Design of sp-bonds in functional BN films by arc discharge with independent parameter control

2022 Fiscal Year Final Research Report

• Project/Area Number: 20H02481
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 26050:Material processing and microstructure control-related
• Research Institution: Kyoto University
• Principal Investigator: Eriguchi Koji 京都大学, 工学研究科, 教授 (70419448)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 窒化ホウ素 / プラズマ / 結合状態 / 光学特性 / 電気特性

Outline of Final Research Achievements

This study focuses on designing functional BN films with various sp2-sp3 bonding network using reactive plasma-assisted coating (RePAC) method where process parameters (e.g. the energy and flux of incident ions) are independently controlled. Stable BN/Si structures were fabricated with anti-delamination feature. It was found that the extinction coefficient and tunneling leakage current strongly depends on the sp2-sp3 bonding phase. Time evolution of leakage current under constant voltage stress indicated characteristic electron trapping in the BN films. These findings imply that the RePAC system is one of the promising methods which realize functional BN films.

Free Research Field

ナノ材料信頼性物理学

Academic Significance and Societal Importance of the Research Achievements

様々な機能材料の高信頼性化には，材料中の原子間結合の制御が重要な工学的課題である．窒化ホウ素（BN）膜は，2Dから3D構造を取りうる特異な材料であるが，未だ幅広い工学的応用には至っていない．本研究では，高密度プラズマ源のプロセスパラメータの独立制御により，様々なsp2－sp3結合相比を有するBN膜形成を実現し，ナノネットワーク構造と光学特性（消衰係数）やトンネルリーク電流との相関解明を進めた．その結果，従来の機械特性に加え，sp2－sp3結合相比に応じて光学特性やトンネルリーク電流が制御できることが明らかになった．この事実は，将来の機能性BN膜実現に寄与する重要な知見である．