  • Journal Title: Diamond and Related Materials Volume: 129 Pages: 109340～109340
  • DOI: 10.1016/j.diamond.2022.109340
  • Peer Reviewed
• [Journal Article] Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers (2022)
  • Author(s): Zhang Zilong、Sang Liwen、Huang Jian、Wang Linjun、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Carbon Volume: 200 Pages: 401～409
  • DOI: 10.1016/j.carbon.2022.08.086
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Stress effect on the resonance properties of single-crystal diamond cantilever resonators for microscopy applications (2022)
  • Author(s): Shen Xiulin、Lv Zhenfei、Ichikawa Kimiyoshi、Sun Huanying、Sang Liwen、Huang Zhaohui、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Ultramicroscopy Volume: 234 Pages: 113464～113464
  • DOI: 10.1016/j.ultramic.2022.113464
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Elastic strain engineered nanomechanical GaN resonators with thermoelastic dissipation dilution up to 600?K (2022)
  • Author(s): Sun Huanying、Sang Liwen、Shen Xiulin、Yang Xuelin、Li Tiefu、You J. Q.、Shen Bo、Liao Meiyong
  • Journal Title: Journal of Applied Physics Volume: 131 Pages: 054502～054502
  • DOI: 10.1063/5.0080227
  • Peer Reviewed / Int'l Joint Research
• [Presentation] Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers (2022)
  • Author(s): Guo Chen, Zilong Zhang, Liwen Sang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
  • Organizer: 2023年第70回応用物理学会春季学術講演会
• [Presentation] High-temperature diamond MEMS magnetic sensor with on-chip actuation and sensing (2022)
  • Author(s): Zilong Zhang, Guo Chen, Liwen Sang, Yasuo Koide, Satoshi Koizumi and Meiyong Liao
  • Organizer: 第70回応用物理学会春季学術講演会
• [Presentation] Air damping effect on the quality factor of single-crystal diamond MEMS resonators (2022)
  • Author(s): CHEN, Yingling, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, 劉 小晰, LIAO, Meiyong
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] Effect of pressure on quality-factor of single-crystal diamond micro cantilevers (2022)
  • Author(s): CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Xiaoxi Liu, LIAO, Meiyong
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC2022)
  • Int'l Joint Research
• [Presentation] Enhancement of Magnetic Sensing Performances of Single-crystal Diamond Resonators through Various Interlayers (2022)
  • Author(s): ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC2022)
  • Int'l Joint Research
• [Presentation] Efficient etching of diamond by oxygen annealing toward high-Q factor diamond MEMS resonators (2022)
  • Author(s): CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Xiaoxi Liu, LIAO, Meiyong
  • Organizer: E-MRS Spring Meeting 2022 https://www.european-mrs.com/advanced-carbon-materials-emrs. 2022
  • Int'l Joint Research / Invited