Development of novel electrodeposition system through ion transport using solid polyelectrolyte membrane

2022 Fiscal Year Final Research Report

• Project/Area Number: 20H02487
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 26050:Material processing and microstructure control-related
• Research Institution: Konan University
• Principal Investigator: Akamatsu Kensuke 甲南大学, フロンティアサイエンス学部, 教授 (60322202)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 電気めっき / 低環境負荷 / 高分子電解質 / 廃液フリー

Outline of Final Research Achievements

In this study, solid (electrolyte film)-liquid (electrolyte) interface was introduced as the ion transport phase in the electroplating process, and "interfacial concentration effect" was newly added as the driving force for ion transport process. The ion-transport kinetics was experimentally and theoretically studied based on interfacial structural model. As a result, we found that ion penetration between the electrolyte film and the solution is the rate-determining step in this reaction and the rate constant for each reaction was successfully calculated. As a site-selective deposition tool, the developed method can be used to fabricate microelectronic and even semiconductor circuit elements in a manner that resembles stamping deposition, and is suitable for small-lot, on-demand, and multi-product microfabrication.

Free Research Field

電気化学

Academic Significance and Societal Importance of the Research Achievements

本研究により、固液界面における化学反応速度を支配する新たな物質移動制御機構が解明されたことから、電極間のイオン輸送に関する概念的発展が期待されるとともに、電気化学および物理化学等における基礎学問分野に対して新たな学理を提供できる。また本系は、支持電解質や添加剤を使用せず廃液をほとんど出さないため、回路基板製造におけるエネルギー投入を飛躍的に低減できる。本法は従来法に比べて、回路基板単位面積あたりの二酸化炭素排出量を1/3に、廃液量を1/30以下にすることが可能であり、近年の小ロット・多品種少量生産の要求に対応する革新的ブレイクスルーをもたらすと期待できる。