2022 Fiscal Year Final Research Report
Transmission electron microscopy for soft materials with electron counting technique
| Project/Area Number |
20H02624
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Review Section |
Basic Section 29020:Thin film/surface and interfacial physical properties-related
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
KIMOTO Koji 国立研究開発法人物質・材料研究機構, 先端材料解析研究拠点, 拠点長 (90354399)
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| Co-Investigator(Kenkyū-buntansha) |
吉川 純 国立研究開発法人物質・材料研究機構, 先端材料解析研究拠点, 主任研究員 (20435754)
Cretu Ovidiu 国立研究開発法人物質・材料研究機構, 先端材料解析研究拠点, 研究員 (60770112)
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| Project Period (FY) |
2020-04-01 – 2023-03-31
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| Keywords | electron microscopy / TEM / structure analysis / soft materials / EELS / electron counting / STEM |
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| Outline of Final Research Achievements |
Transmission electron microscopy (TEM) is effective for nano structure analysis; however, its application to so-called soft materials is limited due to electron beam damage during TEM observation. In this study, we developed basic techniques of electron-counting electron microscopy and applied them to various materials. First, we quantitatively measured the signal intensity produced by a single electron at various (6 types) cameras for TEM at different acceleration voltage (30-300 kV). Next, we incorporated these measurements into software that automatically converts the measured intensity from arbitrary units to the number of electrons. Using this equipment, local crystal structure analysis by STEM/TEM, local temperature measurement by EELS, and high-frequency STEM observation were performed.
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| Free Research Field |
material characterization
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| Academic Significance and Societal Importance of the Research Achievements |
電子計数型透過電子顕微鏡法にすることにより、STEM/TEM像観察やEELS分析等で様々な利点がある。電子を一つ一つ数えることができれば、ソフトマテリアルに対し有効な高感度計測となる。また、ドーズ量[e-/Å2]から電子線損傷を議論することが可能になり、ポアソン分布に基づき電子数Nから予想される量子ノイズ(√N/N)を議論できる。その結果、計測システムにおいて、計測ノイズと量子ノイズを個別に議論できる。本研究による電子計数型計測は、ソフトマテリアル計測における「試料損傷」「感度」「計測ノイズ」等の諸課題を解決するための基盤技術を確立したと言える。
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