Local structure characterization of InGaN/GaN multi quantum wells by using synchrotron radiation nanobeam focused by compound refractive lens

2022 Fiscal Year Final Research Report

• Project/Area Number: 20H02644
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 30010:Crystal engineering-related
• Research Institution: Japan Synchrotron Radiation Research Institute
• Principal Investigator: Kimura Shigeru 公益財団法人高輝度光科学研究センター, 回折・散乱推進室, 主席研究員 (50360821)
• Co-Investigator(Kenkyū-buntansha): 隅谷 和嗣 公益財団法人高輝度光科学研究センター, 回折・散乱推進室, 研究員 (10416381)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 屈折レンズ / 放射光 / ナノビーム / InGaN / 多重量子井戸

Outline of Final Research Achievements

The purpose of this study was to construct a system that enables simultaneous measurement of real-space mapping of local reciprocal space maps and InKα fluorescence X-ray mapping, and to demonstrate the effectiveness of the system. New refractive lenses made of Si was fabricated to realize a beam size of 590 nm (horizontal) × 320 nm (vertical), and the system was successfully constructed. However, because it took time to develop the refractive lenses, it was not possible to elucidate the correlation between lattice relaxation and In composition fluctuation in (1-100) InGaN/GaN multiple quantum well structures due to lack of time.

Free Research Field

結晶評価

Academic Significance and Societal Importance of the Research Achievements

Si-MEMS技術は日本が世界的に進んでいる技術であり，この技術で世界に先駆けて深さ100 μmの屈折レンズを作製し、サブミクロン集光が実現できたことは，本研究で提案したナノビーム回折と蛍光X線マッピングの同時測定だけでなく、高エネルギーX線用集光素子として、さまざまな材料評価に威力を発揮すると期待でき、その波及効果は、学術的にも社会的にも大きい成功である。